JPH0159732B2 - - Google Patents

Info

Publication number
JPH0159732B2
JPH0159732B2 JP56014302A JP1430281A JPH0159732B2 JP H0159732 B2 JPH0159732 B2 JP H0159732B2 JP 56014302 A JP56014302 A JP 56014302A JP 1430281 A JP1430281 A JP 1430281A JP H0159732 B2 JPH0159732 B2 JP H0159732B2
Authority
JP
Japan
Prior art keywords
mask
wafer
alignment
pattern
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56014302A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57128924A (en
Inventor
Yoshihiko Kyokuni
Masaki Tsukagoshi
Tetsuo Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56014302A priority Critical patent/JPS57128924A/ja
Publication of JPS57128924A publication Critical patent/JPS57128924A/ja
Publication of JPH0159732B2 publication Critical patent/JPH0159732B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP56014302A 1981-02-04 1981-02-04 Mask positioning and equipment for the same Granted JPS57128924A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56014302A JPS57128924A (en) 1981-02-04 1981-02-04 Mask positioning and equipment for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56014302A JPS57128924A (en) 1981-02-04 1981-02-04 Mask positioning and equipment for the same

Publications (2)

Publication Number Publication Date
JPS57128924A JPS57128924A (en) 1982-08-10
JPH0159732B2 true JPH0159732B2 (enExample) 1989-12-19

Family

ID=11857296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56014302A Granted JPS57128924A (en) 1981-02-04 1981-02-04 Mask positioning and equipment for the same

Country Status (1)

Country Link
JP (1) JPS57128924A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63197953A (ja) * 1987-02-10 1988-08-16 Orc Mfg Co Ltd マスクフイルムとワ−ク基板との自動位置決め方法
JP2006145030A (ja) * 2004-10-22 2006-06-08 Celaya Emparanza Y Galdos Internacional Sa 家庭で用いる加圧水蒸気発生装置用安全遮断機構

Also Published As

Publication number Publication date
JPS57128924A (en) 1982-08-10

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