JPH0157804B2 - - Google Patents

Info

Publication number
JPH0157804B2
JPH0157804B2 JP8159582A JP8159582A JPH0157804B2 JP H0157804 B2 JPH0157804 B2 JP H0157804B2 JP 8159582 A JP8159582 A JP 8159582A JP 8159582 A JP8159582 A JP 8159582A JP H0157804 B2 JPH0157804 B2 JP H0157804B2
Authority
JP
Japan
Prior art keywords
flow rate
fluid
control mechanism
control
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8159582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58200308A (ja
Inventor
Takao Takeuchi
Akira Usui
Hideki Kondo
Makoto Morikawa
Yoshio Matsuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Ebara Densan Ltd
Original Assignee
Ebara Corp
Ebara Densan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Ebara Densan Ltd filed Critical Ebara Corp
Priority to JP8159582A priority Critical patent/JPS58200308A/ja
Publication of JPS58200308A publication Critical patent/JPS58200308A/ja
Publication of JPH0157804B2 publication Critical patent/JPH0157804B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Flow Control (AREA)
JP8159582A 1982-05-17 1982-05-17 流体配管系の流量制御方法 Granted JPS58200308A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8159582A JPS58200308A (ja) 1982-05-17 1982-05-17 流体配管系の流量制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8159582A JPS58200308A (ja) 1982-05-17 1982-05-17 流体配管系の流量制御方法

Publications (2)

Publication Number Publication Date
JPS58200308A JPS58200308A (ja) 1983-11-21
JPH0157804B2 true JPH0157804B2 (enExample) 1989-12-07

Family

ID=13750666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8159582A Granted JPS58200308A (ja) 1982-05-17 1982-05-17 流体配管系の流量制御方法

Country Status (1)

Country Link
JP (1) JPS58200308A (enExample)

Also Published As

Publication number Publication date
JPS58200308A (ja) 1983-11-21

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