JPH0157501B2 - - Google Patents
Info
- Publication number
- JPH0157501B2 JPH0157501B2 JP25831284A JP25831284A JPH0157501B2 JP H0157501 B2 JPH0157501 B2 JP H0157501B2 JP 25831284 A JP25831284 A JP 25831284A JP 25831284 A JP25831284 A JP 25831284A JP H0157501 B2 JPH0157501 B2 JP H0157501B2
- Authority
- JP
- Japan
- Prior art keywords
- magazine
- chamber
- elevator
- rail
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003466 welding Methods 0.000 claims description 24
- 230000007246 mechanism Effects 0.000 claims description 18
- 238000012545 processing Methods 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 10
- 210000000078 claw Anatomy 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 8
- 230000032258 transport Effects 0.000 description 9
- 230000003028 elevating effect Effects 0.000 description 7
- 239000000969 carrier Substances 0.000 description 4
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 230000007723 transport mechanism Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002746 orthostatic effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Landscapes
- Lining Or Joining Of Plastics Or The Like (AREA)
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25831284A JPS61136246A (ja) | 1984-12-06 | 1984-12-06 | 半導体パツケ−ジ封止装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25831284A JPS61136246A (ja) | 1984-12-06 | 1984-12-06 | 半導体パツケ−ジ封止装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61136246A JPS61136246A (ja) | 1986-06-24 |
| JPH0157501B2 true JPH0157501B2 (cs) | 1989-12-06 |
Family
ID=17318498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25831284A Granted JPS61136246A (ja) | 1984-12-06 | 1984-12-06 | 半導体パツケ−ジ封止装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61136246A (cs) |
-
1984
- 1984-12-06 JP JP25831284A patent/JPS61136246A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61136246A (ja) | 1986-06-24 |
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