JPH0157501B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention provides semiconductor packages such as ICs and LSIs,
The present invention relates to a semiconductor package sealing device for sealing a semiconductor package by covering it with a metal cover (shell) made of cobalt alloy or the like.

[Conventional technology]

Recently, there has been a type of device in which a semiconductor package such as an IC or LSI is sealed with a substantially rectangular metal shell. In that case, the four sides of the shell are welded to the device, but no device has been proposed to perform this work efficiently and reliably, and the development of one has been desired.

[Problem to be solved by the invention]

As mentioned above, heretofore, there has been no suitable apparatus for sealing a semiconductor package with a shell.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a semiconductor package sealing apparatus that can automatically perform semiconductor sealing work by shell welding efficiently and reliably.

[Means to solve the problem]

In the present invention, a preheat chamber that can be kept in a sealed state is installed on one side, and a processing chamber is provided with a magazine ejection chamber on the opposite side, and gloves are provided in the vicinity of the preheat chamber and in the vicinity of the magazine ejection chamber of the processing chamber. A handling port with a a pusher that enters the elevator mechanism and pushes out the board, and a transport mechanism that passes the rail between the elevator mechanisms and has a claw that transports the board placed on the rail, is attached to the rail, Below the center of the rail,
A chuck mechanism is provided that holds the device floating above the board during welding and swings and rotates it by 90 degrees, and is further disposed in the processing chamber at a position near the chuck mechanism on the outside of the rail. A shell feeder is installed on the gauging stand to supply one shell to the other, and a pair of welding electrodes that open and close are arranged to sandwich the chuck mechanism. This is a semiconductor package sealing device that is equipped with a welding robot that transfers the device onto a mechanical device.

[Effect]

Devices supported on boards and stacked together in a magazine are first supplied into a preheating chamber.
After being preheated there, the magazines are transported to a fixed position on an elevator. Then, the boards are intermittently pushed out onto the rail one by one by a pusher, and are transported one pitch by a transport mechanism. Then, at the welding position, the device is lifted off the board by a chuck mechanism, and welding is first performed on two opposing sides by a welding robot. The device is then rotated 90 degrees and the remaining two sides are welded. After the welding process for all devices carried on the board has been completed, the board is sent by the transport mechanism into a magazine for collection that is waiting on the elevator on the side of the magazine retrieval chamber.

〔Example〕

Preferred embodiments of the present invention will be described with reference to the drawings.

In the figure, reference numeral 1 denotes a preheating chamber that is kept in a sealed state, and includes a magazine insertion door 2 and a sliding door 3 that partitions a processing chamber 4 into the chamber. The preheating chamber 1 is installed on one side of the processing chamber 4 to preheat the device and remove moisture from its surface prior to welding. Reference numeral 5 denotes a magazine, the left and right sides of which are open, and a large number of boards 5b loaded with devices 5a are stacked at predetermined intervals and stored inside the magazine. On both sides of the board 5b, hook holes are provided at regular intervals, into which claws of a conveyor, which will be described later, engage. Reference numeral 6 denotes a bellows-shaped connecting portion that connects the preheating chamber 1 and the processing chamber 4. Reference numeral 7 denotes a plurality of handling ports installed on the side surface of the processing chamber 4, which are equipped with gloves (not shown) extending into the processing chamber 4. 8 is preheating chamber 1
This is a pedestal on which the magazine 5 taken out from the magazine 5 is placed, and a positioning stopper 9 is installed at its front end.
Reference numeral 10 denotes an elevator, which is raised and lowered via an elevating body 13 that is screwed into a screw shaft 12 that is rotationally driven by a pulse motor 11 (FIGS. 1 and 2). 14, 14 are standing walls of the elevator 10, and hold the magazine 5 placed on the elevator 10. Reference numerals 15 and 15 denote presser rings made of urethane or the like for pressing the magazine 5 to bring it into close contact with the upright wall 14;
7, 17 (Fig. 2). 1
Reference numeral 8 denotes a cylinder for rotating the rotating rods 17, 17, and the rod is fixed to a drive rod 19 that connects the lower portions of the rotating rods 17, 17. Therefore, when the cylinder 18 operates, the lower parts of the rotating rods 17, 17 are pressed through the drive rod 19, and the rotating rods 1
7 and 17 rotate around the support shaft 16. the result,
Presser rings 15, 15 attached to the upper parts of the rotation rods 17, 17 press the magazine 5 toward the upright wall 14. 20 is a sensor for detecting the rotation speed of the screw shaft 12;
The vertical position of the elevator 10 is controlled based on the detected rotational speed. Reference numerals 21 and 22 indicate guide shafts for supporting the ascending and descending movements of the elevator 10, which are slidably inserted into LM balls 23 and 24 installed on the lower side of the elevator 10. 25
is a pusher, which moves forward and backward in response to the ascending and descending operations of the elevator 10, and serves to intermittently push out the boards 5b in the magazine 5 one by one.
The pusher 25 is driven forward and backward by a pusher cylinder 26.

Next, according to FIGS. 1 and 3, the magazine 5
The configuration of the conveying section that conveys the board 5b pushed out from the board 5b one pitch at a time will be explained. 27, 27 is
The rails are arranged parallel to each other from the magazine insertion side to the magazine ejection port side of the processing chamber 4, and are installed on the rail installation frame 27a. The board 5b slides across these rails 27. 28 and 29 are carriers, front and rear (with respect to the direction of board movement)
A claw 30 that engages with a hook hole provided on the side of the board 5b is installed facing downward. 31,3
Reference numeral 2 denotes lifting cylinders attached to the top plates of movable frames 33 and 34, respectively, which operate synchronously to raise and lower the conveyors 28 and 29 regularly and simultaneously.
35 is a rod that supports the lifting and lowering of the conveyors 28 and 29. Female thread portions 36, 36a are provided on one side or both sides of the movable frames 33, 34,
In addition, the side plate 3 of the rail installation frame 27a
A screw rod 39 pivotally supported between 7 and 38 is screwed together. The illustrated female screw portions 36 and 36a have a half-split shape and are installed on the inner side pieces of the movable frames 33 and 34, respectively. The screw rod 39 is rotationally driven by a pulse motor 42 installed outside the side plate 37. The pulse motor 42 is connected to the board 5
It is preferable that the number of rotations can be adjusted according to the pitch of the hooking hole b. Guide rods 40 and 41 are passed between the side plates 37 and 38, and are slidably inserted into the movable frames 33 and 34, respectively, thereby supporting the movement of the movable frames 33 and 34.

Next, the structure of the chuck portion will be explained with reference to FIGS. 4 and 5. 57 is a pulse motor,
The rotary plate 56 and the mechanism installed thereon are driven to rotate reciprocally through 90 degrees. On the rotating plate 56, the upper end is
Four guide shafts 52 and 53 are erected and connected by a top plate 55 having an open center. An elevating cylinder 51 is further disposed on the rotary plate 56, and the cylinder rod is slidable on the elevating plate 5 with respect to the four guide shafts 52, 53.
Fixed to 0. At least one of the guide shafts 52 and 53 is provided with a coupling cylinder 54 whose lower end is fixed to the elevating plate 50 and into which the guide shaft is slidably inserted. The upper end of the coupling tube 54 is fixed to a square frame 50a that is slidable on the four guide shafts 52, 53. Therefore, when the elevating plate 50 is moved up and down by the elevating cylinder 51, the rectangular frame 50a is also moved up and down together through the coupling cylinder 54. 43 and 44 are chucks, which are a pair of guide rods 4 passed horizontally within the square frame 50a.
5, 45, opens and closes along these lines, and is constantly pressed inward by a spring (not shown). Guide protrusions 43a and 44a each having a triangular cross section are provided on both sides of the opposing upper ends of the upright portions of the chucks 43 and 44. At the bottom of the chucks 43 and 44, there is a cam follower 4 that is in contact with a cam 46 that moves up and down.
7,48 are installed. The cam 46 is operated by an opening/closing cylinder 49 installed on the elevating plate 50.
It can be moved up and down. 58 is a sensor for detecting the presence or absence of the device 5a on the rails 27, 27.

Returning to FIG. 1, 59 is a welding robot, which is equipped with a vacuum nozzle 60 that attracts the shell 5c and transports it to the welding position, and a mechanism that raises and lowers the electrodes 61, 61 and opens and closes the electrodes 61, 61. 62 is a shell feeder that feeds one shell onto the gauging stand 63. Reference numeral 64 denotes a magazine 5 for collecting the board 5b loaded with the welded devices 5a, and an elevator for raising the board 5b by one pitch, which has the same mechanism as the elevator 10 described above. Reference numeral 65 denotes a magazine ejection chamber, which includes a sliding door 66 and an ejection door (not shown).

In the above configuration, the processing steps will be explained in order. First, the board 5b carrying the device 5a is preheated in the preheating chamber 1 while being loaded in the magazine 5. The magazine 5 is supplied in a preheated state into the preheat chamber 1 by opening the magazine insertion door 2, and is heated after the magazine insertion door 2 is closed and the preheat chamber 1 is sealed. After this preheating process is completed, open the sliding door 3, insert your hand into the glove of the handling port 7, pull out the magazine 5 from the preheating chamber 1, place it on the pedestal 8, and place its front end against the positioning stopper 9 to position it. do. Next, the magazine 5 is pushed inward along the stopper 9 and placed on the elevator 10 waiting at the same height as the pedestal 8. Positioning there is performed by bringing it into contact with the upright wall 14. At this time, the presser ring 15 is located below the elevator 10, but when the cylinder 18 moves forward, the rotating rod 17 rotates upward from the elevator 10 around the support shaft 16 via the drive rod 10. , the presser ring 15 presses the magazine 5 toward the upright wall 14 and holds it firmly (see FIG. 2).
When the device is started, the pusher cylinder 26 operates to pull the pusher 25 into the magazine 5, and the lowermost board in the magazine 5 is
Push out b to the specified position. On the other hand, in the transport section, the transport bodies 28 and 29 are waiting at the raised position by the action of the lifting cylinders 31 and 32, and the board 5 is below them.
When time b arrives, the lift cylinders 31 and 32 move downward, and the claws 30 of the carriers 28 and 29 engage with the hook holes on the sides of the board 5b. Subsequently, when the pulse motor 42 is started and rotates the threaded rod 39, the female threaded portions 36, 36 screwed therein are rotated.
The movable frames 33 and 34 move in the direction of the arrow in FIG. As a result, the board 5b is driven forward by one pitch via the claw 30. The transport body 29 transports the board 5b, which has been transported by the transport body 28, further forward. Thereafter, as the conveyors 28 and 29 rise under the action of the lifting cylinders 31 and 32, the claw 30 comes off the hook hole of the board 5b, and the pulse motor 42 drives the threaded rod 39 in the reverse direction. Transport body 2
8 and 29 retreat and return to the original standby position. Thereafter, the above operation is repeated intermittently. Welding of the shell 5c is performed between the carriers 28, 28. That is, when the device 5a reaches the welding position as the board 5b moves forward, the vacuum nozzle 60 attracts the shell 5c on the gauging stand 63 and moves onto the device 5a. Therefore, the fourth
The lifting cylinder 51 shown in the figure performs an upward movement,
If you raise the chucks 43 and 44 with them closed,
The heads of the chucks 43 and 44 push up the device 5a and lift it off the board 5b. At that time, the sensor 58 detects whether the device 5a has floated correctly.
If the board 5a is detected and does not levitate correctly,
After moving forward one pitch, lift cylinder 5 again.
Activate 1. When the opening/closing cylinder 49 moves upward with the device 5a correctly floating, the cam 46 rises and acts to open the cam followers 47 and 48 following this movement. As a result, the chucks 43, 44 integrated with the cam followers 47, 48 open. Then, the guide projections 43a provided at the upper ends of the chucks 43, 44,
44a inserts between the leads of the device 5a to position the device 5a in the orthostatic zone for welding (sensing out) and hold it there. Since the guide protrusions 43a and 44a have a planar triangular shape, they can reliably and smoothly insert themselves between the leads and slightly move the device 5a to the correct position. Incidentally, when the device 5a is raised, the vacuum nozzle 60 that is above it and attracts the shell 5c is also pushed up (vacuum nozzle 6
0 has flexibility. ) Then pulse motor 5
7 rotates 90 degrees, turns the device 5a facing in the direction of travel sideways, and first welds the device 5a from its longitudinal direction (of course, it may be reversed). During welding, the electrodes 61, 61 of the welding robot 59 are connected to the device 5a.
(See Figure 1). When welding in the longitudinal direction is completed, the vacuum nozzle 60 releases the shell 5c, and the pulse motor 5
7 is reversed to make the device 5a vertical again, and then welding in the short direction is performed. Thereafter, the lifting cylinder 51 moves downward to set the device 5a again in the original loading position on the board 5b. At this time, the guide protrusions 43a, 44a catch on the runner (later removed) connecting the lower ends of the leads, so that the device 5a can be reliably returned to the loading hole of the board 5b. When the chucks 43 and 44 reach their lowering ends (the position shown in FIG. 4) and the opening/closing cylinder 49 moves downward to pull down the cam 46, the cam followers 47 and 48, which are pressed inward by the springs,
(Chucks 43, 44) follow the cam 46 and approach, and the chucks 43, 44 come into contact again. When the welding is completed, the carriers 28 and 29 move the board 5b forward one pitch by the above-described operation. In this way, shell welding work is performed one after another, and one board 5
The work is completed for all devices 5a on b, and 1
The board 5b that has been advanced toward the pitch is finally pressed at its rear end by the front claw 30a,
It is pushed into an empty collection magazine waiting on the elevator 64. elevator 64
increases by one pitch each time the board 5b is pushed in. When the collection magazine is full, the user inserts his hand through the rear handling port 7 and grasps it, opens the sliding door 66, and transfers it into the magazine removal chamber 65. And magazine ejection chamber 6
Open the eject door 5 and take out the magazine. This device repeats such operations.

〔Effect of the invention〕

The present invention is as described above, and has the effect of automatically and efficiently performing semiconductor sealing work by shell welding.

[Brief explanation of drawings]

Fig. 1 is a plan view of the device according to the present invention, Fig. 2 is a front view showing the structure of the elevator and pusher, Fig. 3 is a partially sectional front view showing the structure of the conveyance section, and Fig. 4 is the chuck mechanism section. FIG. 5 is a partially sectional front view showing the configuration, and a plan view thereof. Explanation of symbols: 1...preheating chamber, 4...processing chamber, 10...
Elevator, 25... Pushya, 28, 29...
Transport body, 30...claw, 43, 44... chuck, 5
9...Welding robot, 62...Shelf feeder, 6
3... Gauging stand, 64... Elevator.

Claims (1)

[Claims] 1. A preheating chamber that can be maintained in a sealed state is installed on one side, and a processing chamber is provided with a magazine ejection chamber on the opposite side, and gloves are provided in the vicinity of the preheating chamber and the magazine ejection chamber of the processing chamber. A handling port is provided, and an elevator mechanism for raising and lowering the magazine is installed in the vicinity of the preheat chamber in the processing chamber and in the vicinity of the magazine ejection chamber, and the elevator mechanism on the preheat chamber side has a handle that allows the magazine to enter the magazine on the elevator. A pusher is attached to the rail to push out the board, and a conveyance mechanism is attached to the rail, which passes the rail between the two elevator mechanisms, and has a claw for conveying the board placed on the rail. At the bottom of the center of
Further, a chuck mechanism that swings and rotates by 90 degrees is provided, and a system that supplies one shell to a gauging stand located in the processing chamber at a position adjacent to the chuck mechanism outside the rail is further provided. In addition to installing the Elfeeder, a welding robot is installed, which is equipped with a pair of welding electrodes that open and close and are arranged to sandwich the chuck mechanism, and which transfers the shell on the gauging stand onto the device on the chuck mechanism. Semiconductor package sealing equipment consisting of