JPH0152735B2 - - Google Patents
Info
- Publication number
- JPH0152735B2 JPH0152735B2 JP55178674A JP17867480A JPH0152735B2 JP H0152735 B2 JPH0152735 B2 JP H0152735B2 JP 55178674 A JP55178674 A JP 55178674A JP 17867480 A JP17867480 A JP 17867480A JP H0152735 B2 JPH0152735 B2 JP H0152735B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- manufacturing
- material layer
- electrochromic
- photosensitive material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 67
- 239000000758 substrate Substances 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 27
- 238000004519 manufacturing process Methods 0.000 claims description 25
- 238000005530 etching Methods 0.000 claims description 18
- 239000003989 dielectric material Substances 0.000 claims description 17
- 239000002904 solvent Substances 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 5
- 238000001771 vacuum deposition Methods 0.000 claims description 4
- 239000012670 alkaline solution Substances 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims 9
- 239000000470 constituent Substances 0.000 claims 1
- 239000007791 liquid phase Substances 0.000 claims 1
- 238000000197 pyrolysis Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 52
- 230000001681 protective effect Effects 0.000 description 14
- 239000010416 ion conductor Substances 0.000 description 12
- 238000004090 dissolution Methods 0.000 description 3
- 229910000314 transition metal oxide Inorganic materials 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000013019 agitation Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000003487 electrochemical reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000006181 electrochemical material Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000005453 ketone based solvent Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000010907 mechanical stirring Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1120779 | 1979-12-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5697322A JPS5697322A (en) | 1981-08-06 |
| JPH0152735B2 true JPH0152735B2 (de) | 1989-11-09 |
Family
ID=4371126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17867480A Granted JPS5697322A (en) | 1979-12-18 | 1980-12-17 | Production of substrate for electrochromic display cell and substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5697322A (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5242093A (en) * | 1975-09-29 | 1977-04-01 | Sharp Corp | Manufacturing method for electro chromic display element |
-
1980
- 1980-12-17 JP JP17867480A patent/JPS5697322A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5242093A (en) * | 1975-09-29 | 1977-04-01 | Sharp Corp | Manufacturing method for electro chromic display element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5697322A (en) | 1981-08-06 |
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