JPH0151923B2 - - Google Patents
Info
- Publication number
- JPH0151923B2 JPH0151923B2 JP17892582A JP17892582A JPH0151923B2 JP H0151923 B2 JPH0151923 B2 JP H0151923B2 JP 17892582 A JP17892582 A JP 17892582A JP 17892582 A JP17892582 A JP 17892582A JP H0151923 B2 JPH0151923 B2 JP H0151923B2
- Authority
- JP
- Japan
- Prior art keywords
- spindle
- reference position
- main body
- body case
- displacement measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 description 6
- 230000003139 buffering effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000284 resting effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Length-Measuring Instruments Using Mechanical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17892582A JPS5967412A (ja) | 1982-10-12 | 1982-10-12 | 変位測定方法および装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17892582A JPS5967412A (ja) | 1982-10-12 | 1982-10-12 | 変位測定方法および装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5967412A JPS5967412A (ja) | 1984-04-17 |
JPH0151923B2 true JPH0151923B2 (fr) | 1989-11-07 |
Family
ID=16057038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17892582A Granted JPS5967412A (ja) | 1982-10-12 | 1982-10-12 | 変位測定方法および装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5967412A (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105091700A (zh) * | 2015-08-07 | 2015-11-25 | 京东方科技集团股份有限公司 | 一种测量工具 |
-
1982
- 1982-10-12 JP JP17892582A patent/JPS5967412A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5967412A (ja) | 1984-04-17 |
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