JPH01500223A - ピエゾ電気的精密位置決め装置 - Google Patents

ピエゾ電気的精密位置決め装置

Info

Publication number
JPH01500223A
JPH01500223A JP62503976A JP50397687A JPH01500223A JP H01500223 A JPH01500223 A JP H01500223A JP 62503976 A JP62503976 A JP 62503976A JP 50397687 A JP50397687 A JP 50397687A JP H01500223 A JPH01500223 A JP H01500223A
Authority
JP
Japan
Prior art keywords
electrode
positioning device
piezoelectric plate
precision positioning
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62503976A
Other languages
English (en)
Japanese (ja)
Inventor
アンダース　ミヒャエル
ハイデン　クリストフ
Original Assignee
エルンスト　ライツ　ヴェツラー　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エルンスト　ライツ　ヴェツラー　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング filed Critical エルンスト　ライツ　ヴェツラー　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング
Publication of JPH01500223A publication Critical patent/JPH01500223A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP62503976A 1986-07-04 1987-07-02 ピエゾ電気的精密位置決め装置 Pending JPH01500223A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19863622557 DE3622557A1 (de) 1986-07-04 1986-07-04 Piezoelektrische feinpositioniervorrichtung
DE3622557.6 1986-07-04

Publications (1)

Publication Number Publication Date
JPH01500223A true JPH01500223A (ja) 1989-01-26

Family

ID=6304430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62503976A Pending JPH01500223A (ja) 1986-07-04 1987-07-02 ピエゾ電気的精密位置決め装置

Country Status (6)

Country Link
US (1) US4859896A (enrdf_load_stackoverflow)
EP (1) EP0273942A1 (enrdf_load_stackoverflow)
JP (1) JPH01500223A (enrdf_load_stackoverflow)
KR (1) KR880701975A (enrdf_load_stackoverflow)
DE (1) DE3622557A1 (enrdf_load_stackoverflow)
WO (1) WO1988000399A1 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3812684A1 (de) * 1988-04-16 1989-11-02 Klaus Prof Dr Dransfeld Verfahren zum schnellen abrastern von unebenen oberflaechen mit dem raster-tunnelmikroskop
GB8928952D0 (en) * 1989-12-21 1990-02-28 Queensgate Instr Ltd Piezo-electric actuators
US5055680A (en) * 1990-04-03 1991-10-08 Lk Technologies, Inc. Scanning tunneling microscope
US5432395A (en) * 1993-08-02 1995-07-11 Bonneville Scientific Incorporated Direct-drive field actuator motors
US5925969A (en) * 1995-10-17 1999-07-20 O'neill; Cormac G. Ferroelectric transducers
DE19548587C2 (de) * 1995-12-23 2002-11-28 Univ Dresden Tech Mikropositioniersystem
CN1306247C (zh) * 2005-08-26 2007-03-21 哈尔滨工业大学 宏／微双重驱动的大行程高速纳米级精度的平面定位系统
US11387402B2 (en) * 2019-08-28 2022-07-12 Signal Solutions, Llc Piezoelectric sensor assembly

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1769360A (en) * 1925-03-24 1930-07-01 Adolph A Thomas Piezo-electric translating device
BE489589A (enrdf_load_stackoverflow) * 1948-06-12
US3902084A (en) * 1974-05-30 1975-08-26 Burleigh Instr Piezoelectric electromechanical translation apparatus
US4128616A (en) * 1977-08-11 1978-12-05 Bell Telephone Laboratories, Incorporated Micropositioners using a crystal having moveable domain walls
DE3168777D1 (en) * 1981-08-10 1985-03-21 Ibm Electric travelling support
US4489609A (en) * 1981-12-08 1984-12-25 National Research Development Corporation Gyroscopes
JPS6032110A (ja) * 1983-08-03 1985-02-19 Victor Co Of Japan Ltd ヘツド位置制御装置
US4678955A (en) * 1986-04-18 1987-07-07 Rca Corporation Piezoelectric positioning device

Also Published As

Publication number Publication date
WO1988000399A1 (en) 1988-01-14
EP0273942A1 (de) 1988-07-13
KR880701975A (ko) 1988-11-07
DE3622557C2 (enrdf_load_stackoverflow) 1988-05-11
DE3622557A1 (de) 1988-02-18
US4859896A (en) 1989-08-22

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