KR880701975A - 압전형 위치 미결정장치 - Google Patents

압전형 위치 미결정장치

Info

Publication number
KR880701975A
KR880701975A KR1019880700141A KR880700141A KR880701975A KR 880701975 A KR880701975 A KR 880701975A KR 1019880700141 A KR1019880700141 A KR 1019880700141A KR 880700141 A KR880700141 A KR 880700141A KR 880701975 A KR880701975 A KR 880701975A
Authority
KR
South Korea
Prior art keywords
positioning device
piezoelectric positioning
piezoelectric
positioning
Prior art date
Application number
KR1019880700141A
Other languages
English (en)
Inventor
안데르스 미하엘
하이덴 크리스토프
Original Assignee
에른스트 라이쯔 벳즐라 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에른스트 라이쯔 벳즐라 게엠베하 filed Critical 에른스트 라이쯔 벳즐라 게엠베하
Publication of KR880701975A publication Critical patent/KR880701975A/ko

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
KR1019880700141A 1986-07-04 1988-02-08 압전형 위치 미결정장치 KR880701975A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19863622557 DE3622557A1 (de) 1986-07-04 1986-07-04 Piezoelektrische feinpositioniervorrichtung
PCT/DE1987/000296 WO1988000399A1 (en) 1986-07-04 1987-07-02 Fine-positioning piezoelectric device

Publications (1)

Publication Number Publication Date
KR880701975A true KR880701975A (ko) 1988-11-07

Family

ID=6304430

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880700141A KR880701975A (ko) 1986-07-04 1988-02-08 압전형 위치 미결정장치

Country Status (6)

Country Link
US (1) US4859896A (ko)
EP (1) EP0273942A1 (ko)
JP (1) JPH01500223A (ko)
KR (1) KR880701975A (ko)
DE (1) DE3622557A1 (ko)
WO (1) WO1988000399A1 (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3812684A1 (de) * 1988-04-16 1989-11-02 Klaus Prof Dr Dransfeld Verfahren zum schnellen abrastern von unebenen oberflaechen mit dem raster-tunnelmikroskop
GB8928952D0 (en) * 1989-12-21 1990-02-28 Queensgate Instr Ltd Piezo-electric actuators
US5055680A (en) * 1990-04-03 1991-10-08 Lk Technologies, Inc. Scanning tunneling microscope
US5432395A (en) * 1993-08-02 1995-07-11 Bonneville Scientific Incorporated Direct-drive field actuator motors
US5925969A (en) * 1995-10-17 1999-07-20 O'neill; Cormac G. Ferroelectric transducers
DE19548587C2 (de) * 1995-12-23 2002-11-28 Univ Dresden Tech Mikropositioniersystem
CN1306247C (zh) * 2005-08-26 2007-03-21 哈尔滨工业大学 宏／微双重驱动的大行程高速纳米级精度的平面定位系统
US11387402B2 (en) * 2019-08-28 2022-07-12 Signal Solutions, Llc Piezoelectric sensor assembly

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1769360A (en) * 1925-03-24 1930-07-01 Adolph A Thomas Piezo-electric translating device
BE489589A (ko) * 1948-06-12
US3902084A (en) * 1974-05-30 1975-08-26 Burleigh Instr Piezoelectric electromechanical translation apparatus
US4128616A (en) * 1977-08-11 1978-12-05 Bell Telephone Laboratories, Incorporated Micropositioners using a crystal having moveable domain walls
DE3168777D1 (en) * 1981-08-10 1985-03-21 Ibm Electric travelling support
FR2517823B1 (fr) * 1981-12-08 1986-10-10 Nat Res Dev Gyroscope oscillant
JPS6032110A (ja) * 1983-08-03 1985-02-19 Victor Co Of Japan Ltd ヘツド位置制御装置
US4678955A (en) * 1986-04-18 1987-07-07 Rca Corporation Piezoelectric positioning device

Also Published As

Publication number Publication date
DE3622557C2 (ko) 1988-05-11
EP0273942A1 (de) 1988-07-13
DE3622557A1 (de) 1988-02-18
US4859896A (en) 1989-08-22
JPH01500223A (ja) 1989-01-26
WO1988000399A1 (en) 1988-01-14

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Legal Events

Date Code Title Description
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid