KR880701975A - 압전형 위치 미결정장치 - Google Patents
압전형 위치 미결정장치Info
- Publication number
- KR880701975A KR880701975A KR1019880700141A KR880700141A KR880701975A KR 880701975 A KR880701975 A KR 880701975A KR 1019880700141 A KR1019880700141 A KR 1019880700141A KR 880700141 A KR880700141 A KR 880700141A KR 880701975 A KR880701975 A KR 880701975A
- Authority
- KR
- South Korea
- Prior art keywords
- positioning device
- piezoelectric positioning
- piezoelectric
- positioning
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19863622557 DE3622557A1 (de) | 1986-07-04 | 1986-07-04 | Piezoelektrische feinpositioniervorrichtung |
PCT/DE1987/000296 WO1988000399A1 (en) | 1986-07-04 | 1987-07-02 | Fine-positioning piezoelectric device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR880701975A true KR880701975A (ko) | 1988-11-07 |
Family
ID=6304430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019880700141A KR880701975A (ko) | 1986-07-04 | 1988-02-08 | 압전형 위치 미결정장치 |
Country Status (6)
Country | Link |
---|---|
US (1) | US4859896A (ko) |
EP (1) | EP0273942A1 (ko) |
JP (1) | JPH01500223A (ko) |
KR (1) | KR880701975A (ko) |
DE (1) | DE3622557A1 (ko) |
WO (1) | WO1988000399A1 (ko) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3812684A1 (de) * | 1988-04-16 | 1989-11-02 | Klaus Prof Dr Dransfeld | Verfahren zum schnellen abrastern von unebenen oberflaechen mit dem raster-tunnelmikroskop |
GB8928952D0 (en) * | 1989-12-21 | 1990-02-28 | Queensgate Instr Ltd | Piezo-electric actuators |
US5055680A (en) * | 1990-04-03 | 1991-10-08 | Lk Technologies, Inc. | Scanning tunneling microscope |
US5432395A (en) * | 1993-08-02 | 1995-07-11 | Bonneville Scientific Incorporated | Direct-drive field actuator motors |
US5925969A (en) * | 1995-10-17 | 1999-07-20 | O'neill; Cormac G. | Ferroelectric transducers |
DE19548587C2 (de) * | 1995-12-23 | 2002-11-28 | Univ Dresden Tech | Mikropositioniersystem |
CN1306247C (zh) * | 2005-08-26 | 2007-03-21 | 哈尔滨工业大学 | 宏/微双重驱动的大行程高速纳米级精度的平面定位系统 |
US11387402B2 (en) * | 2019-08-28 | 2022-07-12 | Signal Solutions, Llc | Piezoelectric sensor assembly |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1769360A (en) * | 1925-03-24 | 1930-07-01 | Adolph A Thomas | Piezo-electric translating device |
BE489589A (ko) * | 1948-06-12 | |||
US3902084A (en) * | 1974-05-30 | 1975-08-26 | Burleigh Instr | Piezoelectric electromechanical translation apparatus |
US4128616A (en) * | 1977-08-11 | 1978-12-05 | Bell Telephone Laboratories, Incorporated | Micropositioners using a crystal having moveable domain walls |
DE3168777D1 (en) * | 1981-08-10 | 1985-03-21 | Ibm | Electric travelling support |
FR2517823B1 (fr) * | 1981-12-08 | 1986-10-10 | Nat Res Dev | Gyroscope oscillant |
JPS6032110A (ja) * | 1983-08-03 | 1985-02-19 | Victor Co Of Japan Ltd | ヘツド位置制御装置 |
US4678955A (en) * | 1986-04-18 | 1987-07-07 | Rca Corporation | Piezoelectric positioning device |
-
1986
- 1986-07-04 DE DE19863622557 patent/DE3622557A1/de active Granted
-
1987
- 1987-07-02 EP EP87904233A patent/EP0273942A1/de not_active Withdrawn
- 1987-07-02 JP JP62503976A patent/JPH01500223A/ja active Pending
- 1987-07-02 US US07/183,187 patent/US4859896A/en not_active Expired - Fee Related
- 1987-07-02 WO PCT/DE1987/000296 patent/WO1988000399A1/de not_active Application Discontinuation
-
1988
- 1988-02-08 KR KR1019880700141A patent/KR880701975A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
DE3622557C2 (ko) | 1988-05-11 |
EP0273942A1 (de) | 1988-07-13 |
DE3622557A1 (de) | 1988-02-18 |
US4859896A (en) | 1989-08-22 |
JPH01500223A (ja) | 1989-01-26 |
WO1988000399A1 (en) | 1988-01-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |