JPH0145052B2 - - Google Patents

Info

Publication number
JPH0145052B2
JPH0145052B2 JP54005614A JP561479A JPH0145052B2 JP H0145052 B2 JPH0145052 B2 JP H0145052B2 JP 54005614 A JP54005614 A JP 54005614A JP 561479 A JP561479 A JP 561479A JP H0145052 B2 JPH0145052 B2 JP H0145052B2
Authority
JP
Japan
Prior art keywords
film
polybutadiene
toluene
cyclized product
dry film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54005614A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5598742A (en
Inventor
Yoshuki Harita
Mitsuru Tashiro
Toko Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP561479A priority Critical patent/JPS5598742A/ja
Priority to US06/169,464 priority patent/US4330612A/en
Publication of JPS5598742A publication Critical patent/JPS5598742A/ja
Publication of JPH0145052B2 publication Critical patent/JPH0145052B2/ja
Granted legal-status Critical Current

Links

JP561479A 1979-01-23 1979-01-23 Photosensitive resin film Granted JPS5598742A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP561479A JPS5598742A (en) 1979-01-23 1979-01-23 Photosensitive resin film
US06/169,464 US4330612A (en) 1979-01-23 1980-07-16 Laminate of monolayer film of cyclized butadiene polymer and other photosensitive layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP561479A JPS5598742A (en) 1979-01-23 1979-01-23 Photosensitive resin film

Publications (2)

Publication Number Publication Date
JPS5598742A JPS5598742A (en) 1980-07-28
JPH0145052B2 true JPH0145052B2 (enrdf_load_stackoverflow) 1989-10-02

Family

ID=11616059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP561479A Granted JPS5598742A (en) 1979-01-23 1979-01-23 Photosensitive resin film

Country Status (1)

Country Link
JP (1) JPS5598742A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5770531A (en) * 1980-10-21 1982-05-01 Japan Synthetic Rubber Co Ltd Photoresist composition
JPS5876829A (ja) * 1981-10-31 1983-05-10 Toshiba Corp 低分子量高解像度レジスト
JPS5940641A (ja) * 1982-08-31 1984-03-06 Toshiba Corp 高解像度用ネガ型フオトレジスト組成物

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2123702C3 (de) * 1971-05-13 1988-05-26 Hoechst Ag, 6230 Frankfurt Verfahren zur Herstellung eines Reliefbildes
JPS5342248B2 (enrdf_load_stackoverflow) * 1973-12-25 1978-11-10
JPS5114027A (ja) * 1974-07-25 1976-02-04 Fuji Photo Film Co Ltd Denkieidogazokeiseiho

Also Published As

Publication number Publication date
JPS5598742A (en) 1980-07-28

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