JPH0143870Y2 - - Google Patents
Info
- Publication number
- JPH0143870Y2 JPH0143870Y2 JP1985046517U JP4651785U JPH0143870Y2 JP H0143870 Y2 JPH0143870 Y2 JP H0143870Y2 JP 1985046517 U JP1985046517 U JP 1985046517U JP 4651785 U JP4651785 U JP 4651785U JP H0143870 Y2 JPH0143870 Y2 JP H0143870Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- holder
- rotating shaft
- substrate
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 38
- 238000000034 method Methods 0.000 description 12
- 238000012545 processing Methods 0.000 description 11
- 239000007788 liquid Substances 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 8
- 239000007921 spray Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985046517U JPH0143870Y2 (ko) | 1985-03-29 | 1985-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985046517U JPH0143870Y2 (ko) | 1985-03-29 | 1985-03-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61164043U JPS61164043U (ko) | 1986-10-11 |
| JPH0143870Y2 true JPH0143870Y2 (ko) | 1989-12-19 |
Family
ID=30560985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985046517U Expired JPH0143870Y2 (ko) | 1985-03-29 | 1985-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0143870Y2 (ko) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59192836U (ja) * | 1983-06-10 | 1984-12-21 | 日本電気株式会社 | ジエツトスクラバ−装置の載置台 |
-
1985
- 1985-03-29 JP JP1985046517U patent/JPH0143870Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61164043U (ko) | 1986-10-11 |
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