JPH0143868Y2 - - Google Patents

Info

Publication number
JPH0143868Y2
JPH0143868Y2 JP18442083U JP18442083U JPH0143868Y2 JP H0143868 Y2 JPH0143868 Y2 JP H0143868Y2 JP 18442083 U JP18442083 U JP 18442083U JP 18442083 U JP18442083 U JP 18442083U JP H0143868 Y2 JPH0143868 Y2 JP H0143868Y2
Authority
JP
Japan
Prior art keywords
metal wire
air
hole
air supply
insertion hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18442083U
Other languages
Japanese (ja)
Other versions
JPS6090836U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18442083U priority Critical patent/JPS6090836U/en
Publication of JPS6090836U publication Critical patent/JPS6090836U/en
Application granted granted Critical
Publication of JPH0143868Y2 publication Critical patent/JPH0143868Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/7825Means for applying energy, e.g. heating means
    • H01L2224/783Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301Capillary
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/851Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector the connector being supplied to the parts to be connected in the bonding apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8512Aligning
    • H01L2224/85148Aligning involving movement of a part of the bonding apparatus

Landscapes

  • Wire Bonding (AREA)

Description

【考案の詳細な説明】 本考案は、ワイヤーボンデイング装置に使用さ
れるエアーテンシヨン制御装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an air tension control device used in a wire bonding device.

一般に、小型回路基板に於いて、ICの端子と
回路基板上に形成されたリード線との電機配線
は、数種の細い金属線(10μm〜50μm)等で行わ
れている。
Generally, in small circuit boards, electrical wiring between IC terminals and lead wires formed on the circuit board is performed using several types of thin metal wires (10 μm to 50 μm).

従来、このボンデイング作業中に金属線等が切
断されたり、基板上にキヤピラリー部より不均一
な長さの金属線が供給されたりする場合があり、
これらは回路基板のシヨートを引き起こす等の原
因となり、IC製作上歩留り低下のひとつの要因
となつている。
Conventionally, during this bonding work, there were cases where metal wires were cut or metal wires of uneven length were supplied from the capillary section onto the board.
These can cause short circuit boards, and are one of the causes of lower yields in IC manufacturing.

この様な一連の現象は、ワイヤーボンデイング
装置内部に装着されている金属線のたるみが主要
因であるため、今までにその改良法として、ワイ
ヤーテンシヨン制御を物理的に行う方法が種々検
討されているが、いまだ完全にたるみを除去する
には至つていない。
The main cause of this series of phenomena is the sagging of the metal wire installed inside the wire bonding equipment, so various methods of physically controlling the wire tension have been studied as ways to improve this problem. However, it has not yet been possible to completely remove the slack.

本考案は上記従来技術の欠点を克服したもの
で、金属線のたるみを除去し、ひいては歩留りの
向上を図り、良好なボンデイング作業ができるエ
アーテンシヨン制御装置を提供することを目的と
する。
The present invention overcomes the above-mentioned drawbacks of the prior art, and aims to provide an air tension control device that eliminates slack in metal wires, improves yield, and enables good bonding work.

即ち、本考案は、装置本体を貫通して金属線挿
通用の挿通孔を設け、上記挿通孔の略中央には孔
径が小さく構成された細孔部を形成し、挿通孔の
細孔部の両側にはエアー供給用のエアー供給孔を
各々接続してなることを特とするエアーテンシヨ
ン制御装置を要旨とする。
That is, in the present invention, an insertion hole for passing a metal wire is provided through the main body of the device, and a small hole portion with a small hole diameter is formed approximately in the center of the insertion hole. The gist of the air tension control device is that air supply holes for air supply are connected to both sides of the air tension control device.

以下、図面に基づいて本考案の実施例を詳細に
説明する。
Hereinafter, embodiments of the present invention will be described in detail based on the drawings.

第1図は本考案エアーテンシヨン制御装置の一
実施例を示すもので、1はエアーテンシヨン制御
装置(以下、単に装置という)である。又、図中
2は該装置1内に挿通された金属線である。さら
に図中3は装置本体で、該本体3を貫通して金属
線2挿通用の挿通孔4が設けられている。
FIG. 1 shows an embodiment of the air tension control device of the present invention, where 1 is an air tension control device (hereinafter simply referred to as the device). Further, 2 in the figure is a metal wire inserted into the device 1. Furthermore, numeral 3 in the figure is a main body of the device, and an insertion hole 4 through which the metal wire 2 is inserted is provided through the main body 3.

挿通孔4は挿入部5、細孔部6及び排出部7か
ら構成されており、細孔部6の孔径は挿入部5及
び排出部7の孔径より極めて小さい孔径をなして
いる。
The insertion hole 4 is composed of an insertion part 5, a pore part 6, and a discharge part 7, and the diameter of the pore part 6 is extremely smaller than that of the insertion part 5 and the discharge part 7.

細孔部6の孔径と挿入部5の孔径との比及び細
孔部6の孔径と排出部7の孔径との比は2/5以
下好ましくは1/10以下である。
The ratio of the pore diameter of the pore section 6 to the pore diameter of the insertion section 5 and the ratio of the pore diameter of the pore section 6 to the pore diameter of the discharge section 7 are 2/5 or less, preferably 1/10 or less.

又、挿入部5と細孔部6との境にはテーパー部
8が設けられていて、金属線2が挿入部5から容
易に細孔部6に挿入し易いよう構成されている。
Further, a tapered part 8 is provided at the boundary between the insertion part 5 and the pore part 6, so that the metal wire 2 can be easily inserted into the pore part 6 from the insertion part 5.

挿通孔4の細孔部6の両側にはエアー供給用の
エアー供給孔9,10が各々連結されている。各
供給孔9,10の他端は切り換え弁11に連結さ
れている。
Air supply holes 9 and 10 for supplying air are connected to both sides of the small hole portion 6 of the insertion hole 4, respectively. The other end of each supply hole 9, 10 is connected to a switching valve 11.

切り換え弁11は装置本体3内をスライド自在
に構成されており、装置本体3に設けられたエア
ー供給部12とエアー供給孔9又は10に連結す
る幅広リング溝状の連結部13が設けられてい
る。
The switching valve 11 is configured to be slidable within the device main body 3, and is provided with a wide ring groove-shaped connection portion 13 that connects to the air supply portion 12 provided in the device main body 3 and the air supply hole 9 or 10. There is.

切り換え弁11が第1図のように挿通孔4の排
出部7側に突き出た状態にセツトされると、切り
換え弁11の連結部13とエアー供給孔10とが
連結された状態となり、エアー供給孔9は閉じら
れた状態となる。一方、切り換え弁11をスライ
ドさせて第2図に示す如く、挿入部5側に突き出
た状態にセツトすると、連結部13とエアー供給
孔9とが連結された状態となり、エアー供給孔1
0は閉じられた状態となる。
When the switching valve 11 is set in a state protruding toward the discharge part 7 side of the insertion hole 4 as shown in FIG. 1, the connecting part 13 of the switching valve 11 and the air supply hole 10 are connected, and the air supply The hole 9 is in a closed state. On the other hand, when the switching valve 11 is slid and set in a state protruding toward the insertion portion 5 as shown in FIG. 2, the connecting portion 13 and the air supply hole 9 are connected, and the air
0 is a closed state.

上記の様に構成された装置1の作用について以
下説明する。
The operation of the device 1 configured as described above will be explained below.

第3図は本考案装置1を使用したワイヤーボン
デイング装置14の一例を示すもので、図中15
はコンプレツサーであり、該コンプレツサー15
はエアーフイルター16、金属線2の装着速度及
びテンシヨンの強弱の制御を行うレギユレーター
17を介して装置1におけるエアー供給部12に
ホース18で連結されている。
FIG. 3 shows an example of a wire bonding device 14 using the device 1 of the present invention.
is a compressor, and the compressor 15
is connected to the air supply section 12 of the device 1 by a hose 18 via an air filter 16 and a regulator 17 that controls the mounting speed of the metal wire 2 and the strength of the tension.

又、19はビニールチユーブで挿通孔4の排出
部7端部に取りつけられている。
A vinyl tube 19 is attached to the end of the discharge portion 7 of the insertion hole 4.

20はクランパーを示し、21はキヤピラリー
チツプで各々上下動可能に構成されている。
Reference numeral 20 indicates a clamper, and 21 a capillary reach tip, each of which is movable up and down.

又、22はIC基板、23はリードをそれぞれ
示し、各々リードフレーム24上に設けられてお
り、リードフレーム24は、図示しないテーブル
上に載置されており、該テーブルが水平方向に移
動可能に構成されている。
Further, 22 indicates an IC board, and 23 indicates a lead, each of which is provided on a lead frame 24. The lead frame 24 is placed on a table (not shown), and the table is movable in the horizontal direction. It is configured.

ボビン25に巻かれた金属線2を装置1の挿通
部4に挿入し、ビニールチユーブ19、クランパ
ー20及びキヤピラリチツプ21を通してセツト
する。
The metal wire 2 wound around the bobbin 25 is inserted into the insertion portion 4 of the device 1, and set through the vinyl tube 19, clamper 20 and capillary tip 21.

この際、装置1では第1図に示すように切り換
え弁11の連結部13を挿通孔4の排出部7側の
エアー供給孔10に連結する様にセツトしておく
と、コンプレツサー15より供給されたエアーが
エアーフイルター16において清浄度を高めら
れ、レギユレーター17を介して装置1内のエア
ー供給部12に導入され、導入されたエアーは切
り換え弁11の連結部13からエアー供給孔10
及び挿通孔4の排出部7を通つて装置1外部へ排
出される。挿通孔4の細孔部6の孔径が排出部7
の孔径より極めて小さく形成されているため、挿
通孔4の挿入部5に於いては気圧が低下し、細孔
部6方向にエアーの流れが生じるので、金属線2
を挿入部5に挿入すれば容易に金属線2は挿入部
5、細孔部6から排出部7を通つて装置1外部へ
挿通され、最終的にはキヤピラリーチツプ21の
先端まで一気に導入セツトされ、金属線2のセツ
トが容易に行える。
At this time, if the device 1 is set so that the connection part 13 of the switching valve 11 is connected to the air supply hole 10 on the discharge part 7 side of the insertion hole 4 as shown in FIG. The cleanliness of the air is increased in the air filter 16 and introduced into the air supply section 12 in the device 1 via the regulator 17.The introduced air flows from the connection section 13 of the switching valve 11 to the air supply hole 10
and is discharged to the outside of the device 1 through the discharge portion 7 of the insertion hole 4. The hole diameter of the pore part 6 of the insertion hole 4 is the discharge part 7.
Since the diameter of the hole is extremely smaller than that of the metal wire 2, the air pressure decreases in the insertion portion 5 of the insertion hole 4, and air flows in the direction of the fine hole 6.
When the metal wire 2 is inserted into the insertion section 5, the metal wire 2 is easily inserted into the outside of the apparatus 1 through the insertion section 5, the pore section 6, and the discharge section 7, and is finally introduced all at once to the tip of the capillary reach tip 21. Therefore, the metal wire 2 can be easily set.

金属線2のセツトが終了した後、第2図に示す
様に切り換え弁11をスライドさせて逆の方に切
り換え、つまり、連結部13を挿入部5側のエア
ー供給孔9に連結する様にした後、再びコンプレ
ツサー15からエアーを供給する。この際は、エ
アー供給部12から導入されたエアーは、切り換
え弁11、エアー供給孔9及び挿通孔4の挿入部
5を通つて装置1の外部へ排出される。従つて、
今度は挿通孔4の排出部7に於いて気圧が低下
し、排出部7から細孔部6方向へのエアーの流が
生じ、その結果、金属線2は排出部7から挿入部
5方向へと引つ張られることになる。
After setting the metal wire 2, as shown in FIG. 2, slide the switching valve 11 to switch it to the opposite direction, that is, to connect the connecting part 13 to the air supply hole 9 on the insertion part 5 side. After that, air is supplied from the compressor 15 again. At this time, the air introduced from the air supply section 12 is discharged to the outside of the device 1 through the switching valve 11, the air supply hole 9, and the insertion section 5 of the insertion hole 4. Therefore,
This time, the air pressure decreases in the discharge section 7 of the insertion hole 4, and air flows from the discharge section 7 toward the pore section 6. As a result, the metal wire 2 moves from the discharge section 7 toward the insertion section 5. You will be under pressure.

ボンデイング作業は例えば、第4図に示す如
く、IC基板22へ金属線2をボンデイングした
(第4図イ)後、クランパー20が開き、クラン
パー20及びキヤピラリーチツプ21が所定の位
置まで上昇する(第4図ロ)、この際上記したよ
うに装置1により金属線2は常に装置1方向に引
つ張られているのでたるみがない。次ぎにクラン
パー20が再び閉じ、図示しないテーブルが可動
してリードフレーム24を水平方向に移動すると
ともに、クランパー20及びキヤピラリーチツプ
21が下降し、金属線2をリード23の位置まで
移動させるとともにボンデイングする(第4図
ハ)。この際、クランパー20はその上部の金属
線2を装置1のテンシヨンに抗して引き出すが、
金属線2は装置1によつて常に装置1方向に引つ
張られているため金属線2を引き出した際の惰性
でクランパー20上部の金属線2に多少のたるみ
が生じたとしても、装置1のテンシヨンによりた
るみは解消される。
For example, as shown in FIG. 4, the bonding operation is performed by bonding the metal wire 2 to the IC board 22 (FIG. 4A), and then the clamper 20 is opened and the clamper 20 and the capillary reach tip 21 are raised to a predetermined position ( FIG. 4B) At this time, as mentioned above, the metal wire 2 is always pulled in the direction of the device 1 by the device 1, so there is no slack. Next, the clamper 20 closes again, and the table (not shown) moves to move the lead frame 24 in the horizontal direction, and the clamper 20 and capillary reach tip 21 descend to move the metal wire 2 to the position of the lead 23 and perform bonding. (Figure 4 C). At this time, the clamper 20 pulls out the metal wire 2 at the top against the tension of the device 1, but
Since the metal wire 2 is always pulled in the direction of the device 1 by the device 1, even if some slack occurs in the metal wire 2 on the upper part of the clamper 20 due to inertia when the metal wire 2 is pulled out, the device 1 The slack is eliminated by the tension.

このように金属線2は装置1によりボンデイン
グ作業中に常に装置1方向に引つ張られているた
めIC基板22、リード23間に必要な長さの金
属線2が供給され、IC基板22、リード23間
の金属線2のたるみ、金属線2の切断等の不具合
を生じることなく良好なボンデイング作業が行え
る。
In this way, since the metal wire 2 is always pulled in the direction of the device 1 by the device 1 during the bonding operation, the metal wire 2 of the required length is supplied between the IC board 22 and the leads 23, and the IC board 22, Good bonding work can be performed without causing problems such as slack in the metal wire 2 between the leads 23 and cutting of the metal wire 2.

以上説明したように、本考案装置は装置本体を
貫通して金属線挿通用の挿通孔を設け、上記挿通
孔の略中央には孔径が小さく構成された細孔部を
形成し、挿通孔の細孔部の両側にはエアー供給用
のエアー供給孔を各々接続してなるものであるか
ら、ワイヤーボンデイング装置に使用すれば、ボ
ンデイング作業中常に金属線を装置方向に引つ張
つており、ボンデイングの際の金属線のたるみを
防止し、ひいては回路基板のシヨートの防止及び
IC作成上の歩留りの勾上を図れる効果がある。
As explained above, the device of the present invention has an insertion hole for passing a metal wire through the device body, and a small hole portion with a small hole diameter is formed approximately in the center of the insertion hole. Since air supply holes for air supply are connected to both sides of the pore part, when used in a wire bonding machine, the metal wire is constantly pulled in the direction of the machine during bonding work, and the bonding This prevents the metal wires from sagging during installation, which in turn prevents shortening of the circuit board.
This has the effect of increasing the yield of IC production.

又、金属線の装置内への挿通も容易に行える等
種々の効果を有するものである。
Furthermore, it has various effects such as the ability to easily insert metal wires into the device.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案の実施例を示すもので、第1図及
び第2図は本考案エアーテンシヨン制御装置の一
実施例を示す縦断面図、第3図は本考案装置を使
用したワイヤーボンデイング装置を示す側面略
図、第4図はボンデイング工程の一例を示す側面
略図である。 1……エアーテンシヨン制御装置、2……金属
線、3……装置本体、4……挿通孔、6……細孔
部、9,10……エアー供給孔。
The drawings show an embodiment of the present invention. Figures 1 and 2 are longitudinal sectional views showing an embodiment of the air tension control device of the present invention, and Figure 3 is a wire bonding device using the device of the present invention. FIG. 4 is a schematic side view showing an example of a bonding process. DESCRIPTION OF SYMBOLS 1...Air tension control device, 2...Metal wire, 3...Device main body, 4...Through hole, 6...Small hole portion, 9, 10...Air supply hole.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 装置本体を貫通して金属線挿通用の挿通孔を設
け、上記挿通孔の略中央には孔径が小さく構成さ
れた細孔部を形成し、挿通孔の細孔部の両側には
エアー供給用のエアー供給孔を各々接続してなる
ことを特徴とするエアーテンシヨン制御装置。
An insertion hole for passing a metal wire is provided through the main body of the device, and a small hole portion with a small hole diameter is formed approximately in the center of the insertion hole, and air supply holes are provided on both sides of the hole portion of the insertion hole. An air tension control device characterized in that the air tension control device is formed by connecting air supply holes of.
JP18442083U 1983-11-29 1983-11-29 Air tension control device Granted JPS6090836U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18442083U JPS6090836U (en) 1983-11-29 1983-11-29 Air tension control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18442083U JPS6090836U (en) 1983-11-29 1983-11-29 Air tension control device

Publications (2)

Publication Number Publication Date
JPS6090836U JPS6090836U (en) 1985-06-21
JPH0143868Y2 true JPH0143868Y2 (en) 1989-12-19

Family

ID=30398882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18442083U Granted JPS6090836U (en) 1983-11-29 1983-11-29 Air tension control device

Country Status (1)

Country Link
JP (1) JPS6090836U (en)

Also Published As

Publication number Publication date
JPS6090836U (en) 1985-06-21

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