JPH0143863Y2 - - Google Patents
Info
- Publication number
- JPH0143863Y2 JPH0143863Y2 JP1985060409U JP6040985U JPH0143863Y2 JP H0143863 Y2 JPH0143863 Y2 JP H0143863Y2 JP 1985060409 U JP1985060409 U JP 1985060409U JP 6040985 U JP6040985 U JP 6040985U JP H0143863 Y2 JPH0143863 Y2 JP H0143863Y2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- substrate
- etched
- jetted
- rotating body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 73
- 239000000758 substrate Substances 0.000 claims description 38
- 239000007788 liquid Substances 0.000 claims description 21
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
Landscapes
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985060409U JPH0143863Y2 (ko) | 1985-04-24 | 1985-04-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985060409U JPH0143863Y2 (ko) | 1985-04-24 | 1985-04-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61177443U JPS61177443U (ko) | 1986-11-05 |
JPH0143863Y2 true JPH0143863Y2 (ko) | 1989-12-19 |
Family
ID=30587730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985060409U Expired JPH0143863Y2 (ko) | 1985-04-24 | 1985-04-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0143863Y2 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101308352B1 (ko) * | 2011-12-16 | 2013-09-17 | 주식회사 엘지실트론 | 매엽식 웨이퍼 에칭장치 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS585342B2 (ja) * | 1976-08-24 | 1983-01-31 | 株式会社竹中工務店 | 立体倉庫 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS585342U (ja) * | 1981-06-30 | 1983-01-13 | 富士通株式会社 | ウェハ−表面処理装置 |
-
1985
- 1985-04-24 JP JP1985060409U patent/JPH0143863Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS585342B2 (ja) * | 1976-08-24 | 1983-01-31 | 株式会社竹中工務店 | 立体倉庫 |
Also Published As
Publication number | Publication date |
---|---|
JPS61177443U (ko) | 1986-11-05 |
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