JPH0142147B2 - - Google Patents

Info

Publication number
JPH0142147B2
JPH0142147B2 JP55152066A JP15206680A JPH0142147B2 JP H0142147 B2 JPH0142147 B2 JP H0142147B2 JP 55152066 A JP55152066 A JP 55152066A JP 15206680 A JP15206680 A JP 15206680A JP H0142147 B2 JPH0142147 B2 JP H0142147B2
Authority
JP
Japan
Prior art keywords
film
layer
gate
poly
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55152066A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5776876A (en
Inventor
Kazuhiro Komori
Jun Sugiura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55152066A priority Critical patent/JPS5776876A/ja
Publication of JPS5776876A publication Critical patent/JPS5776876A/ja
Publication of JPH0142147B2 publication Critical patent/JPH0142147B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10D64/011—

Landscapes

  • Non-Volatile Memory (AREA)
JP55152066A 1980-10-31 1980-10-31 Manufacture of semiconductor device Granted JPS5776876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55152066A JPS5776876A (en) 1980-10-31 1980-10-31 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55152066A JPS5776876A (en) 1980-10-31 1980-10-31 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5776876A JPS5776876A (en) 1982-05-14
JPH0142147B2 true JPH0142147B2 (member.php) 1989-09-11

Family

ID=15532303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55152066A Granted JPS5776876A (en) 1980-10-31 1980-10-31 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5776876A (member.php)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4613956A (en) * 1983-02-23 1986-09-23 Texas Instruments Incorporated Floating gate memory with improved dielectric
USRE34535E (en) * 1983-02-23 1994-02-08 Texas Instruments Incorporated Floating gate memory with improved dielectric
JPS6273774A (ja) * 1985-09-27 1987-04-04 Toshiba Corp 半導体記憶装置の製造方法
JPH088310B2 (ja) * 1987-03-18 1996-01-29 株式会社日立製作所 半導体集積回路装置の製造方法

Also Published As

Publication number Publication date
JPS5776876A (en) 1982-05-14

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