JPH0140952B2 - - Google Patents

Info

Publication number
JPH0140952B2
JPH0140952B2 JP56200819A JP20081981A JPH0140952B2 JP H0140952 B2 JPH0140952 B2 JP H0140952B2 JP 56200819 A JP56200819 A JP 56200819A JP 20081981 A JP20081981 A JP 20081981A JP H0140952 B2 JPH0140952 B2 JP H0140952B2
Authority
JP
Japan
Prior art keywords
sample
scanning
ultrasonic
parallel
ultrasonic beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56200819A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58102152A (ja
Inventor
Koji Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP56200819A priority Critical patent/JPS58102152A/ja
Publication of JPS58102152A publication Critical patent/JPS58102152A/ja
Publication of JPH0140952B2 publication Critical patent/JPH0140952B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02854—Length, thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Microscoopes, Condenser (AREA)
JP56200819A 1981-12-15 1981-12-15 超音波顕微鏡 Granted JPS58102152A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56200819A JPS58102152A (ja) 1981-12-15 1981-12-15 超音波顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56200819A JPS58102152A (ja) 1981-12-15 1981-12-15 超音波顕微鏡

Publications (2)

Publication Number Publication Date
JPS58102152A JPS58102152A (ja) 1983-06-17
JPH0140952B2 true JPH0140952B2 (enrdf_load_stackoverflow) 1989-09-01

Family

ID=16430723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56200819A Granted JPS58102152A (ja) 1981-12-15 1981-12-15 超音波顕微鏡

Country Status (1)

Country Link
JP (1) JPS58102152A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0711511B2 (ja) * 1986-04-28 1995-02-08 オリンパス光学工業株式会社 自動傾斜調整試料台
US7168694B2 (en) * 2004-01-22 2007-01-30 Sakura Finetek U.S.A., Inc. Multi-axis workpiece chuck
JP4789111B2 (ja) * 2006-02-13 2011-10-12 セイコーインスツル株式会社 薄切片作製装置及び薄切片作製方法
DE102016211126A1 (de) * 2016-06-22 2017-12-28 Osram Opto Semiconductors Gmbh Messeinrichtung für flächige Proben und Verfahren zum Messen

Also Published As

Publication number Publication date
JPS58102152A (ja) 1983-06-17

Similar Documents

Publication Publication Date Title
JP6578534B1 (ja) 超音波高速スキャン装置
JPH0140952B2 (enrdf_load_stackoverflow)
JPS6220525B2 (enrdf_load_stackoverflow)
JPH0427498B2 (enrdf_load_stackoverflow)
US7002717B1 (en) Apparatus for beam deflection
JP2801815B2 (ja) レーザ走査顕微鏡における２次元スキャナ
JPH0354515A (ja) 回転多面鏡の消音装置
JPS6050298B2 (ja) 回転体のダイナミツクバランス調整装置
JP4057197B2 (ja) 走査光学系の光スポット径測定装置
JPH01130894A (ja) レーザ加工装置
JPS61179740A (ja) レ−ザ−製版装置
JPS62249052A (ja) 超音波顕微鏡
JP2001249279A (ja) 供試体収容装置を走査するための装置
JPH0219782Y2 (enrdf_load_stackoverflow)
JPH08122036A (ja) 走査型近接場光学顕微鏡
JPH0143657Y2 (enrdf_load_stackoverflow)
JPH08132268A (ja) レーザ加工装置
JPH02192710A (ja) 描画装置
JPH0228446Y2 (enrdf_load_stackoverflow)
JPH07318831A (ja) レーザ顕微鏡装置
JPH04177312A (ja) 光走査装置とこれに用いる光走査部材
JPS6125132B2 (enrdf_load_stackoverflow)
JPS63192008A (ja) 中間調画像出力装置
JPS62249053A (ja) 光学顕微鏡を具える超音波顕微鏡
JPS63178208A (ja) レ−ザ光走査装置