Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and TechnologyfiledCriticalAgency of Industrial Science and Technology
Priority to JP17861580ApriorityCriticalpatent/JPS57101706A/ja
Priority to US06/322,460prioritypatent/US4466693A/en
Publication of JPS57101706ApublicationCriticalpatent/JPS57101706A/ja
Publication of JPH0140285B2publicationCriticalpatent/JPH0140285B2/ja
G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
G01B11/00—Measuring arrangements characterised by the use of optical techniques
G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
Physics & Mathematics
(AREA)
General Physics & Mathematics
(AREA)
Instruments For Measurement Of Length By Optical Means
(AREA)
Length Measuring Devices By Optical Means
(AREA)
JP17861580A1980-11-251980-12-17Hologram linearity meter provided with reflecting element
GrantedJPS57101706A
(en)