JPH0133898B2 - - Google Patents

Info

Publication number
JPH0133898B2
JPH0133898B2 JP55187657A JP18765780A JPH0133898B2 JP H0133898 B2 JPH0133898 B2 JP H0133898B2 JP 55187657 A JP55187657 A JP 55187657A JP 18765780 A JP18765780 A JP 18765780A JP H0133898 B2 JPH0133898 B2 JP H0133898B2
Authority
JP
Japan
Prior art keywords
selected area
image
electron beam
objective lens
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55187657A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57111938A (en
Inventor
Teruyasu Honma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP55187657A priority Critical patent/JPS57111938A/ja
Publication of JPS57111938A publication Critical patent/JPS57111938A/ja
Publication of JPH0133898B2 publication Critical patent/JPH0133898B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP55187657A 1980-12-27 1980-12-27 Transmission electron microscope Granted JPS57111938A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55187657A JPS57111938A (en) 1980-12-27 1980-12-27 Transmission electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55187657A JPS57111938A (en) 1980-12-27 1980-12-27 Transmission electron microscope

Publications (2)

Publication Number Publication Date
JPS57111938A JPS57111938A (en) 1982-07-12
JPH0133898B2 true JPH0133898B2 (cs) 1989-07-17

Family

ID=16209911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55187657A Granted JPS57111938A (en) 1980-12-27 1980-12-27 Transmission electron microscope

Country Status (1)

Country Link
JP (1) JPS57111938A (cs)

Also Published As

Publication number Publication date
JPS57111938A (en) 1982-07-12

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