JPH0132762Y2 - - Google Patents
Info
- Publication number
- JPH0132762Y2 JPH0132762Y2 JP1983039300U JP3930083U JPH0132762Y2 JP H0132762 Y2 JPH0132762 Y2 JP H0132762Y2 JP 1983039300 U JP1983039300 U JP 1983039300U JP 3930083 U JP3930083 U JP 3930083U JP H0132762 Y2 JPH0132762 Y2 JP H0132762Y2
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- heater
- furnace
- heating
- constant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 42
- 238000010304 firing Methods 0.000 description 10
- 238000001816 cooling Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- -1 etc.) Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Landscapes
- Tunnel Furnaces (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Furnace Details (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Control Of Resistance Heating (AREA)
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3930083U JPS59145067U (ja) | 1983-03-18 | 1983-03-18 | 赤外線連続加熱炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3930083U JPS59145067U (ja) | 1983-03-18 | 1983-03-18 | 赤外線連続加熱炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59145067U JPS59145067U (ja) | 1984-09-28 |
| JPH0132762Y2 true JPH0132762Y2 (sv) | 1989-10-05 |
Family
ID=30169951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3930083U Granted JPS59145067U (ja) | 1983-03-18 | 1983-03-18 | 赤外線連続加熱炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59145067U (sv) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013105959B4 (de) * | 2013-06-07 | 2019-06-19 | Heraeus Noblelight Gmbh | Betriebsverfahren und Vorrichtung zur Bestrahlung eines Substrats |
| JP7178823B2 (ja) * | 2018-08-17 | 2022-11-28 | 東京応化工業株式会社 | 基板加熱装置および基板処理システム |
| JP7236284B2 (ja) * | 2019-02-12 | 2023-03-09 | 東京応化工業株式会社 | 基板加熱装置および基板処理システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58197526A (ja) * | 1982-05-13 | 1983-11-17 | Toshiba Corp | 温度制御装置 |
-
1983
- 1983-03-18 JP JP3930083U patent/JPS59145067U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58197526A (ja) * | 1982-05-13 | 1983-11-17 | Toshiba Corp | 温度制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59145067U (ja) | 1984-09-28 |
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