JPH0132359Y2 - - Google Patents

Info

Publication number
JPH0132359Y2
JPH0132359Y2 JP18153784U JP18153784U JPH0132359Y2 JP H0132359 Y2 JPH0132359 Y2 JP H0132359Y2 JP 18153784 U JP18153784 U JP 18153784U JP 18153784 U JP18153784 U JP 18153784U JP H0132359 Y2 JPH0132359 Y2 JP H0132359Y2
Authority
JP
Japan
Prior art keywords
exhaust
chamber
rotary
parallel
exhaust chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18153784U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6196537U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18153784U priority Critical patent/JPH0132359Y2/ja
Publication of JPS6196537U publication Critical patent/JPS6196537U/ja
Application granted granted Critical
Publication of JPH0132359Y2 publication Critical patent/JPH0132359Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP18153784U 1984-11-28 1984-11-28 Expired JPH0132359Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18153784U JPH0132359Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-11-28 1984-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18153784U JPH0132359Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-11-28 1984-11-28

Publications (2)

Publication Number Publication Date
JPS6196537U JPS6196537U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-21
JPH0132359Y2 true JPH0132359Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-10-03

Family

ID=30739088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18153784U Expired JPH0132359Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-11-28 1984-11-28

Country Status (1)

Country Link
JP (1) JPH0132359Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6196537U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-21

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