JPH0131802B2 - - Google Patents
Info
- Publication number
- JPH0131802B2 JPH0131802B2 JP57194413A JP19441382A JPH0131802B2 JP H0131802 B2 JPH0131802 B2 JP H0131802B2 JP 57194413 A JP57194413 A JP 57194413A JP 19441382 A JP19441382 A JP 19441382A JP H0131802 B2 JPH0131802 B2 JP H0131802B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- main surfaces
- adhesive layer
- insulating substrates
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012790 adhesive layer Substances 0.000 claims description 14
- 239000000853 adhesive Substances 0.000 claims description 11
- 230000001070 adhesive effect Effects 0.000 claims description 11
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000000605 extraction Methods 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000013078 crystal Substances 0.000 description 18
- 238000004519 manufacturing process Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19441382A JPS5985119A (ja) | 1982-11-05 | 1982-11-05 | 厚みすべり圧電振動子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19441382A JPS5985119A (ja) | 1982-11-05 | 1982-11-05 | 厚みすべり圧電振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5985119A JPS5985119A (ja) | 1984-05-17 |
JPH0131802B2 true JPH0131802B2 (US07179912-20070220-C00144.png) | 1989-06-28 |
Family
ID=16324184
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19441382A Granted JPS5985119A (ja) | 1982-11-05 | 1982-11-05 | 厚みすべり圧電振動子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5985119A (US07179912-20070220-C00144.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03184411A (ja) * | 1989-12-13 | 1991-08-12 | Murata Mfg Co Ltd | 圧電振動部品 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52123888A (en) * | 1976-04-12 | 1977-10-18 | Matsushima Kogyo Kk | Thickness slip quartz oscillator |
JPS537159B2 (US07179912-20070220-C00144.png) * | 1974-01-11 | 1978-03-15 | ||
JPS5433714A (en) * | 1977-08-19 | 1979-03-12 | Mitsubishi Electric Corp | Automatic playing envelope generating system |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5748089Y2 (US07179912-20070220-C00144.png) * | 1976-07-02 | 1982-10-22 |
-
1982
- 1982-11-05 JP JP19441382A patent/JPS5985119A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS537159B2 (US07179912-20070220-C00144.png) * | 1974-01-11 | 1978-03-15 | ||
JPS52123888A (en) * | 1976-04-12 | 1977-10-18 | Matsushima Kogyo Kk | Thickness slip quartz oscillator |
JPS5433714A (en) * | 1977-08-19 | 1979-03-12 | Mitsubishi Electric Corp | Automatic playing envelope generating system |
Also Published As
Publication number | Publication date |
---|---|
JPS5985119A (ja) | 1984-05-17 |