JPH0130300B2 - - Google Patents
Info
- Publication number
- JPH0130300B2 JPH0130300B2 JP56115559A JP11555981A JPH0130300B2 JP H0130300 B2 JPH0130300 B2 JP H0130300B2 JP 56115559 A JP56115559 A JP 56115559A JP 11555981 A JP11555981 A JP 11555981A JP H0130300 B2 JPH0130300 B2 JP H0130300B2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- sample stage
- holding
- electron beam
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 32
- 238000010894 electron beam technology Methods 0.000 claims description 16
- 238000003825 pressing Methods 0.000 claims description 16
- 230000001105 regulatory effect Effects 0.000 claims description 15
- 238000005096 rolling process Methods 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 3
- 230000004044 response Effects 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 description 19
- 239000010959 steel Substances 0.000 description 19
- 238000010586 diagram Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56115559A JPS5816529A (ja) | 1981-07-23 | 1981-07-23 | 電子線装置のカセツト保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56115559A JPS5816529A (ja) | 1981-07-23 | 1981-07-23 | 電子線装置のカセツト保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5816529A JPS5816529A (ja) | 1983-01-31 |
| JPH0130300B2 true JPH0130300B2 (cs) | 1989-06-19 |
Family
ID=14665532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56115559A Granted JPS5816529A (ja) | 1981-07-23 | 1981-07-23 | 電子線装置のカセツト保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5816529A (cs) |
-
1981
- 1981-07-23 JP JP56115559A patent/JPS5816529A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5816529A (ja) | 1983-01-31 |
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