JPH01280215A - 光学式エンコーダ - Google Patents

光学式エンコーダ

Info

Publication number
JPH01280215A
JPH01280215A JP27153087A JP27153087A JPH01280215A JP H01280215 A JPH01280215 A JP H01280215A JP 27153087 A JP27153087 A JP 27153087A JP 27153087 A JP27153087 A JP 27153087A JP H01280215 A JPH01280215 A JP H01280215A
Authority
JP
Japan
Prior art keywords
light
scale
spot position
optical encoder
position detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27153087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05647B2 (OSRAM
Inventor
Keiji Matsui
圭司 松井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Okuma Corp
Original Assignee
Okuma Machinery Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Okuma Machinery Works Ltd filed Critical Okuma Machinery Works Ltd
Priority to JP27153087A priority Critical patent/JPH01280215A/ja
Priority to DE3833115A priority patent/DE3833115A1/de
Priority to GB8823120A priority patent/GB2210525B/en
Priority to DE3844705A priority patent/DE3844705C2/de
Priority to DE3844704A priority patent/DE3844704C2/de
Priority to US07/251,089 priority patent/US4950891A/en
Priority to US07/374,918 priority patent/US4948968A/en
Priority to US07/374,922 priority patent/US4956553A/en
Publication of JPH01280215A publication Critical patent/JPH01280215A/ja
Publication of JPH05647B2 publication Critical patent/JPH05647B2/ja
Granted legal-status Critical Current

Links

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  • Optical Transform (AREA)
JP27153087A 1987-09-30 1987-10-27 光学式エンコーダ Granted JPH01280215A (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP27153087A JPH01280215A (ja) 1987-10-27 1987-10-27 光学式エンコーダ
DE3833115A DE3833115A1 (de) 1987-09-30 1988-09-29 Optischer codierer
GB8823120A GB2210525B (en) 1987-09-30 1988-09-29 Optical encoder
DE3844705A DE3844705C2 (OSRAM) 1987-09-30 1988-09-29
DE3844704A DE3844704C2 (OSRAM) 1987-09-30 1988-09-29
US07/251,089 US4950891A (en) 1987-09-30 1988-09-29 High resolution optical encoder having a long detection stroke
US07/374,918 US4948968A (en) 1987-09-30 1989-07-03 High resolution optical encoder having a long detection stroke
US07/374,922 US4956553A (en) 1987-09-30 1989-07-03 Optical encoder with varying grating pitch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27153087A JPH01280215A (ja) 1987-10-27 1987-10-27 光学式エンコーダ

Publications (2)

Publication Number Publication Date
JPH01280215A true JPH01280215A (ja) 1989-11-10
JPH05647B2 JPH05647B2 (OSRAM) 1993-01-06

Family

ID=17501348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27153087A Granted JPH01280215A (ja) 1987-09-30 1987-10-27 光学式エンコーダ

Country Status (1)

Country Link
JP (1) JPH01280215A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5073710A (en) * 1989-09-21 1991-12-17 Copal Company Limited Optical displacement detector including a displacement member's surface having a diffractive pattern and a holographic lens pattern
EP1862774A1 (fr) * 2006-05-31 2007-12-05 Delphi Technologies, Inc. Optical multiturn rotational encoder
EP1862775A1 (fr) * 2006-05-31 2007-12-05 Delphi Technologies, Inc. Codeur de position à haute résolution
DE102005058808B4 (de) 2005-12-09 2019-02-21 Dr. Johannes Heidenhain Gmbh Positionsmessgerät mit holographischem Maßstab
CN110440688A (zh) * 2019-07-19 2019-11-12 清华大学深圳研究生院 一种绝对式光栅尺参考位置测量方法及系统

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5073710A (en) * 1989-09-21 1991-12-17 Copal Company Limited Optical displacement detector including a displacement member's surface having a diffractive pattern and a holographic lens pattern
DE102005058808B4 (de) 2005-12-09 2019-02-21 Dr. Johannes Heidenhain Gmbh Positionsmessgerät mit holographischem Maßstab
EP1862774A1 (fr) * 2006-05-31 2007-12-05 Delphi Technologies, Inc. Optical multiturn rotational encoder
EP1862775A1 (fr) * 2006-05-31 2007-12-05 Delphi Technologies, Inc. Codeur de position à haute résolution
US7751058B2 (en) 2006-05-31 2010-07-06 Delphi Technologies, Inc. Optical rotation counter
CN110440688A (zh) * 2019-07-19 2019-11-12 清华大学深圳研究生院 一种绝对式光栅尺参考位置测量方法及系统
CN110440688B (zh) * 2019-07-19 2021-10-22 清华大学深圳研究生院 一种绝对式光栅尺参考位置测量方法及系统

Also Published As

Publication number Publication date
JPH05647B2 (OSRAM) 1993-01-06

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