JPH0127381B2 - - Google Patents

Info

Publication number
JPH0127381B2
JPH0127381B2 JP58248832A JP24883283A JPH0127381B2 JP H0127381 B2 JPH0127381 B2 JP H0127381B2 JP 58248832 A JP58248832 A JP 58248832A JP 24883283 A JP24883283 A JP 24883283A JP H0127381 B2 JPH0127381 B2 JP H0127381B2
Authority
JP
Japan
Prior art keywords
sample
measured
light
optical system
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58248832A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60143747A (ja
Inventor
Akio Tsumura
Noriharu Myaake
Suguru Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP24883283A priority Critical patent/JPS60143747A/ja
Priority to US06/687,403 priority patent/US4684256A/en
Priority to DE19843447878 priority patent/DE3447878A1/de
Publication of JPS60143747A publication Critical patent/JPS60143747A/ja
Publication of JPH0127381B2 publication Critical patent/JPH0127381B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP24883283A 1983-12-30 1983-12-30 光軸方向連続測定装置 Granted JPS60143747A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP24883283A JPS60143747A (ja) 1983-12-30 1983-12-30 光軸方向連続測定装置
US06/687,403 US4684256A (en) 1983-12-30 1984-12-28 Apparatus and method for continuously measuring polarizing property
DE19843447878 DE3447878A1 (de) 1983-12-30 1984-12-31 Vorrichtung und verfahren zum fortlaufenden messen der polarisierungseigenschaft

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24883283A JPS60143747A (ja) 1983-12-30 1983-12-30 光軸方向連続測定装置

Publications (2)

Publication Number Publication Date
JPS60143747A JPS60143747A (ja) 1985-07-30
JPH0127381B2 true JPH0127381B2 (enrdf_load_stackoverflow) 1989-05-29

Family

ID=17184085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24883283A Granted JPS60143747A (ja) 1983-12-30 1983-12-30 光軸方向連続測定装置

Country Status (1)

Country Link
JP (1) JPS60143747A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6221966Y2 (enrdf_load_stackoverflow) * 1981-06-19 1987-06-04

Also Published As

Publication number Publication date
JPS60143747A (ja) 1985-07-30

Similar Documents

Publication Publication Date Title
JPH05118897A (ja) 計量コンベア装置
JP2004154660A (ja) 搬送装置
JPH055602B2 (enrdf_load_stackoverflow)
JPH0127381B2 (enrdf_load_stackoverflow)
US4684256A (en) Apparatus and method for continuously measuring polarizing property
JP2702802B2 (ja) 検反機
EP0469572A2 (en) A method measuring interstitial oxygen concentration
JPH0127380B2 (enrdf_load_stackoverflow)
JP2000292132A (ja) ワーク品質検査方法および装置
JPS59113916A (ja) シ−ト反転装置
JPS60143745A (ja) 光軸方向連続測定装置
KR0157030B1 (ko) 치환형 탄소농도 측정방법, 실리콘 웨이퍼 제조방법 및 실리콘 웨이퍼 측정방법
US4650314A (en) Film inspection machine
JP2855476B2 (ja) シリコンウェーハの製造方法
JPS60231106A (ja) 吸収軸ズレ測定装置
CN214030411U (zh) 一种直读光谱仪用检测治具
JPH01167605A (ja) センタレス研削盤における外径寸法測定装置
JP3209508B2 (ja) 切断刃付きカートンの切断刃検査装置
JPH0349702B2 (enrdf_load_stackoverflow)
JPH018975Y2 (enrdf_load_stackoverflow)
JPH01170802A (ja) センタレス研削盤における外径寸法測定装置
JPS62104131A (ja) ウエハ測定装置
JPH04283650A (ja) 複屈折測定装置
JPS6352932A (ja) 基板処理装置
JPH07115321B2 (ja) 搬送装置