JPH0127381B2 - - Google Patents

Info

Publication number
JPH0127381B2
JPH0127381B2 JP58248832A JP24883283A JPH0127381B2 JP H0127381 B2 JPH0127381 B2 JP H0127381B2 JP 58248832 A JP58248832 A JP 58248832A JP 24883283 A JP24883283 A JP 24883283A JP H0127381 B2 JPH0127381 B2 JP H0127381B2
Authority
JP
Japan
Prior art keywords
sample
measured
light
optical system
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58248832A
Other languages
Japanese (ja)
Other versions
JPS60143747A (en
Inventor
Akio Tsumura
Noriharu Myaake
Suguru Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP24883283A priority Critical patent/JPS60143747A/en
Priority to US06/687,403 priority patent/US4684256A/en
Priority to DE19843447878 priority patent/DE3447878A1/en
Publication of JPS60143747A publication Critical patent/JPS60143747A/en
Publication of JPH0127381B2 publication Critical patent/JPH0127381B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Description

【発明の詳細な説明】 本発明は偏光膜の光軸方向連続測定装置に関
し、さらに詳述すると、細長い被測定試料の光軸
方向をその長手方向に沿つて連続的に測定する装
置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for continuously measuring the optical axis direction of a polarizing film, and more specifically, to an apparatus for continuously measuring the optical axis direction of a long and narrow sample to be measured along its longitudinal direction.

透明試料の光軸方向を測定する場合、従来は第
1図に示すように、光源1と、互いに光軸が直交
するよう配設された2個の偏光子3a,3bと、
受光器4からなる直交ニコル光学系の、上記両偏
光子3a,3bの間にチツプ状の被測定試料2を
その面が光学系の軸と直交するように挿入し、光
学系の軸のまわりに試料を回転させてその回転角
と光学系の透過光強度との関係から試料の光軸を
決定する方法がとられていた。しかしこのような
従来の装置では、例えば、細長い試料で、その長
さ方向の各位置における光軸方向が変化している
ような場合、各位置での光軸方向を知るために
は、試料を適当な大きさの試料片に分断し、各試
料片毎に光軸方向の測定を行なわねばならず、大
きな労力と時間的ロスを招いていた。
When measuring the optical axis direction of a transparent sample, conventionally, as shown in FIG. 1, a light source 1, two polarizers 3a and 3b arranged so that their optical axes are orthogonal to each other,
A chip-shaped sample to be measured 2 is inserted between the polarizers 3a and 3b of the orthogonal Nicol optical system consisting of the light receiver 4 so that its surface is perpendicular to the axis of the optical system. The method used was to rotate the sample and determine the optical axis of the sample from the relationship between the rotation angle and the transmitted light intensity of the optical system. However, with such conventional devices, for example, in the case of a long and slender sample whose optical axis direction changes at each position along its length, in order to know the optical axis direction at each position, it is necessary to It is necessary to divide the sample into pieces of appropriate size and measure the optical axis direction for each sample piece, resulting in a large amount of labor and time loss.

本発明は上記従来技術の欠点を解消し、長尺試
料の長手方向における光軸方向を連続して測定す
ることができるようにすると共に、その測定に際
して被測定試料の供給、排出が円滑に行ないうる
光軸方向測定装置の提供を目的とする。
The present invention solves the above-mentioned drawbacks of the prior art and makes it possible to continuously measure the optical axis direction in the longitudinal direction of a long sample, and also enables smooth supply and discharge of the sample to be measured during the measurement. The purpose of the present invention is to provide an optical axis direction measuring device that can be used to measure the direction of an optical axis.

本発明を図面と共に具体的に説明する。第2図
は本発明の実施例を示す斜視図で、ケースの1部
を破断してみたものである。
The present invention will be specifically explained with reference to the drawings. FIG. 2 is a perspective view showing an embodiment of the present invention, with a part of the case cut away.

光源1、2つの互に光軸が直交する偏光子3
a,3b、及び受光器4が一軸方向に配列されて
直交ニコル光学系を構成している。ケース40が
この直交ニコル光学系を覆うよう設けられる。こ
の直交ニコル光学系に対してその光学軸Cに直交
する方向に被測定試料の搬送手段が配列される。
搬送手段は駆動源たるモータ及び減速器30、伝
達ベルト32、プーリ33,34、搬送ベルト3
5、バツクアツプローラ36、案内レール37、
案内ロール38からなつている。案内レール37
がケース40を貫通して設けられ、該レール37
に沿つて被測定試料10をセツトしたホルダ11
が搬送される。搬送は一対の搬送ベルト35,3
5が被測定試料ホルダ11の額縁部11aに両側
から当接し、これを挟み込む形で行なわれる。バ
ツクアツプローラ36はベルト35,35による
挟み込みを補助する。また前記案内ロール38は
ケース40外にそれぞれ1対づつ設けられ、試料
ホルダ11の姿勢を保持するものである。被測定
試料10のケース40に対する入口部及び出口部
には遮光フード50が設けられ、その中に遮光ス
クリーン51、遮光ローラ52が設けられてい
る。被測定試料10は案内レール37上、案内ロ
ール38,38間を通つてフード50に設けられ
た入口70からケース40内に入り、直交ニコル
光学系を横切つて反対側のフード50に設けられ
た口から排出される。作業者は被測定試料10を
セツトしたホルダ11の先端部を案内レール37
に沿つてケース40に差込み、測定が終つて出て
きたホルダ11をケース40から抜き取ればよ
い。
Light source 1, two polarizers 3 whose optical axes are orthogonal to each other
a, 3b, and the light receiver 4 are arranged in a uniaxial direction to constitute an orthogonal Nicol optical system. A case 40 is provided to cover this crossed Nicol optical system. A means for transporting a sample to be measured is arranged in a direction perpendicular to the optical axis C of the crossed Nicol optical system.
The conveyance means includes a motor as a driving source, a decelerator 30, a transmission belt 32, pulleys 33, 34, and a conveyance belt 3.
5, backup roller 36, guide rail 37,
The guide roll 38 is connected to the guide roll 38. Guide rail 37
is provided passing through the case 40, and the rail 37
Holder 11 with sample to be measured 10 set along
is transported. Conveyance is carried out by a pair of conveyor belts 35, 3
5 is brought into contact with the frame portion 11a of the sample holder 11 from both sides, and is sandwiched therebetween. The back up roller 36 assists the pinching by the belts 35, 35. The guide rolls 38 are provided in pairs outside the case 40 to maintain the posture of the sample holder 11. A light-shielding hood 50 is provided at the entrance and exit of the sample 10 to the case 40, and a light-shielding screen 51 and a light-shielding roller 52 are provided in the hood 50. The sample 10 to be measured passes on the guide rail 37 and between the guide rolls 38, 38, enters the case 40 from the entrance 70 provided in the hood 50, crosses the orthogonal Nicol optical system, and is placed in the hood 50 on the opposite side. It is expelled from the mouth. The operator places the tip of the holder 11 on which the sample 10 to be measured is set on the guide rail 37.
It is sufficient to insert the holder 11 into the case 40 along the lines, and then remove the holder 11 that has come out from the case 40 after the measurement is completed.

参照用試料20は被測定試料10について測定
した透過光強度Iに対して光軸ズレ角φとの関係
の基準値を与えるために用いられるもので、被測
定試料10による測定作業の前又は後に参照用試
料ホルダ21がセツトされ、光学軸C上に置かれ
る。この参照用試料ホルダ21は、ウオーム2
1、第1の歯車62、第2歯車63、伝導軸6
4、操作ツマミ65、角度目盛66等からなる外
部操作手段により、光学軸Cの回りに回転せられ
る。
The reference sample 20 is used to provide a reference value for the relationship between the transmitted light intensity I measured on the sample to be measured 10 and the optical axis deviation angle φ, and is used before or after the measurement operation using the sample to be measured 10. A reference sample holder 21 is set and placed on the optical axis C. This reference sample holder 21 has a worm 2
1. First gear 62, second gear 63, transmission shaft 6
4. It is rotated around the optical axis C by an external operating means consisting of an operating knob 65, an angle scale 66, etc.

本装置による被測定試料10の長手方向の各位
置における光軸方向を測定する作業を説明する。
まず、参照用試料20をセツトしない状態で、被
測定試料10をセツトしたホルダ11を案内レー
ル37に沿つてケース40の一方から挿入する。
被測定試料10は搬送手段により搬送され、直交
ニコル光学系の光学軸Cを連続的に横切つて、ケ
ース40の他方から排出される。これにより被測
定試料10の長手方向に沿つた各位置での透過光
強度Iが測定される。次に被測定試料10と同一
のロツトから切出した参照用試料20をホルダ2
1にセツトし、これを外部操作手段により光学軸
Cの回りに回転させつつその透過光強度Iを測
る。透過光強度Iと試料10,20の光軸のズレ
角φ(偏光子3aの光軸と試料10,20の光軸
とのズレ角)との間には次の関係が成立する。
The operation of measuring the optical axis direction at each position in the longitudinal direction of the sample to be measured 10 using this apparatus will be explained.
First, without setting the reference sample 20, the holder 11 with the sample to be measured 10 set therein is inserted from one side of the case 40 along the guide rail 37.
The sample to be measured 10 is transported by the transport means, continuously crosses the optical axis C of the crossed Nicol optical system, and is discharged from the other side of the case 40. Thereby, the transmitted light intensity I at each position along the longitudinal direction of the sample 10 to be measured is measured. Next, a reference sample 20 cut out from the same lot as the sample to be measured 10 is placed in the holder 2.
1, and the transmitted light intensity I is measured while rotating it around the optical axis C using an external operating means. The following relationship holds between the transmitted light intensity I and the deviation angle φ between the optical axes of the samples 10 and 20 (the deviation angle between the optical axis of the polarizer 3a and the optical axis of the samples 10 and 20).

I∝sin2(2φ) 参照用試料20は少なくとも90度回転させるの
で必ずI=0の点があり、この点の位置がズレ角
φ=0の位置となる。従つて参照用試料20では
ズレ角φと強度Iが一対一対応するので、被測定
試料10における各位置での透過光強度Iを参照
用試料20のそれと照し合せることにより、被測
定試料10の各位置でのズレ角φを決定すること
ができる。
I∝sin 2 (2φ) Since the reference sample 20 is rotated at least 90 degrees, there is always a point where I=0, and the position of this point is the position where the deviation angle φ=0. Therefore, in the reference sample 20, there is a one-to-one correspondence between the deviation angle φ and the intensity I, so by comparing the transmitted light intensity I at each position in the sample to be measured 10 with that of the reference sample 20, it is possible to The deviation angle φ at each position can be determined.

本発明によれば、二つの偏光子の間に参照用試
料と被測定試料をを直列に配設し、参照用試料の
データに基いて被測定試料のデータを処理しうる
ように構成しているので、参照用試料として被測
定試料と同一厚みの同一材料を用いることにより
種々な要因が消去され、光軸方向のみを高精度に
測定することができる。また、被測定試料案内レ
ールをケース外部へ伸長して設けるとともにその
案内レールに沿つて変位する長尺形ホルダに被測
定試料を保持しているので、直交ニコル光学系を
収納するケースの大きさに対し更に長大な被測定
試料を一度に、かつ連続的に測定することが可能
となつた。さらに、例えば膜状の被測定試料を長
尺形ホルダに保持させてケースの一方から挿入す
るだけで自動的に測定が行われ、しかも被測定試
料は手前へ戻ることなく他方の側壁を貫通して放
出されるので、測定作業をきわめて高能率に進め
ることができる。
According to the present invention, a reference sample and a sample to be measured are arranged in series between two polarizers, and the data of the sample to be measured can be processed based on the data of the reference sample. Therefore, by using the same material with the same thickness as the sample to be measured as a reference sample, various factors can be eliminated and only the optical axis direction can be measured with high precision. In addition, since the sample to be measured guide rail is provided extending outside the case and the sample to be measured is held in a long holder that is displaced along the guide rail, the size of the case that accommodates the orthogonal Nicol optical system is reduced. However, it has become possible to measure a much larger sample at once and continuously. Furthermore, measurements can be performed automatically by simply holding a membrane-like sample to be measured in a long holder and inserting it from one side of the case, and the sample to be measured can pass through the other side wall without returning to the front. This allows measurement work to proceed with extremely high efficiency.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来技術を示す斜視図、第2図は本発
明の実施例の一部破断斜視図である。 1……光源、3a,3b……偏光子、4……受
光器、10……被測定試料、11……ホルダ、3
0……モータ及び減速器、32……伝達ベルト、
33,34……プーリ、35……搬送ベルト、3
6……バツクアツプローラ、37……案内レー
ル、38……案内ロール、40……ケース。
FIG. 1 is a perspective view showing the prior art, and FIG. 2 is a partially cutaway perspective view of an embodiment of the present invention. 1... Light source, 3a, 3b... Polarizer, 4... Light receiver, 10... Sample to be measured, 11... Holder, 3
0...Motor and reducer, 32...Transmission belt,
33, 34...Pulley, 35...Transport belt, 3
6... Backup roller, 37... Guide rail, 38... Guide roll, 40... Case.

Claims (1)

【特許請求の範囲】[Claims] 1 光源と受光器の間に光軸が互に直交する二つ
の偏光子を配列して直交ニコル光学系を構成し、
この二つの偏光子の間に、外部操作手段により回
転自在であつて当該光学系に対し加除自在の参照
用試料、および、被測定試料を直列に配設してな
る装置において、上記直交ニコル光学系を遮光ケ
ース内に収納し、上記光学系の配列方向と直交方
向に上記遮光ケースの相対向する二側壁を貫通し
てケース外部へ伸長された被測定試料案内レール
を設けるとともに、その案内レールに沿つて摺動
変位する長尺形ホルダに上記被測定試料を保持さ
せ、上記案内レールのケース外部に上記長尺形ホ
ルダの両側面を挾持する一対の案内ロールを設け
るとともに、記ケース内の上記長尺形ホルダの上
縁部に当接する位置に、モータにより駆動され上
記長尺形ホルダを所定の向きに搬送するプーリ、
搬送ベルト等の搬送手段を設け、上記被測定試料
を上記遮光ケースの一方から供給したとき上記搬
送手段より遮光ケースの他方から放出され、その
間に透過光の強度が連続的に測定されるよう構成
されたことを特徴とする光軸方向測定装置。
1 Arrange two polarizers whose optical axes are orthogonal to each other between a light source and a light receiver to configure an orthogonal Nicol optical system,
In an apparatus in which a reference sample, which is rotatable by an external operating means and can be freely added to and subtracted from the optical system, and a sample to be measured are arranged in series between these two polarizers, the orthogonal Nicol optical The system is housed in a light-shielding case, and a sample guide rail is provided that extends to the outside of the case through two opposing side walls of the light-shielding case in a direction perpendicular to the arrangement direction of the optical system. The sample to be measured is held in an elongated holder that is slidably displaced along a pulley that is driven by a motor and transports the elongated holder in a predetermined direction, at a position abutting the upper edge of the elongated holder;
A conveying means such as a conveyor belt is provided, and when the sample to be measured is supplied from one side of the light-shielding case, it is emitted from the other side of the light-shielding case by the conveying means, and the intensity of the transmitted light is continuously measured during that time. An optical axis direction measuring device characterized by:
JP24883283A 1983-12-30 1983-12-30 Continuous optical axis direction measuring apparatus Granted JPS60143747A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP24883283A JPS60143747A (en) 1983-12-30 1983-12-30 Continuous optical axis direction measuring apparatus
US06/687,403 US4684256A (en) 1983-12-30 1984-12-28 Apparatus and method for continuously measuring polarizing property
DE19843447878 DE3447878A1 (en) 1983-12-30 1984-12-31 DEVICE AND METHOD FOR CONTINUOUSLY MEASURING THE POLARIZATION PROPERTY

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24883283A JPS60143747A (en) 1983-12-30 1983-12-30 Continuous optical axis direction measuring apparatus

Publications (2)

Publication Number Publication Date
JPS60143747A JPS60143747A (en) 1985-07-30
JPH0127381B2 true JPH0127381B2 (en) 1989-05-29

Family

ID=17184085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24883283A Granted JPS60143747A (en) 1983-12-30 1983-12-30 Continuous optical axis direction measuring apparatus

Country Status (1)

Country Link
JP (1) JPS60143747A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6221966Y2 (en) * 1981-06-19 1987-06-04

Also Published As

Publication number Publication date
JPS60143747A (en) 1985-07-30

Similar Documents

Publication Publication Date Title
JPH05118897A (en) Metering conveyer device
JP2004154660A (en) Conveying device
JPH055602B2 (en)
JPH0127381B2 (en)
US4684256A (en) Apparatus and method for continuously measuring polarizing property
JP2702802B2 (en) Inspection machine
JPH0127380B2 (en)
JP2000292132A (en) Work quality inspecting method and apparatus
JPS59113916A (en) Device for turning upside down sheet material
JPS60143745A (en) Continuous optical axis direction measuring apparatus
JP2001056270A (en) Linear polarizing plate inspection method and linear polarizing plate inspection device
KR0157030B1 (en) A method for measuring a substitutional carbon concentration
JPS60231106A (en) Apparatus for measuring shift of absorbing axis
CN214030411U (en) Detection jig for direct-reading spectrometer
JPS6132610B2 (en)
JPH0535332Y2 (en)
JPS5917102A (en) Measuring device of length of long-sized rolled material
JP3209508B2 (en) Cutting blade inspection device for carton with cutting blade
JPH01167605A (en) External diameter measuring instrument for centerless grinding machine
JPH0349702B2 (en)
JPH018975Y2 (en)
JPH01170802A (en) Outside diameter dimension measuring instrument for centerless grinding machine
JPS62104131A (en) Wafer measuring device
JPH04283650A (en) Birefringence measuring device
JPS6352932A (en) Substrate processing method and device thereof