JPH01270763A - Movable magnet type polyphase linear motor - Google Patents
Movable magnet type polyphase linear motorInfo
- Publication number
- JPH01270763A JPH01270763A JP9753488A JP9753488A JPH01270763A JP H01270763 A JPH01270763 A JP H01270763A JP 9753488 A JP9753488 A JP 9753488A JP 9753488 A JP9753488 A JP 9753488A JP H01270763 A JPH01270763 A JP H01270763A
- Authority
- JP
- Japan
- Prior art keywords
- linear motor
- coils
- movable
- magnets
- magnet type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003507 refrigerant Substances 0.000 claims description 7
- 239000000696 magnetic material Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 abstract description 17
- 239000002826 coolant Substances 0.000 abstract description 3
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 210000002445 nipple Anatomy 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Motor Or Generator Cooling System (AREA)
- Linear Motors (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は可動磁石型リニアモータ、特に半導体製造装置
、測定装置等の超精密機器の駆動機構として利用される
可動磁石型リニアモータに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a movable magnet linear motor, particularly to a movable magnet linear motor used as a drive mechanism for ultra-precision equipment such as semiconductor manufacturing equipment and measuring equipment.
［従来の技術］
従来より、多相リニアモータは知られている。第６図は
可動コイル型の多相リニアモータの一例を示すもので、
この図の（ａ）はコイル３１ａ〜３１ｂを有する可動子
Ｂを示し、（ｂ）は可動子Ｂを組み込んだ固定子Ａを示
している。固定子Ａには可動子Ｂのコイル３１ａ〜３１
ｂを上下方向から挟むように磁石３３〜３５が設けられ
ている。また、両側励磁の可動磁石型の多相リニアモー
タも知られている。第８図はこのようなりニアモータの
一例を示すもので、この図において、４１ａ〜４１ｆは
支持部材４２により裏面が固定されて支持されている固
定子Ａ側のコイル、４５゜４６は可動子Ｂ側に設けられ
ている磁石である。[Prior Art] Polyphase linear motors have been known. Figure 6 shows an example of a moving coil type multiphase linear motor.
In this figure, (a) shows a mover B having coils 31a to 31b, and (b) shows a stator A incorporating the mover B. Stator A has coils 31a to 31 of mover B.
Magnets 33 to 35 are provided to sandwich b from above and below. Further, a movable magnet type multiphase linear motor with excitation on both sides is also known. FIG. 8 shows an example of such a near motor. In this figure, 41a to 41f are the coils on the stator A side whose back side is fixed and supported by the support member 42, and 45° and 46 are the coils on the stator B side. It is a magnet installed on the side.
［発明が解決しようとしている問題点］しかしながら、
このような従来例では、コイルの冷却を考えると、次の
ような不都合かあった。第６図の例では、
（１）コイル３１ａ〜３１ｃに接触しているコイルボビ
ンの中に冷却媒体を流すための冷却管路を設けることが
ほとんど不可能であり、効率良くコイル３１ａ〜３１ｅ
の発熱を吸収することかできない。なぜならば、もしコ
イルボビンの中に冷却管路を設けても、現状のようにボ
ビンの材質に樹脂を使用すれば、樹脂はほとんど断熱材
として作用するので、冷却の効果はほとんど期待できな
いし、一方、ボビンの材質に金属を使用すれば、冷却作
用については効果か期待できるが、ボビン自体に流れる
うず電流のために、過渡的にリニアモータとしての推力
特性を著しく低下させることになるからである。[Problem that the invention seeks to solve] However,
This conventional example has the following disadvantages when considering cooling of the coil. In the example shown in FIG. 6, (1) It is almost impossible to provide a cooling conduit for flowing a cooling medium into the coil bobbin that is in contact with the coils 31a to 31c, and the coils 31a to 31e are
It is unable to absorb the heat generated by it. This is because even if a cooling conduit is provided inside the coil bobbin, if resin is used for the bobbin material as is currently the case, the resin will mostly act as a heat insulator, so almost no cooling effect can be expected; If metal is used for the bobbin, it can be expected to have a cooling effect, but the eddy current flowing through the bobbin itself will significantly reduce the thrust characteristics of the linear motor. .
（２）また、第７図に示すように、コイル３１ａ〜３１
ｃの周囲に冷却管路２９を設ける場合には、可動子全体
の剛性か低下すると共に、リニアモータ全体か大型化す
る。なぜならば、このようなＭＩｊ成では、可動子の占
める体積９重量か増加し、可動子の共振点を下げること
になるからである。(2) Also, as shown in FIG. 7, the coils 31a to 31
If the cooling pipe line 29 is provided around c, the rigidity of the entire mover decreases, and the entire linear motor becomes larger. This is because, in such an MIj configuration, the volume occupied by the mover increases by 9 weight, which lowers the resonance point of the mover.
また、第８図の例では、
（１）支持部材４２に冷却管路４３を設けることは可能
であるか、この例の場合、支持部材４２は磁気回路のヨ
ークの機能を兼ねるため鉄系の材料に限定されるのて、
冷却管路４３を設けるための構造及び加工か複雑になる
。In the example shown in FIG. 8, (1) Is it possible to provide the cooling pipe line 43 in the support member 42? In this example, the support member 42 is made of iron-based material because it also serves as a yoke for the magnetic circuit. Limited to materials,
The structure and processing for providing the cooling pipe line 43 become complicated.
（２）支持部材４２は板状であるため、これに冷却管路
４３を設けると、その分たけ板厚か厚くなり、リニアモ
ータ全体の厚さか増加する。(2) Since the support member 42 is plate-shaped, if the cooling pipe line 43 is provided thereon, the thickness of the support member 42 increases accordingly, and the thickness of the entire linear motor increases.
（３）コイル鎖交磁束による鉄損のために、リニアモー
タの過渡的な推力特性が低下し、電力効率も悪化するの
で、容量の大きな電源が必要となる。(3) Due to iron loss due to coil flux linkage, the transient thrust characteristics of the linear motor deteriorate and the power efficiency also deteriorates, so a large capacity power source is required.
本発明はこのような事情に鑑みなされたもので、その目
的は、冷却を効率良く、且つ、支障なく行なうことので
きる小型の可動磁石型多相リニアモータを提供すること
にある。The present invention was made in view of the above circumstances, and an object thereof is to provide a small moving magnet type multiphase linear motor that can be cooled efficiently and without any trouble.
［問題点を解決するための手段］
本発明は、前述したような目的を達成するため、固定子
側の複数のコイルで可動子側の磁石に推力を与えること
により、前記可動子を前記固定子に対して移動させる可
動磁石型多相リニアモータにおいて、所定方向に配列さ
れる前記コイルの両側を前記方向に沿って設けられる棒
状の支持部材で固定し、前記コイルの両側をそれぞれ固
定する前記支持部材の間に前記磁石を前記コイルに対向
させて配置し、前記支持部材の内部には冷媒を流すため
の管路な前記方向に沿って設けている。そして、この管
路に冷媒を循環させることにより、コイルに与えられる
駆動電流による発熱を効率良く除去することを可能にす
ると共に、固定子にうず電流か発生するのを防止できる
ようにしている。また本発明は、支持部材の間に磁石を
配置することによって、リニアモータの全高を冷却管路
を設けないときと同程度としている。この場合にはコイ
ルの磁石に対向する面からの支持部材の高さと磁石の厚
みを同程度とすることが望ましい。[Means for Solving the Problems] In order to achieve the above-mentioned object, the present invention provides a thrust force to a magnet on the movable element side using a plurality of coils on the stator side, thereby fixing the movable element in the fixed position. In a movable magnet type multiphase linear motor that is moved relative to a child, both sides of the coils arranged in a predetermined direction are fixed by rod-shaped support members provided along the direction, and the coils are fixed on both sides, respectively. The magnet is disposed between the supporting members so as to face the coil, and inside the supporting member, a conduit for flowing the refrigerant is provided along the direction. By circulating the refrigerant through this conduit, it is possible to efficiently remove the heat generated by the drive current applied to the coil, and it is also possible to prevent the generation of eddy currents in the stator. Further, in the present invention, by arranging the magnet between the supporting members, the overall height of the linear motor is made comparable to that when no cooling pipe is provided. In this case, it is desirable that the height of the support member from the surface of the coil facing the magnet and the thickness of the magnet be approximately the same.
本発明では、可動磁石型を採用し、可動子を磁石と箱形
構造のヨークユニットで構成することを可能にしている
ので、コイルの冷却を可動子の剛性を低下させることな
〈実施することか可能である。In the present invention, a movable magnet type is adopted, and the movable element can be composed of a magnet and a box-shaped yoke unit, so the coil can be cooled without reducing the rigidity of the movable element. It is possible.
［実施例］
以下１本発明を図に示した実施例に基づいて詳細に説明
する。[Example] The present invention will be described below in detail based on an example shown in the drawings.
第１図は本発明の可動磁石型多相リニアモータの一実施
例を示す図で、この図において。FIG. 1 is a diagram showing an embodiment of a movable magnet type multiphase linear motor of the present invention.
１ａ〜Ｉｆは固定子Ａ側のコイルて、コイル１ａ〜１ｆ
のそれぞれは略長方形状にコイルボビンに巻回され、Ｙ
軸方向に沿って支持部材２により配列されている。支持
部材２は非磁性体、例えばアルミ系の材料で棒状に形成
されている。支持部材２のそれぞれには、第３図に示す
如く、コイル１ ａ ％ １ ｆの側部が挿入される姿
穴２１が形成されており、コイルｌａ〜１ｆはそのＸ方
向の両側部が支持部材２のそれぞれ対応する姿穴２１に
挿入された後、接着剤により固定される。また、支持部
材２のそれぞれには、第２図に示す如く、冷却用の媒体
、例えばフロン、水等を流すための冷却管路２２がＹ方
向に沿って貫通して設けられている。冷却管路２２は支
持部材２のそれぞれに２木づつ、姿穴２１に挿入された
コイルｌの上下（Ｚ方向）を通るように設けられている
。1a-If are coils on the stator A side, coils 1a-1f
are wound around a coil bobbin in a substantially rectangular shape, and Y
They are arranged by support members 2 along the axial direction. The support member 2 is made of a non-magnetic material, such as an aluminum material, and is formed into a rod shape. As shown in FIG. 3, each of the support members 2 is formed with a hole 21 into which the side portions of the coils 1a to 1f are inserted, and the coils la to 1f are supported at both sides in the X direction. After being inserted into the corresponding holes 21 of the members 2, they are fixed with adhesive. Furthermore, as shown in FIG. 2, each of the support members 2 is provided with a cooling pipe passage 22 extending along the Y direction and through which a cooling medium such as fluorocarbon, water, etc. flows. Two cooling pipes 22 are provided in each of the supporting members 2 so as to pass above and below (in the Z direction) the coil I inserted into the hole 21.
支持部材２に設けられているガイド３はコイル１ａ〜ｉ
ｆのそれぞれからのリード線を支持部材２の端部に固着
されているコネクタ７に案内し、両者の接続を可能にし
ている。配管用のコネクタ４，５はそれぞれ支持部材２
の冷却管路２２と冷媒案内用のパイプ８，９を接続する
ために、支持部材２の各端部に固着されている。パイプ
８，９はそれぞれフレキシブルな材料で形成されている
。また、パイプ８．９のそれぞれはコネクタ４，５にニ
ップル６を介して接続される。固定子Ａを不図示のベー
スに取り付けるためのアタッチメントｌＯは、支持部材
２のそれぞれの端部に固着され、２木の支持部材２を図
示の状態に保持している。The guide 3 provided on the support member 2 has coils 1a to i
Lead wires from each of f are guided to a connector 7 fixed to the end of the support member 2, thereby enabling connection between the two. Connectors 4 and 5 for piping are each supported by support member 2.
are fixed to each end of the support member 2 in order to connect the cooling pipe line 22 and the refrigerant guiding pipes 8, 9. Each of the pipes 8 and 9 is made of a flexible material. Each of the pipes 8.9 is also connected to the connectors 4, 5 via nipples 6. An attachment lO for attaching the stator A to a base (not shown) is fixed to each end of the support member 2, and holds the two support members 2 in the state shown.
可動子Ｂは磁石１１ａ〜ｌｉｄを有する上ヨーク１３と
、磁石１２ａ〜１２ｄを有する下ヨーク１４を側板１５
で連結することにより箱型に構成されている。磁石１１
ａ−１ｉｄと磁石１２ａ〜１２ｄは互いに対向する磁石
に対して極性が異なるように配列されている。また、Ｙ
方向に関して隣合う磁石間でも極性が異なっている。ヨ
ーク１３．１４は鉄系の材料で、また側板１５は非磁性
系の材料で構成されている。可動子Ｂは固定子Ａに対し
て、第２図に示すように、組み付けられる。この時、各
磁石１１．１２はＸ方向に関して支持部材２の間に位置
する。また、本実施例では、このような構造を可能とす
るため、コイルｌの磁石対向面からの支持部材２の高さ
（Ｚ方向）ＴＩと磁石１１．１２の厚みＴ２を略等しく
している。The mover B has an upper yoke 13 having magnets 11a to lid, a lower yoke 14 having magnets 12a to 12d, and a side plate 15.
It is constructed into a box shape by connecting with. magnet 11
a-1id and the magnets 12a to 12d are arranged so that the polarities of the magnets facing each other are different. Also, Y
Magnets that are adjacent to each other in terms of direction also have different polarities. The yokes 13 and 14 are made of iron-based material, and the side plates 15 are made of non-magnetic material. The mover B is assembled to the stator A as shown in FIG. At this time, each magnet 11, 12 is located between the support members 2 in the X direction. In addition, in this embodiment, in order to enable such a structure, the height (Z direction) TI of the support member 2 from the magnet facing surface of the coil l and the thickness T2 of the magnets 11 and 12 are made approximately equal. .
不図示の電源からコネクタ７を介してコイルｌａ〜１ｆ
に電流が供給されると、可動子Ｂは固定子Ａに対してＹ
方向に移動する。この際の駆動シーケンスは周知の如く
、不図示の位置検出器１例えばレーザ干渉計を用いた測
長器で固定子Ａに対する可動子Ｂの相対位置を検出し、
その検出値に応じてコイル１ａ〜ｉｆのいずれかを選択
し、また、その値に応じて決まる方向に電流を流すこと
により制御される。この電流によって磁石１１．１２は
所定方向に推力を受け、Ｙ方向に沿って駆動される。こ
の時、コイル１ａ〜Ｉｆから発生するジュール熱は熱伝
導により支持部材２の内部の管路２２を流れる冷媒に伝
わり、この冷媒によりリニアモータの外部に持ち去られ
る。冷媒は不図示の供給源から常に供給されている。Coils la to 1f are connected from a power source (not shown) via connector 7.
When a current is supplied to , mover B moves Y with respect to stator A.
move in the direction. As is well known, the driving sequence at this time is to detect the relative position of the movable element B with respect to the stator A with a position detector 1 (not shown), for example, a length measuring device using a laser interferometer;
Control is performed by selecting one of the coils 1a to 1if according to the detected value, and by flowing a current in a direction determined according to the detected value. The magnets 11, 12 receive thrust in a predetermined direction due to this current, and are driven along the Y direction. At this time, the Joule heat generated from the coils 1a to If is transmitted to the refrigerant flowing through the pipe line 22 inside the support member 2 by thermal conduction, and is carried away to the outside of the linear motor by this refrigerant. Refrigerant is constantly supplied from a supply source (not shown).
［他の実施例］
第４図は本発明の他の実施例を示すもので、コイルｌａ
〜１ｆの両側部をそれぞれ２本の支持部材２ａ、２ｂで
把持して固定するものである。この支持部材２ａ、２ｂ
は管路な構成するために中空でアルミを押し出して造ら
れている。この実施例では、２本の支持部材２ａ。[Other Embodiments] FIG. 4 shows another embodiment of the present invention, in which the coil la
The two supporting members 2a and 2b are used to hold and fix the two supporting members 2a and 2b, respectively, on both sides. These supporting members 2a, 2b
It is hollow and made of extruded aluminum to create a conduit structure. In this embodiment, there are two supporting members 2a.
２ｂでコイルｌａ〜Ｉｆを把持することにより、先の実
施例のような姿穴２１の加工を不要としている。By gripping the coils la to If with 2b, it is not necessary to process the hole 21 as in the previous embodiment.
また、第５図は本発明の更に他の実施例を示すもので、
支持部材２のそれぞれを３木のアルミ又は銅の折り曲げ
たパイプで構成したものである。この実施例は、第４図
の実施例と同様に姿穴２１の加工を不要にすると共に、
冷却用パイプ８，９の設置場所を片側だけで済むように
している。Moreover, FIG. 5 shows still another embodiment of the present invention,
Each of the supporting members 2 is composed of three bent aluminum or copper pipes. Similar to the embodiment shown in FIG. 4, this embodiment eliminates the need for machining the hole 21, and
The cooling pipes 8 and 9 can be installed only on one side.
［発明の効果］
以上説明したように本発明によれば、可動磁石型多相リ
ニアモータにおいて、効率良くコイルからの発熱を冷却
することができる。またこの場合、リニアモータの推力
特性に支障を与えることもない。更に、リニアモータの
全高を低くてき、コイルユニットの構成を簡略化できる
という効果もある。[Effects of the Invention] As described above, according to the present invention, heat generated from the coils can be efficiently cooled in a moving magnet type multiphase linear motor. Moreover, in this case, the thrust characteristics of the linear motor are not affected. Furthermore, the overall height of the linear motor can be reduced and the configuration of the coil unit can be simplified.
第１図は本発明の可動磁石型多相リニアモータの一実施
例を示す図、
第２図は第１図の実施例の断面を示す図、第３図は第１
図の実施例の固定子を詳細に示す図、
第４図、第５図はそれぞれ本発明の他の実施例を示す図
、
第６図、第７図、第８図はそれぞれ従来例を示す図であ
る。
１（ａ〜ｆ）・・・コイル、
２・・・支持部材、
１１、１２ （ａ 〜ｆ）−磁石。
２１・・・姿穴。
２２・・・冷却管路、
Ａ・・・固定子、
Ｂ・・・可動子FIG. 1 is a diagram showing an embodiment of the moving magnet type multi-phase linear motor of the present invention, FIG. 2 is a diagram showing a cross section of the embodiment of FIG. 1, and FIG.
Figures 4 and 5 are diagrams showing other embodiments of the present invention, respectively, and Figures 6, 7, and 8 are diagrams showing conventional examples, respectively. It is a diagram. 1(a-f)...Coil, 2...Supporting member, 11, 12(a-f)-Magnet. 21... Figure hole. 22...Cooling pipe line, A...Stator, B...Mover
Claims (2)
を与えることにより、前記可動子を前記固定子に対して
移動させる可動磁石型多相リニアモータにおいて、 所定方向に配列される前記コイルの両側を前記方向に沿
って設けられる棒状の支持部材で固定し、前記コイルの
両側をそれぞれ固定する前記支持部材の間に前記磁石を
前記コイルに対向させて配置し、前記支持部材の内部に
は冷媒を流すための管路を前記方向に沿って設けること
を特徴とする可動磁石型多相リニアモータ。(1) In a movable magnet type multiphase linear motor that moves the movable element relative to the stator by applying thrust to the magnets on the movable side with a plurality of coils on the stator side, the movable magnets are arranged in a predetermined direction. Both sides of the coil are fixed by rod-shaped support members provided along the direction, and the magnet is placed opposite the coil between the support members fixing both sides of the coil, and the magnet is arranged opposite to the coil. A movable magnet type multiphase linear motor, characterized in that a conduit for flowing a refrigerant is provided inside along the aforementioned direction.
特徴とする特許請求の範囲第（１）項記載の可動磁石型
多相リニアモータ。(2) The movable magnet type multiphase linear motor according to claim (1), wherein the support member is made of a non-magnetic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9753488A JP2505857B2 (en) | 1988-04-20 | 1988-04-20 | Movable magnet type multi-phase linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9753488A JP2505857B2 (en) | 1988-04-20 | 1988-04-20 | Movable magnet type multi-phase linear motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01270763A true JPH01270763A (en) | 1989-10-30 |
| JP2505857B2 JP2505857B2 (en) | 1996-06-12 |
Family
ID=14194921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9753488A Expired - Fee Related JP2505857B2 (en) | 1988-04-20 | 1988-04-20 | Movable magnet type multi-phase linear motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2505857B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5703420A (en) * | 1994-10-11 | 1997-12-30 | Canon Kabushiki Kaisha | Moving magnet type multi-phase linear motor with vibration suppression and coil cooling means |
| EP0868011A1 (en) * | 1997-03-27 | 1998-09-30 | Ford Global Technologies, Inc. | Fluid-cooled linear motor armature |
| EP1780877A1 (en) * | 2004-07-25 | 2007-05-02 | Tsheatronics Co. Ltd. | Linear or curved mobile motor and its radiator |
| US7732951B2 (en) | 2007-03-06 | 2010-06-08 | Jtekt Corporation | Moving-magnet type linear motor |
| CN111687680A (en) * | 2020-05-26 | 2020-09-22 | 广州市昊志机电股份有限公司 | Linear motor secondary cooling device and machine tool |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3891545B2 (en) | 2001-07-10 | 2007-03-14 | キヤノン株式会社 | Linear motor |
-
1988
- 1988-04-20 JP JP9753488A patent/JP2505857B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5703420A (en) * | 1994-10-11 | 1997-12-30 | Canon Kabushiki Kaisha | Moving magnet type multi-phase linear motor with vibration suppression and coil cooling means |
| EP0868011A1 (en) * | 1997-03-27 | 1998-09-30 | Ford Global Technologies, Inc. | Fluid-cooled linear motor armature |
| EP1780877A1 (en) * | 2004-07-25 | 2007-05-02 | Tsheatronics Co. Ltd. | Linear or curved mobile motor and its radiator |
| EP1780877A4 (en) * | 2004-07-25 | 2012-12-26 | Mizutani Electric Ind Co Ltd | Linear or curved mobile motor and its radiator |
| US7732951B2 (en) | 2007-03-06 | 2010-06-08 | Jtekt Corporation | Moving-magnet type linear motor |
| CN111687680A (en) * | 2020-05-26 | 2020-09-22 | 广州市昊志机电股份有限公司 | Linear motor secondary cooling device and machine tool |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2505857B2 (en) | 1996-06-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |