JPH08168233A - Moving magnet multiphase linear motor - Google Patents

Abstract

PURPOSE: To provide a moving magnet multiphase linear motor which prevents itself from vibrating and is cooled with higher efficiency. CONSTITUTION: Both ends of coils 1a-1e are supported by supporting members 2a, 2b placed in the direction of the placement of the coils. Pipelines 3a, 3b for carrying coolant are formed inside the supporting members in the direction of movement. The stator A is secured with a securing member 4, positioned almost at the center of the coils and laid in the direction of movement. A movable element B is so formed that its cross section, perpendicular to the direction of movement, will be virtually C-shaped.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a movable magnet type multiphase linear motor, and more particularly to a movable magnet type multiphase linear motor used as a drive source for precision equipment such as semiconductor manufacturing equipment, precision measuring equipment and precision processing machines. Regarding

[0002]

2. Description of the Related Art FIG. 12 shows a conventional movable magnet type multi-phase linear motor, in which A is a stator having a plurality of coils and B is a mover having a plurality of magnets. In this figure, 51a to f are coils of the stator A, the coils 51a to f are wound in a substantially rectangular shape, and are arrayed and held by two support members 52 along the X-axis direction.

The supporting member 52 is made of a non-magnetic material, for example, an aluminum material, and has holes into which the side portions of the coils 51a-f can be inserted. After inserting the coils 51a-f into the supporting member 52, an adhesive is used. Fix it. Further, the support member 52 is provided with a cooling pipeline through which a coolant flows in order to cool the coils 51a to 51f so as to penetrate along the X axis direction. Coil 51
The lead wires a to f are fitted along the support member 52 and guided to the electric wire connector 57. Connectors 54,5 for piping
5 is fixed to each end of the support member 52 in order to connect the cooling conduit of the support member 52 and the pipes 58 and 59 for guiding the refrigerant. Each of the pipes 58 and 59 is connected to the connectors 54 and 55 via a nipple 56.

Attachments 60 for attaching the stator A to a fixed body (not shown) are fixed to both ends of the supporting members 52 and hold each supporting member 52 in the illustrated state.
Therefore, the stator A including the coils 51a to f and the support member 52 is fixed at both ends in the longitudinal direction (X-axis direction), that is, at the attachment 60. The mover is an upper yoke 63 having magnets 61a to 61d,
The lower yoke 64 having the magnets 62a to 62d is attached to the two side plates 65.
Box-shaped by connecting with. Magnet 61
The a to d and the magnets 62a to 62d are arranged so that the polarities of the magnets facing each other are different. Further, the polarities are different between the adjacent magnets in the X-axis direction. The yokes 63 and 64 are made of iron-based material.

[0005]

However, in such a conventional example, when the stroke of the linear motor is increased and the output thereof is increased, there are the following disadvantages with respect to vibration and heat.

(1) To lengthen the movable stroke,
This is possible by arranging many coils in the X-axis direction. However, since the linear motor coil is fixed only at both ends in the longitudinal direction, if the length in the X-axis direction becomes long, X
When the thickness in the axial direction is not largely changed, the rigidity of the linear motor decreases, the string vibration in the Z-axis direction or the Y-axis direction becomes large, and the vibration frequency becomes low. Therefore, when such a motor is incorporated into the apparatus, the vibration of the motor itself is transmitted to the apparatus side and the apparatus itself is vibrated. As a result, it becomes impossible to perform precise positioning using a linear motor, and it is very disadvantageous in terms of space and weight in terms of increasing the thickness.

(2) When a large amount of current is supplied to increase the driving force of the linear motor, the amount of heat generated from the coil increases in proportion to the square of the current, and the surface area of the cooling pipe and the flow rate of the refrigerant are small. The heat generated from the coil cannot be recovered sufficiently. Therefore, since the temperature rises, the performance of the magnet deteriorates, and the precision positioning cannot be performed due to thermal deformation of the device equipped with the linear motor, air fluctuations, and the like.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a movable magnet type multi-phase linear motor capable of suppressing the vibration of the linear motor itself and cooling it more efficiently. Is.

Another object of the present invention is to provide a movable magnet type multi-phase linear motor capable of achieving a long stroke.

[0010]

In order to achieve the above-mentioned object, according to the present invention, the mover is provided with a current by passing a current through a plurality of coils on the stator side to give a thrust to a magnet on the mover side. In a movable magnet type multi-phase linear motor that moves with respect to a stator, both sides of each coil are held by support members provided along the coil arrangement direction, and a pipeline for flowing a refrigerant inside the support members. Is provided along the direction, and the stator is fixed by using a fixing member arranged substantially in the center of the coil along the direction, and the mover is substantially C-shaped in a cross section perpendicular to the direction. It is characterized by having done.

The fixing member may be one that fixes each coil on the side of the stator, and a cooling pipe through which a refrigerant flows is provided in the fixing member, or a recess or groove is provided in the fixing member. Each coil may be arranged in the recess or groove.

Further, according to the present invention, a movable magnet type multi-phase linear motor for moving the mover with respect to the stator by supplying a current to a plurality of coils on the stator side to give a thrust to a magnet on the mover side. -In each of the coils, both sides of each coil are held by a support member provided along the coil arrangement direction, a pipe line for flowing a refrigerant is provided inside the support member along the direction, and the stator is It is characterized in that it is fixed to the support member by using a fixing member arranged along the direction, and the movable element has a substantially U-shaped cross section perpendicular to the direction.

In the present invention, the fixing member may fix one side portion of the support member, and a cooling pipe through which a refrigerant flows is provided in the fixing member, or the fixing member and the stator. The contact portion may be bolted.

Further, according to the present invention, a movable magnet type multi-phase linear motor for moving the mover with respect to the stator by supplying a current to a plurality of coils on the stator side to give a thrust to a magnet on the mover side. -In the above, each side of each coil is held by a support member provided along the coil arrangement direction, and a pipe for flowing a refrigerant is provided inside the support member along the direction, and the stator is fixed. First and second fixing members are provided, the first fixing member is provided substantially in the center of the coil along the direction, and the second fixing members are both end portions of the stator along the direction. It is characterized in that the mover is substantially C-shaped in a cross section perpendicular to the direction.

In the present invention, the first fixing member fixes each of the coils, a cooling pipe through which a refrigerant flows is provided in the first fixing member, and a recess or groove is formed in the first fixing member. May be provided, and the coil may be arranged in the recess or groove. Further, the stator may be fixed to a predetermined fixed body by only the second fixing member of the first and second fixing members.

According to the present invention, a linear motor long in the longitudinal direction in which thrust is generated is obtained by fixing and supporting the substantially central portion of the stator side coil supported by the supporting pipe having the cooling pipe by using the fixing member. However, it is possible to reduce the vibration of the linear motor. Further, if the fixing member is provided with the cooling pipe, the heat generated from the coil can be efficiently recovered.

According to another aspect of the present invention, one of the supporting members provided with the cooling pipe is held by the fixing member to enable the cooling pipe to have a large diameter and to suppress the vibration of the stator including the coil. However, the heat generated from the coil can be efficiently recovered.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a view best showing the characteristics of a movable magnet type multi-phase linear motor of the present invention. In FIG. 1, A is a part of a linear motor stator and B is a movable linear motor. Is a child. 1a to 1e are wound in a substantially rectangular shape and X
Coils of the stator A arranged at predetermined intervals in the axial direction, 2
a and 2b are support members for sandwiching and supporting the coils 1a to 1e from both ends in the Y-axis direction, 3a and 3b are cooling pipes for circulating a refrigerant to the support members 2a and 2b, and 4 is a support member 2
A fixing member that supports the coils 1a to 1e between a and 2b and is fixed to a fixing surface of a fixing body (not shown). The fixing member 4 is provided substantially in the center of the coils 1a to 1e along the X-axis direction and integrally holds the coils 1a to 1e.

Reference numeral 5 is a cooling pipe for circulating a refrigerant through the fixed member 4, 6a is a permanent magnet held by the mover B, 6b,
6c is a permanent magnet of the mover B arranged to face the magnet 6a,
Reference numeral 7 denotes a lower yoke for fixing the magnet 6a, 8a, 8b for fixing the magnets 6b, 6c, respectively, and split yokes 9a, 9b arranged at a predetermined distance from each other in the Y-axis direction.
Is a yoke 7 and a split yoke 8 in the Z-axis direction.
a, a yoke spacer fixed between the yoke 7 and the split yoke 8b. A part of the stator A is shown in the figure, and the mover B is connected to a movable body (not shown).

FIG. 2 shows the vicinity of the fixing member 4 on the side of the stator A as XZ.
10 is a part of a sectional view taken along a plane, and 10 is a fixed body to which the fixing member 4 is fixed. Each of the coils 1 a to 1 e is supported by a support member 2 having a cooling pipe 3, and is fixed to a fixed body 10 by being bonded to a fixing member 4 having a cooling pipe 5. Further, FIG. 6 is a YZ sectional view showing a state where the mover B is incorporated in the stator A of FIG. As is clear from this figure, the mover B has a substantially C-shaped cutout portion in the + Z axis (upward direction in the drawing) in the YZ cross section. The fixing member 4 is fixed to the fixed body 10 with a bolt or an adhesive. The stator A and the mover B are constrained by a guide (not shown) except in the X-axis (translation) direction,
They can move relative to each other only in the X-axis direction.

In FIG. 1, the magnet 6a and the magnet 6 facing each other
A magnetic field exists between b and 6c, and a Lorentz force is generated by appropriately flowing an electric current to the coils 1a to 1e existing in this magnetic field, and the magnets 6a to 6c and the coils 1a to 1e, that is, the mover B The stator A moves in the X-axis direction relative to each other. In this case, since the stator A is fixed, the mover B is X
Driven axially. The stator A is at least the fixing member 4
The upper surface (+ z side) of is fixed to a fixed body not shown in FIG.

Further, since the coils 1a to 1e are fixed via the fixing member 4, the mover A (coil 1a) is fixed.
1e) is elongated in the X-axis direction, the support members 2a, 2
It is possible to suppress mainly the string vibration of the coils 1a to 1e including b, and improve the positioning performance of the movable magnet type multi-phase linear motor. For example, when the length of the mover A in the X-axis direction is 1 m or more, by adopting this configuration,
It has been confirmed by analysis and experiments that the rigidity is 10 times or more that of the conventional one. This has the effect of minimizing the adverse vibrational effects on the device on which the linear motor is mounted.

On the other hand, as described above, in order to drive the mover B, a current flows through the coils 1a to 1e through the wiring of each coil (not shown). At this time, the coils 1a to 1e.
Heats up. This heat causes thermal deformation of the structure, fluctuation of atmosphere, deterioration of permanent magnets, and the like. In order to recover this heat, a refrigerant is passed through the cooling pipes 3a and 3b of the support members 2a and 2b. Further, the cooling pipe 5 is provided also in the fixing member 4 located between the support members 2a and 2b to flow the cooling medium, so that the coils 1a to 1e can be cooled not only at the both ends in the Y-axis direction but also at the central part. It is possible to improve the cooling efficiency of the coils 1a to 1e and reduce the heat transferred to the air or the external structure.

The cooling pipe 5 installed on the fixing member 4 is
The heat generated in the coils 1a to 1e is also suppressed from being transferred to the fixed body 10 (see FIG. 6) through the fixed member 4. As described above, since the support members 2a and 2b and the fixing member 4 are each provided with the cooling means, the heat can be recovered more efficiently. This has the effect of minimizing the adverse thermal effects on the device on which the linear motor is mounted.

As described above, the ends of the coils 1a to 1e are supported by the support members 2a and 2b provided with the cooling pipes 3a and 3b, and the coils 1a to 1e are fixed at their central portions with the cooling pipe 5. By supporting and fixing the coil 1 with the coil 1 without making the supporting members 2a and 2b large and heavy.
Since the rigidity of the stator A including the a to 1e and the supporting members 2a and 2b can be increased and the cooling performance of the coils 1a to 1e can be improved, the length of the stator A can be increased and the heat generation of the coil can be increased. Correspondingly, there is an effect of reducing factors that deteriorate accuracy such as vibration and heat.

Since the stator A of the mover B is fixed to the fixed body 10 by the fixing member 4, the permanent magnets 6b and 6c above the mover B and the upper yoke are the split yokes 8.
It is divided into a and 8b. The gap in the Y-axis direction between the magnets 6b and 6c is a space for avoiding interference with the fixed member 4. Each of the set of the yoke 7, the split yoke 8a, and the yoke spacer 9a, and the set of the yoke 7, the split yoke 8b, and the yoke spacer 9b are illustrated against the attraction force acting between the magnets 6a and 6b and between the magnets 6a and 6c. In order to maintain the substantially C-shaped shape, it is fixed by a bolt or the like not shown. By thus dividing the yoke at the center of the mover B, interference with the fixed member 5 of the stator A can be avoided.

FIG. 3 is a part of an XZ cross section of a mover B representing another embodiment of the present invention. The coil 1a of the fixing member 4
A concave shape is provided at the joint portion of 1e, and the coil 1a-
1e is embedded, arranged, and adhered. In this example, the area of the joint between the coils 1a to 1e and the fixing member 4 is increased, more heat generated from the coils 1a to 1e can be transmitted to the fixing member 4, and the amount of heat recovered by the refrigerant in the cooling pipe 5 can be increased. Will increase. This example has the effect of improving the cooling efficiency. Further, by providing the fixing member 4 with a precise concave shape, the coils 1a to 1a can be formed without using other positioning jigs.
It is possible to position e in the X-axis direction and to simplify the assembly. Other effects are similar to those of the above-mentioned embodiment.

FIG. 4 is a part of an XZ section of a mover showing another embodiment of the present invention. Each of 4a, 4b and 4c is a fixing member for fixing the coils 1a to 1e and the fixed body 10 and 5a, 5b and 5c are cooling pipes for flowing a refrigerant to the fixing members 4a, 4b and 4c. This figure shows fixing members 4a, 4b, 4
In this example, the cooling medium is made to flow in series to c, but cooling pipes may be arranged in parallel to each to flow the cooling medium. 4a, 4b, 4
c corresponds to the fixing member 4 of FIG. 3 divided into some parts. By using the divided fixing members 4a, 4b, and 4c, the size of each fixing member 4a to 4c in the X-axis direction is reduced, the workability is improved, and the accuracy of the shape is easily obtained. . Other effects are similar to those of the above-mentioned embodiment.

FIG. 5 is a part of an XZ sectional view of a mover showing another embodiment of the present invention. The coils 4 a and 4 b fix the coils 1 a and 1 b and the coils 1 d and 1 e to the fixed body 10, respectively. The distance between the fixing members 4a and 4b can be increased as long as the rigidity of the stator A, that is, the supporting member 2 and the coil groups 1a to 1e is not impaired. By fixing some of the coils 1a to 1e supported by the support member 2 and the fixed body 10 with the fixing members 4a and 4b, the fixing members 4a and 4b can be reduced in quantity and weight, and The simplification of the configuration is achieved. Other effects are similar to those of the above-mentioned embodiment.

FIG. 7 is a YZ sectional view of a stator A representing another embodiment of the present invention. Cooling pipes 5a and 5b are provided on the fixing member 4. In this way, a plurality of cooling pipes 5 are provided,
Further, by increasing the cross-sectional area of the cooling pipe 5, the surface area of the cooling pipe can be increased and the flow rate of the refrigerant can be increased.

At this time, by making the fixing member 4 have a T-shaped cross section as shown in the figure, the fixing member 4 can be bolted to the fixing member 10 without interfering with the cooling pipe 5a. Since the contact area with the contact area increases, the adhesive area increases and the adhesive force increases. Therefore, a plurality of cooling pipes 5 (5
a, 5b) installed, or increase the cooling pipe cross-sectional area,
The T-shaped fixing member 4 has the effects of increasing the cooling capacity and ensuring the fixing of the fixing member 4 to the fixed body 10. Other effects are similar to those of the above-mentioned embodiment.

FIG. 8 shows another embodiment of the present invention, in which 8a and 8b are split yokes, and 9 is a yoke spacer. The facing permanent magnets 6a and 6b are fixed to the split yokes 8a and 8b, respectively.
Is fixed to the yoke spacer 9. Permanent magnet 6a,
Although 6b attract each other, the yoke spacer 9 supports the split yokes 6a and 6b in which the magnets 6a and 6b are arranged so that the mover maintains a substantially U-shape against the attraction force.

The coil 1 exists in the magnetic field generated between the magnets 6a and 6b, and when a current is passed through the coil 1, a Lorentz force acts in the direction perpendicular to the plane of FIG. 8 (X-axis direction). This force causes the coil 1 and the magnets 6a and 6b to move in the X direction.
Perform relative movement in the axial direction. When a current flows through the coil 1, heat is generated, which raises the temperature of the atmosphere and causes air to sway, and causes thermal deformation and deterioration of the structure and the permanent magnet. In order to prevent this, cooling pipes 3a and 3b are provided on the support members 2a and 2b that support the coil 1, and cooling is performed with a refrigerant.

Further, in order to increase the rigidity of the coil, reduce the vibration, and enhance the cooling performance of the coil, the supporting member 2
The fixing member 5 provided with the cooling pipe 5 is installed in a and is fixed to the fixed body 10 via this. Coil 1 is fixed body 1
Since it is fixed to 0, the magnets 6a and 6b are driven in the X-axis direction by the Lorentz force described above. The fixing member 4
Are installed on the support member 2a, the yoke spacer 9 exists only on the right side (+ y side) of the split yokes 8a and 8b, and does not exist on the left side (−y side).

In this way, the coil 1 is connected to the cooling pipes 3a and 3b.
When supported by the support members 2a and 2b provided with, the rigidity of the stator including the coil 1 and the support members 2a and 2b is obtained by supporting and fixing one support member with the fixing member 4 provided with the cooling pipe 5. Since it is possible to improve the cooling performance of the coil 1 and to improve the cooling performance of the coil 1, it is possible to reduce factors such as vibration and heat that deteriorate the accuracy in response to lengthening of the stator and higher heat generation of the coil. Further, since the number of parts of the mover composed of the magnets 6a, 6b and the split yokes 8a, 8b is reduced and the structure is simplified, the manufacturing and assembling are facilitated and the cost is reduced.

FIG. 9 shows still another embodiment of the present invention. In the embodiment of FIG. 1 described above, the supporting member 2 is used.
Both ends of a and 2b along the X-axis direction are further fixed to the fixed body 10 by end fixing members 20. In this figure, only the vertical direction (Z-axis direction) is reversed from that of FIG. 1, and the other structure is the same as that of the embodiment of FIG. 1, so a detailed description thereof will not be repeated here. In the embodiment, both ends of the supporting members 2a and 2b are further fixed to the end fixing member 2.
Since it is fixed to the fixed body 10 at 0, the rigidity of the stator A can be further improved as compared with the embodiment of FIG. Therefore, the adverse effect of the vibration of the stator A on the device equipped with the linear motor can be further reduced.

In this embodiment, the support members 2a and 2b are used.
Is fixed to the fixed body 10 by the end fixing member 20, so that the fixed member 4 fixed to the coils 1a to 1c is fixed to the fixed body 1.
It does not have to stick to 0. That is, only the surface of the fixing member 4 opposite to the coil holding surface is brought into contact with the fixed body 10, or the fixed member 4 is positioned with a predetermined space in the Z-axis direction between the fixed member 4 and the fixed body 10. The shape and / or the mounting position of the fixing member 4 may be determined as described above.
In this case, the rigidity of the stator A is lower than that in the above-described embodiment, but the fixing member 4 still connects the coils 1a to 1c to that of the conventional example shown in FIG. The rigidity is improved, and the string vibration in the Z-axis direction or the Y-axis direction can be reduced.

FIG. 10 shows a modification of the embodiment shown in FIG. 9, and in the embodiment shown in FIG. 9 described above, a concave shape is provided in the joint portion of the coils 1a to 1c of the fixing member 4, and the coil is formed in this portion. 1a to 1c are embedded, arranged, and bonded. In this example, the area of the joint between the coils 1a to 1c and the fixing member 4 is increased, so that more heat generated from the coils 1a to 1c can be transferred to the fixing member 4, and the cooling pipe 5
The amount of heat recovered by the refrigerant is increased. Therefore, there is an effect of improving the cooling efficiency. Further, by providing the fixing member 4 with a precise concave shape, the coils 1a to 1c can be positioned in the X-axis direction without using any other positioning jig, and the assembly can be simplified. Other configurations and effects are the same as those of the embodiment shown in FIG.

Also in the embodiment shown in FIG. 10, the fixing member 4 is not fixed to the fixing body 10 and the fixing member 4 is only brought into contact with the fixing body 10, or the fixing member 4 and the fixing body 1 are connected.
A predetermined interval may be opened in the Z-axis direction between zero.

FIG. 11 is a block diagram showing an example in which the movable magnet type multi-phase linear motor of the present invention is mounted on an XY stage of a semiconductor manufacturing apparatus, particularly a step-and-repeat or step-and-scan type exposure apparatus for semiconductor manufacturing.

In this figure, 11 is a surface plate whose upper surface is a reference surface, and 12 is a fixed guide whose side surface is a reference surface. Reference numeral 13 is a Y stage that moves on the surface plate 11 in the Y axis direction as a moving body, and 14 is an X stage that moves on the surface plate 11 as a moving body in the X axis direction. The side surface of the Y stage 13 serves as a guide reference surface. While moving, it moves integrally with the Y stage 13 in the Y axis direction. 16
Reference numerals a and 16b are the stators of the movable magnet type multi-phase linear motor according to the present invention for driving the Y stage, and 15a and 15b are the movable elements. Reference numeral 17 denotes a movable magnet type multi-phase linear motor according to the present invention for driving the X stage. The Y stage linear motor is fixed to a fixed body 10 by a fixing member 4.

This XY stage has a positioning performance on the order of nanometers by using a laser interference type position measuring device, a controller and a linear motor driver (not shown). At this stage, slight vibrations of the stage itself and 0.
Thermal deformation and air fluctuations due to temperature changes of about 1 ° C cause performance deterioration. Therefore, in the stage of FIG. 9, by fixing the linear motors 16a and 16b using the fixing member 4 (see FIG. 1) equipped with the cooling pipe 5 (see FIG. 1), the shape and weight of the linear motor can be reduced. The rigidity and cooling performance of the linear motor are improved without increasing the size.

This is because even if the movable range of the Y stage becomes large and the lengths of the Y stage linear motors 16a and 16b increase in the y direction, a large amount of current is passed to increase the driving force and the amount of heat generation increases. However, since it is supported by the fixing member 4 provided with the cooling pipe 5, there is an effect of minimizing the vibration and temperature rise of the linear motor and its surroundings.

As a result, it is possible to suppress factors that deteriorate the positioning performance of the XY stage, that is, microvibration, thermal deformation, air fluctuations, etc., so that there is an effect of improving the positioning accuracy and positioning time of the XY stage. This has the effect of reducing adverse effects of vibration, heat, etc. on semiconductor manufacturing equipment, measuring equipment, processing equipment, etc. on which the XY stage is mounted.

[0045]

As described above, according to the present invention, in a movable magnet type multi-phase linear motor, the weight and size of the linear motor can be greatly changed even if the stroke is increased or the output is increased. Instead, it is possible to suppress the vibration of the stator and enhance the cooling efficiency by the refrigerant to efficiently recover the heat.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a movable magnet type multi-phase linear motor of the present invention.

FIG. 2 is a diagram showing an XZ cross section of the present embodiment.

FIG. 3 is a view showing another embodiment of the stator of this embodiment.

FIG. 4 is a view showing still another embodiment of the stator of this embodiment.

FIG. 5 is a view showing still another embodiment of the stator of this embodiment.

6 is a diagram showing a YZ section of the embodiment of FIG.

FIG. 7 is a view showing still another embodiment of the stator of this embodiment.

FIG. 8 is a view showing another embodiment of the movable magnet type multi-phase linear motor of the present invention.

FIG. 9 is a view showing still another embodiment of the movable magnet type multi-phase linear motor of the present invention.

FIG. 10 is a view showing another embodiment of the stator of the example of FIG.

FIG. 11 is a perspective view showing an example of an XY stage incorporating this embodiment.

FIG. 12 is a diagram showing an example of a conventional movable magnet type multi-phase linear motor.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 coil 2 support member 3 cooling pipe 4 fixing member 5 cooling pipe 6 magnet 7 yoke 8 split yoke 9 yoke spacer 10 fixed body 20 end fixing member

Claims (13)

[Claims] 1. A movable magnet type multi-phase linear motor for moving the mover relative to the stator by applying a thrust to a magnet on the mover side by passing a current through a plurality of coils on the stator side, Both sides of each coil are held by a support member provided along the coil arrangement direction, a pipeline for flowing a refrigerant is provided inside the support member along the direction, and the stator is provided substantially at the center of the coil. A movable magnet type multi-phase linear motor, characterized in that it is fixed using a fixing member arranged along the direction, and the mover is substantially C-shaped in a cross section perpendicular to the direction. 2. The movable magnet type multi-phase linear motor according to claim 1, wherein the fixing member fixes each coil on the stator side. 3. The movable magnet type multi-phase linear motor according to claim 1, wherein the fixed member is provided with a cooling pipe through which a refrigerant flows. 4. The recess or groove is provided in the fixing member,
The movable magnet type multi-phase linear motor according to claim 1, wherein the coil is arranged in the recess or the groove. 5. A movable magnet type multi-phase linear motor that moves the mover relative to the stator by applying a thrust to a magnet on the mover side by passing a current through a plurality of coils on the stator side, Both sides of each coil are held by a support member provided along the coil arrangement direction, a pipe for flowing a refrigerant is provided inside the support member along the direction, and the stator is provided on the support member. A movable magnet type multi-phase linear motor, characterized in that the movable element is fixed by using a fixing member arranged along the direction, and the mover has a substantially U-shaped cross section perpendicular to the direction. 6. The movable magnet type multi-phase linear motor according to claim 5, wherein the fixing member fixes one side portion of the supporting member. 7. The movable magnet type multi-phase linear motor according to claim 5, wherein the fixed member is provided with a cooling pipe through which a refrigerant flows. 8. The movable magnet type multi-phase linear motor according to claim 5, wherein a contact portion between the fixing member and the stator is bolted. 9. A movable magnet type multi-phase linear motor for moving the mover relative to the stator by applying a thrust to a magnet on the mover side by passing a current through a plurality of coils on the stator side, Both sides of each coil are held by a support member provided along the coil arrangement direction, a pipeline for flowing a refrigerant is provided inside the support member along the direction, and the stator is substantially at the center of the coil. Is fixed by using first and second fixing members arranged along the direction, the first fixing member is provided substantially in the center of the coil along the direction, and the second fixing member is provided on the stator. Provided at both ends along the above direction, the mover is substantially C in a cross section perpendicular to the direction.
A moving magnet type multi-phase linear motor characterized by the shape of a square. 10. The movable magnet type multi-phase linear motor according to claim 9, wherein the first fixing member fixes each of the coils. 11. The movable magnet type multi-phase linear motor according to claim 9, wherein the first fixed member is provided with a cooling pipe through which a refrigerant flows. 12. The movable magnet type multi-phase linear motor according to claim 9, wherein the first fixing member is provided with a recess or groove, and the coil is arranged in the recess or groove. 13. The movable magnet type multi-modulator according to claim 9, wherein the stator is fixed to a predetermined fixed body by only the second fixing member of the first and second fixing members. Phase linear motor.