JPH01270523A - Production of quartz-based glass form with refractive index distribution - Google Patents
Production of quartz-based glass form with refractive index distributionInfo
- Publication number
- JPH01270523A JPH01270523A JP9640188A JP9640188A JPH01270523A JP H01270523 A JPH01270523 A JP H01270523A JP 9640188 A JP9640188 A JP 9640188A JP 9640188 A JP9640188 A JP 9640188A JP H01270523 A JPH01270523 A JP H01270523A
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- refractive index
- gel
- based glass
- glass body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title claims abstract description 53
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 33
- 238000009826 distribution Methods 0.000 title claims abstract description 31
- 239000010453 quartz Substances 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 26
- 239000011737 fluorine Substances 0.000 claims abstract description 25
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 22
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000005245 sintering Methods 0.000 claims abstract description 7
- 229910001868 water Inorganic materials 0.000 claims abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 12
- 239000002243 precursor Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 abstract description 8
- 230000007613 environmental effect Effects 0.000 abstract description 7
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 abstract description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 2
- 230000006866 deterioration Effects 0.000 abstract 1
- 238000001879 gelation Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 6
- 238000005342 ion exchange Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 150000002221 fluorine Chemical class 0.000 description 3
- 239000005373 porous glass Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 238000003980 solgel method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 238000005816 glass manufacturing process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- -1 methoxy, propoxy, butoxy Chemical group 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
- C03C1/006—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route
- C03C1/008—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route for the production of films or coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/12—Other methods of shaping glass by liquid-phase reaction processes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
- C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、例えばロッドレンズ等に使用される、屈折率
分布を有する石英系ガラス体の製造方法に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method of manufacturing a quartz-based glass body having a refractive index distribution, which is used, for example, in rod lenses.
［従来の技術］
屈折率分布を有するガラス体の製造法で実施されている
代表的なものには、例えばＣＶＤ法、イオン交換法、分
子スタッフィング法がある。[Prior Art] Typical methods for manufacturing a glass body having a refractive index distribution include, for example, a CVD method, an ion exchange method, and a molecular stuffing method.
ＣＶＤ法は、ガス状のガラス原料を高温加熱された石英
管中に通し、このガス状ガラス原料を高温で酸化分解又
は加水分解し、このようにして生成されたガラス微粒子
を管壁に堆積させた後、焼結を行なって透明ガラス体を
得る。この方法では、堆積されるガラス層に加える原料
組成分のうち、屈折率を大きくする材料濃度を層毎に順
次変化させることにより、焼結して得られる透明ガラス
体（例えばコア材）に屈折率分布を与えることができる
。In the CVD method, a gaseous glass raw material is passed through a quartz tube heated to a high temperature, the gaseous glass raw material is oxidized or hydrolyzed at high temperature, and the glass particles thus generated are deposited on the tube wall. After that, sintering is performed to obtain a transparent glass body. In this method, among the raw material compositions added to the deposited glass layer, the concentration of the material that increases the refractive index is sequentially changed for each layer, so that the transparent glass body (for example, the core material) obtained by sintering has a refractive index. rate distribution can be given.
イオン交換法は、ＴΩイオンやＣ３イオンを含む多成分
ガラスを、予め溶融されたＫＮＯ３やＮａＮＯ３中に浸
漬し、電子分極率の大きなＴ、ｉｌｌイオンやＣ３イオ
ンと電子分極率の小さなにイオンやＮａイオンとを拡散
によりイオン交換させて、屈折率分布を有するガラス体
を得るものである。In the ion exchange method, a multi-component glass containing TΩ ions and C3 ions is immersed in pre-molten KNO3 or NaNO3, and T, ill ions and C3 ions, which have large electronic polarizabilities, and ions and ions, which have small electronic polarizabilities, are immersed. A glass body having a refractive index distribution is obtained by ion exchange with Na ions by diffusion.
分子スタッフィング法は、多孔質ガラスの空孔を高屈折
率を与えるドーパントで満たした後に、この多孔質ガラ
スを適当な溶媒に浸漬し、この溶媒中でドーパントをガ
ラス表面から拡散により溶出させて、多孔質ガラス中に
ドーパントの濃度分布を形成し、その後で高温での熱処
理を行なって屈折率分布の有するガラス体を形成するも
のである。In the molecular stuffing method, the pores of porous glass are filled with a dopant that gives a high refractive index, and then the porous glass is immersed in a suitable solvent, and the dopant is eluted from the glass surface in this solvent by diffusion. A dopant concentration distribution is formed in porous glass, and then heat treatment is performed at a high temperature to form a glass body having a refractive index distribution.
［発明が解決しようとする課８］
前述したような屈折率分布を有するカラス体に求められ
るのは、第１には、光学特性が良好なこと、すなわち、
光の波長レベルからみて均質であること、ひいては、そ
の結果として、例えばレンズ材として使用する場合には
解像力か大きいこと、また、集光機能の点からすれば、
光の最大屈折率と最小屈折率との差の大きさの程度を示
すＮＡが大きいことである。[Issue 8 to be solved by the invention] The glass body having the above-mentioned refractive index distribution is first required to have good optical properties, that is, to have good optical properties.
It must be homogeneous in terms of the wavelength level of light, and as a result, it must have a high resolution when used as a lens material, and from the point of view of light-gathering function,
The NA, which indicates the magnitude of the difference between the maximum refractive index and the minimum refractive index of light, is large.
更に実際に使用する面からみれば、耐環境性が大きいこ
と、例えば、使用可能な温湿度範囲が広いことが望まし
い。Furthermore, from the point of view of actual use, it is desirable that the material has high environmental resistance, for example, a wide usable temperature and humidity range.
しかし、従来の石英系ガラス体においては、これらの要
求を全て満たすことが難しい。However, it is difficult for conventional silica-based glass bodies to satisfy all of these requirements.
例えば、上記従来技術のうちで、ＣＶＤ法は、得られる
ガラス体の光学特性は不十分であり、ロッドレンズ等の
レンズ祠として使用する場合には、解像力が不十分で画
像処理には不向きである。For example, among the above-mentioned conventional techniques, the CVD method produces a glass body with insufficient optical properties, and when used as a lens shaft for rod lenses, the resolving power is insufficient and it is unsuitable for image processing. be.
また、イオン交換法においては、材料となるガラス体が
アルカリイオンを含む多成分ガラスであるため、融点が
低く、且つ水分にも弱いため、高温又は高湿度の環境下
では耐久性の点で劣る。In addition, in the ion exchange method, the glass body used as the material is a multi-component glass containing alkali ions, so it has a low melting point and is sensitive to moisture, so it has poor durability in high temperature or high humidity environments. .
また、分子スタッフィング法で製造されるガラス体も出
発材料は多成分ガラスであるので、上記イオン交換法で
製造されるガラス体同様に耐環境性が劣る。Further, since the starting material of the glass body manufactured by the molecular stuffing method is a multicomponent glass, the environmental resistance is poor like the glass body manufactured by the above-mentioned ion exchange method.
本発明は以上の点に鑑みなされたものであり、その目的
とするところは、光学特性が良好で、高ＮＡ特性をもち
、且つ耐環境性に優れた、屈折率分布を有する石英系ガ
ラス体の製造法を提供することにある。The present invention was made in view of the above points, and its purpose is to provide a quartz-based glass body with a refractive index distribution that has good optical properties, high NA properties, and excellent environmental resistance. The purpose is to provide a manufacturing method.
［問題点を解決するための課題］
上記目的は、アルコキシシランを含むシリカシー ３
＝
ル溶液をゲル化してガラス体の前身となるゲル体を形成
する工程と、前記ゲル体を弗素成分を含むアルコキシシ
ランのゾル溶液に浸漬して、該ゲル体の表面から内部に
かけて弗素成分の濃度分布を形成する工程と、弗素成分
濃度分布を有する前記ゲル体を乾燥、焼結する工程とを
経て、透明な石英系ガラス体を製造することで達成され
る。[Tasks to solve the problems] The above purpose is to solve the problem by using silica resin containing alkoxysilane.
= A step of gelling a fluorine solution to form a gel body that will become a precursor of a glass body, and immersing the gel body in a sol solution of alkoxysilane containing a fluorine component to form a fluorine component from the surface to the inside of the gel body. This is achieved by manufacturing a transparent quartz-based glass body through a step of forming a concentration distribution and a step of drying and sintering the gel body having a fluorine component concentration distribution.
［作用］
本発明のガラス体製造法では、アルコキシシランを含む
シリカゾル溶液をゲル化し、且つ乾燥。[Function] In the glass body manufacturing method of the present invention, a silica sol solution containing an alkoxysilane is gelled and dried.
焼結してガラス体か形成され、また、このゾルゲル法の
ガラス製造過程でガラス体の前身たるゲル体の表面から
内部にかけて弗素成分が拡散浸透する。この弗素成分は
、ゲル体の表面に多く存在し、ゲル体内部中央にゆくほ
と少ない。従って、ゲル体の内部の弗素成分の濃度分布
もこれに対応する。A glass body is formed by sintering, and during the glass manufacturing process using the sol-gel method, a fluorine component diffuses and permeates from the surface of the gel body, which is the precursor of the glass body, to the inside. This fluorine component exists in large quantities on the surface of the gel body, and decreases toward the center of the gel body. Therefore, the concentration distribution of the fluorine component inside the gel body also corresponds to this.
この弗素成分は光の屈折率を小さくする性質を有する。This fluorine component has the property of reducing the refractive index of light.
従って、本発明の製造法によれば、ガラス体の表面はと
屈折率が小さく内部中央に至るほど屈折率の大きい連続
的に変化する屈折率分布を得−４＝
ることかできる。Therefore, according to the manufacturing method of the present invention, it is possible to obtain a continuously changing refractive index distribution in which the surface of the glass body has a small refractive index and the refractive index increases toward the center of the interior.
しかして、このようなゾルゲル法で得られる石英系ガラ
ス体は、光学的に均質で良好な光学特性を得られ、しか
もアルコキシシラン系ガラスに耐熱性、耐湿性に優れた
弗素成分を拡散浸透させるため、この種石英系ガラス体
の耐環境性を向」ニさせることができる。Therefore, the silica-based glass body obtained by such a sol-gel method is optically homogeneous and has good optical properties.Furthermore, a fluorine component with excellent heat resistance and moisture resistance is diffused into the alkoxysilane glass. Therefore, the environmental resistance of this type of quartz-based glass body can be improved.
［実施例］
以下、本発明の石英系ガラス体の具体的な製造例を説明
する。[Example] Hereinafter, a specific manufacturing example of the quartz-based glass body of the present invention will be described.
（１）先ず、ガラス原料は、アルコキシシランを含むシ
リカゾル溶液よりなる。アルコキシシランとしては、例
えばＣ２Ｈ５０Ｈの工ｌ・キシを用い、これにシリコン
系の金属アルコキシド、例えば５ｔ（ＯＣｚＨｓ）ａを
加える。(1) First, the glass raw material consists of a silica sol solution containing alkoxysilane. As the alkoxysilane, for example, C2H50H is used, and a silicon-based metal alkoxide, for example, 5t(OCzHs)a is added thereto.
具体的には、Ｓｉ（○Ｃ２Ｈ３）４．Ｈ２Ｏ。Specifically, Si(○C2H3)4. H2O.
Ｃ２Ｈ５０Ｈをモル比で１＝４：４になるように混合し
てシリカゾル溶液を生成する。A silica sol solution is produced by mixing C2H50H in a molar ratio of 1=4:4.
（２）次いで、」１記トリガゾル溶液を内径１４ｍｍの
ガラス管に注ぎ、密封して室温に３日放置してゲル体を
得る。このゲル体は、５ｉ（ＯＣ２Ｈ５）ａの不十分な
加水分解及び縮合反応の結果生じたガラス網目の不完全
構造体で、水やＣ２Ｈ５０Ｈを含んでいるものである。(2) Next, pour the trigasol solution from step 1 into a glass tube with an inner diameter of 14 mm, seal it, and leave it at room temperature for 3 days to obtain a gel body. This gel body is an incomplete structure of a glass network produced as a result of insufficient hydrolysis and condensation reaction of 5i(OC2H5)a, and contains water and C2H50H.
（３）そして、このゲル体をガラス管より取り出し、次
のような弗素成分を含むアルコキシシランのゾル溶液に
浸漬する。この弗素成分を含むゾル溶液は、例えばＳｉ
（ＯＣ２Ｈ５）４．ＦＳｉ （ＯＣ２Ｈ５）４゜Ｈ２０
，Ｃ２Ｈ５０Ｈをモル比で１：０．２：４：８：になる
ように混合して生成したもので、この溶液に（２）の工
程で形成されたゲル体を２０時間浸漬し、弗素成分をゲ
ル体表面より内部の法に拡散により浸透させる。(3) Then, this gel body is taken out of the glass tube and immersed in a sol solution of alkoxysilane containing the following fluorine component. The sol solution containing this fluorine component is, for example, Si(OC2H5)4. FSi (OC2H5) 4°H20
, C2H50H in a molar ratio of 1:0.2:4:8.The gel body formed in step (2) was immersed in this solution for 20 hours to remove the fluorine component. is permeated from the surface of the gel body to the inside of the gel body by diffusion.
（４）その後、このゲル体を乾燥、焼結し、直径６ ｍ
ｍ、長さ５０ＩｎＩ１１の棒状透明ガラス体を得た。(4) Then, this gel body was dried and sintered to a diameter of 6 m.
A rod-shaped transparent glass body with a length of 50 InI11 was obtained.
第１図は本実施例で製造された石英系ガラス体の半径方
向のＳｉ（シリコン）とＦ（弗素）の濃度分布を表わす
測定結果である。同図に示すようにＳｉとＦ成分の濃度
分布を測定したところ、Ｆ成分はガラス体の表面に多く
中央にゆくほど連続的に少なくなる。これに対してＳｉ
成分は周辺部より中央が僅かに多い程でほとんど変わら
ない。FIG. 1 shows measurement results showing the concentration distribution of Si (silicon) and F (fluorine) in the radial direction of the quartz-based glass body manufactured in this example. As shown in the figure, when the concentration distribution of Si and F components was measured, the F component was more abundant on the surface of the glass body and decreased continuously toward the center. On the other hand, Si
The components are almost the same, with slightly more in the center than in the periphery.
また、本実施例の石英系ガラス体の半径方法の屈折率分
布を測定したところ第２図に示すような屈折率分布が測
定された、。この屈折率分布に示すように本実施例では
石英系ガラス体の内部中央に至る程屈折率が大きく、表
面に至るほど屈折率が小さくなる。これは、弗素成分の
濃度が大きくなるほど屈折率が小さくなるためである。Furthermore, when the refractive index distribution of the quartz-based glass body of this example was measured using the radial method, the refractive index distribution as shown in FIG. 2 was measured. As shown in this refractive index distribution, in this example, the refractive index increases toward the center of the quartz-based glass body, and decreases toward the surface. This is because the higher the concentration of the fluorine component, the lower the refractive index.
しかして本実施例によれば、ゾルゲル法で石英系ガラス
体を形成するために、光学的に均質で良好な光学的特性
が得られ、例えばロッドレンズに使用して好適な石英系
ガラス体を提供できる。しかも、アルコキシシラン系ガ
ラスに耐熱性、耐湿性に優れた弗素成分を拡散させるた
め、この種石英系ガラス体の耐環境性を向上させる効果
を有する。According to this example, since the silica-based glass body is formed by the sol-gel method, optically homogeneous and good optical properties can be obtained, making it suitable for use in rod lenses, for example. Can be provided. Moreover, since the fluorine component having excellent heat resistance and moisture resistance is diffused into the alkoxysilane glass, it has the effect of improving the environmental resistance of this type of quartz glass body.
なお上記実施例では、アルコキシシランとじてエトキシ
を例示したが、その他にメトキシ、プロポキシ、ブトキ
シ等を用いることができる。また、弗素を含むアルコキ
シシランのゾル溶液としては、実施例の如きＦＳ ｉ
（ＯＣ２Ｈ５）３のような弗化アルコキシシランの他
に、アルコキシシランの加水分解溶液にＨＦ、ＮＨａ
Ｆ、Ｈ２Ｓ ｉ Ｆｓ等のいずれか加えた溶液を用いて
もよく、或いは５ｉＦａガスを水に吹き込んで加水分解
させた溶液を用いてもよい。In the above embodiments, ethoxy is used as an example of the alkoxysilane, but methoxy, propoxy, butoxy, etc. can also be used. In addition, as a sol solution of alkoxysilane containing fluorine, FS i
In addition to fluorinated alkoxysilanes such as (OC2H5)3, HF and NHa are added to the hydrolyzed solution of alkoxysilane.
A solution containing either F, H2S i Fs, etc. may be used, or a solution obtained by blowing 5iFa gas into water to hydrolyze it may be used.
また、本実施例の如くき屈折率分布を有する含弗素石英
ガラス体の表面を保護するため、表面に１〜１０μｍ程
度の厚さを有する石英層を形成することも可能である。Further, in order to protect the surface of the fluorine-containing quartz glass body having the refractive index distribution as in this embodiment, it is also possible to form a quartz layer having a thickness of about 1 to 10 μm on the surface.
この石英層を形成する場合には、弗素の濃度分布が付与
された実施例の（３）の工程後のゲル体をシリカゾル溶
液に短時間浸漬した後、乾燥して、クラッド層付のゲル
体を形成し、これを焼結する方法と、弗素の濃度分布を
有する石英ガラス体をシリカゾル溶液に短時間浸漬して
表面にシリカゾル溶液をコーティングした後乾燥、焼結
する方法がある。When forming this quartz layer, the gel body with the fluorine concentration distribution after step (3) of the example is immersed in a silica sol solution for a short time, and then dried to form a gel body with a cladding layer. There is a method in which a quartz glass body having a fluorine concentration distribution is immersed in a silica sol solution for a short time, the surface is coated with the silica sol solution, and then dried and sintered.
［発明の効果］
以上のように本発明によれば、シリカゾル溶液をゲル化
、焼結して製造される石英系ガラス体に弗素成分の濃度
分布を付与することにより、光学的に高品質で且つ耐環
境性に優れた、屈折率分布を有する石英系ガラス体を提
供することができる。[Effects of the Invention] As described above, according to the present invention, by imparting a concentration distribution of a fluorine component to a quartz glass body produced by gelling and sintering a silica sol solution, a high optical quality can be achieved. Moreover, it is possible to provide a quartz-based glass body having a refractive index distribution and excellent environmental resistance.
第１図は本発明の一実施例たる石英系ガラス体の半径方
向のＳＬとＦの濃度分布を示す図、第２図は上記実施例
の石英系ガラス体の半径方向の屈折率分布を示す図であ
る。
代理人 弁理士 薄 １）利 幸FIG. 1 shows the radial concentration distribution of SL and F in a silica-based glass body according to an embodiment of the present invention, and FIG. 2 shows the radial refractive index distribution of the silica-based glass body according to the above embodiment. It is a diagram. Agent Patent Attorney Susuki 1) Toshiyuki
Claims (1)
てガラス体の前身となるゲル体を形成する工程と、前記
ゲル体を弗素成分を含むアルコキシシランのゾル溶液に
浸漬して、該ゲル体の表面から内部にかけて弗素成分の
濃度分布を形成する工程と、弗素成分濃度分布を有する
前記ゲル体を乾燥、焼結する工程とを経て、透明な石英
系ガラス体を製造することを特徴とする屈折率分布を有
する石英系ガラス体の製造方法。1. A step of gelling a silica sol solution containing an alkoxysilane to form a gel body that will become a precursor of a glass body, and immersing the gel body in a sol solution of alkoxysilane containing a fluorine component, and removing water from the surface of the gel body. A refractive index distribution characterized in that a transparent quartz-based glass body is manufactured through a step of forming a fluorine component concentration distribution inside the body and a step of drying and sintering the gel body having the fluorine component concentration distribution. A method for manufacturing a quartz-based glass body having the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9640188A JPH01270523A (en) | 1988-04-19 | 1988-04-19 | Production of quartz-based glass form with refractive index distribution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9640188A JPH01270523A (en) | 1988-04-19 | 1988-04-19 | Production of quartz-based glass form with refractive index distribution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01270523A true JPH01270523A (en) | 1989-10-27 |
Family
ID=14163940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9640188A Pending JPH01270523A (en) | 1988-04-19 | 1988-04-19 | Production of quartz-based glass form with refractive index distribution |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01270523A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005132708A (en) * | 2003-10-31 | 2005-05-26 | Kwangju Inst Of Science & Technol | Method for manufacturing optical fiber or optical element in which reduced metal ion and/or rare earth ion are doped, and method for manufacturing optical fiber or optical element in which reduced metal fine particle and/or rare earth element are doped |
-
1988
- 1988-04-19 JP JP9640188A patent/JPH01270523A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005132708A (en) * | 2003-10-31 | 2005-05-26 | Kwangju Inst Of Science & Technol | Method for manufacturing optical fiber or optical element in which reduced metal ion and/or rare earth ion are doped, and method for manufacturing optical fiber or optical element in which reduced metal fine particle and/or rare earth element are doped |
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