JPH0126766Y2 - - Google Patents
Info
- Publication number
- JPH0126766Y2 JPH0126766Y2 JP15937383U JP15937383U JPH0126766Y2 JP H0126766 Y2 JPH0126766 Y2 JP H0126766Y2 JP 15937383 U JP15937383 U JP 15937383U JP 15937383 U JP15937383 U JP 15937383U JP H0126766 Y2 JPH0126766 Y2 JP H0126766Y2
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- attached
- processed
- holder
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 4
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15937383U JPS6067363U (ja) | 1983-10-17 | 1983-10-17 | 真空処理装置用治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15937383U JPS6067363U (ja) | 1983-10-17 | 1983-10-17 | 真空処理装置用治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6067363U JPS6067363U (ja) | 1985-05-13 |
| JPH0126766Y2 true JPH0126766Y2 (enrdf_load_html_response) | 1989-08-10 |
Family
ID=30350848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15937383U Granted JPS6067363U (ja) | 1983-10-17 | 1983-10-17 | 真空処理装置用治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6067363U (enrdf_load_html_response) |
-
1983
- 1983-10-17 JP JP15937383U patent/JPS6067363U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6067363U (ja) | 1985-05-13 |
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