JPH01267513A - 結像レンズ - Google Patents

結像レンズ

Info

Publication number
JPH01267513A
JPH01267513A JP9630288A JP9630288A JPH01267513A JP H01267513 A JPH01267513 A JP H01267513A JP 9630288 A JP9630288 A JP 9630288A JP 9630288 A JP9630288 A JP 9630288A JP H01267513 A JPH01267513 A JP H01267513A
Authority
JP
Japan
Prior art keywords
lens
lens group
positive
imaging
lenses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9630288A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427523B2 (enExample
Inventor
Tazuko Ishizuka
石塚 多津子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentax Corp
Original Assignee
Asahi Kogaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kogaku Kogyo Co Ltd filed Critical Asahi Kogaku Kogyo Co Ltd
Priority to JP9630288A priority Critical patent/JPH01267513A/ja
Publication of JPH01267513A publication Critical patent/JPH01267513A/ja
Publication of JPH0427523B2 publication Critical patent/JPH0427523B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Lenses (AREA)
JP9630288A 1988-04-19 1988-04-19 結像レンズ Granted JPH01267513A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9630288A JPH01267513A (ja) 1988-04-19 1988-04-19 結像レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9630288A JPH01267513A (ja) 1988-04-19 1988-04-19 結像レンズ

Publications (2)

Publication Number Publication Date
JPH01267513A true JPH01267513A (ja) 1989-10-25
JPH0427523B2 JPH0427523B2 (enExample) 1992-05-12

Family

ID=14161236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9630288A Granted JPH01267513A (ja) 1988-04-19 1988-04-19 結像レンズ

Country Status (1)

Country Link
JP (1) JPH01267513A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015138124A (ja) * 2014-01-22 2015-07-30 リソテック株式会社 投影光学系、投影露光装置、及びデバイス製造方法
JP2017007203A (ja) * 2015-06-22 2017-01-12 ローム株式会社 サーマルプリントヘッドの製造方法およびサーマルプリントヘッド

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015138124A (ja) * 2014-01-22 2015-07-30 リソテック株式会社 投影光学系、投影露光装置、及びデバイス製造方法
JP2017007203A (ja) * 2015-06-22 2017-01-12 ローム株式会社 サーマルプリントヘッドの製造方法およびサーマルプリントヘッド

Also Published As

Publication number Publication date
JPH0427523B2 (enExample) 1992-05-12

Similar Documents

Publication Publication Date Title
JP3819048B2 (ja) 投影光学系及びそれを備えた露光装置並びに露光方法
JP3500745B2 (ja) 投影光学系、投影露光装置及び投影露光方法
JP3624973B2 (ja) 投影光学系
JP3750123B2 (ja) 投影光学系
KR100387149B1 (ko) 투영광학계및이를이용한노광장치
JP3396935B2 (ja) 投影光学系及び投影露光装置
US5808808A (en) Wide-angle lens system
JPH07128590A (ja) 縮小投影レンズ
JP3823436B2 (ja) 投影光学系
JPH07140384A (ja) 投影光学系及び投影露光装置
JPH08304705A (ja) 反射屈折光学系
US3999840A (en) Wide angle objective having a non-spherical surface
JPH1079345A (ja) 投影光学系及び露光装置
JPH0534593A (ja) 縮小投影レンズ
JPH10246854A (ja) コンパクトな広角レンズ
JPH06313845A (ja) 投影レンズ系
JPH07128592A (ja) 縮小投影レンズ
JPH01267513A (ja) 結像レンズ
CN112526833B (zh) 一种用于无掩模光刻的投影成像系统
JP3026648B2 (ja) 等倍投影レンズ
JPS6190115A (ja) 結像用対物レンズ
JPH03156413A (ja) 投影レンズ
CN115524927A (zh) 大视场投影物镜及光刻机
JPH07230035A (ja) 走査光学系
JP2000056218A (ja) 投影光学系およびそれを備えた露光装置ならびに半導体デバイス製造方法