JPH01263646A - Photocurable composition for novel electroless plating - Google Patents
Photocurable composition for novel electroless platingInfo
- Publication number
- JPH01263646A JPH01263646A JP9162488A JP9162488A JPH01263646A JP H01263646 A JPH01263646 A JP H01263646A JP 9162488 A JP9162488 A JP 9162488A JP 9162488 A JP9162488 A JP 9162488A JP H01263646 A JPH01263646 A JP H01263646A
- Authority
- JP
- Japan
- Prior art keywords
- group
- formula
- polymer
- structural unit
- repeating structural
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 26
- 238000007772 electroless plating Methods 0.000 title 1
- 238000007747 plating Methods 0.000 claims abstract description 20
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 15
- 229920000642 polymer Polymers 0.000 claims abstract description 10
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- 125000005462 imide group Chemical group 0.000 claims abstract description 5
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims abstract description 4
- 150000001875 compounds Chemical class 0.000 claims description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 16
- 229910052802 copper Inorganic materials 0.000 claims description 16
- 239000010949 copper Substances 0.000 claims description 16
- 239000000126 substance Substances 0.000 claims description 8
- 125000003277 amino group Chemical group 0.000 claims description 5
- 125000003368 amide group Chemical group 0.000 claims description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 20
- 239000002253 acid Substances 0.000 abstract description 5
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 description 38
- -1 cyclohexylamino group Chemical group 0.000 description 23
- 125000000217 alkyl group Chemical group 0.000 description 11
- 239000000758 substrate Substances 0.000 description 9
- 239000000654 additive Substances 0.000 description 8
- 239000003513 alkali Substances 0.000 description 8
- 125000003118 aryl group Chemical group 0.000 description 8
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical group NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 5
- 239000012965 benzophenone Substances 0.000 description 5
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 150000002009 diols Chemical class 0.000 description 3
- 239000000975 dye Substances 0.000 description 3
- 239000003999 initiator Substances 0.000 description 3
- 125000005439 maleimidyl group Chemical group C1(C=CC(N1*)=O)=O 0.000 description 3
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical group CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 3
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 3
- 239000003504 photosensitizing agent Substances 0.000 description 3
- 125000005543 phthalimide group Chemical group 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- IYMZEPRSPLASMS-UHFFFAOYSA-N 3-phenylpyrrole-2,5-dione Chemical group O=C1NC(=O)C(C=2C=CC=CC=2)=C1 IYMZEPRSPLASMS-UHFFFAOYSA-N 0.000 description 2
- GUUVPOWQJOLRAS-UHFFFAOYSA-N Diphenyl disulfide Chemical compound C=1C=CC=CC=1SSC1=CC=CC=C1 GUUVPOWQJOLRAS-UHFFFAOYSA-N 0.000 description 2
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 125000002490 anilino group Chemical group [H]N(*)C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 2
- 125000000440 benzylamino group Chemical group [H]N(*)C([H])([H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 2
- 125000000490 cinnamyl group Chemical group C(C=CC1=CC=CC=C1)* 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 125000000250 methylamino group Chemical group [H]N(*)C([H])([H])[H] 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- CHDKQNHKDMEASZ-UHFFFAOYSA-N n-prop-2-enoylprop-2-enamide Chemical group C=CC(=O)NC(=O)C=C CHDKQNHKDMEASZ-UHFFFAOYSA-N 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 2
- GRDGBWVSVMLKBV-UHFFFAOYSA-N (2-amino-5-nitrophenyl)-(2-chlorophenyl)methanone Chemical compound NC1=CC=C([N+]([O-])=O)C=C1C(=O)C1=CC=CC=C1Cl GRDGBWVSVMLKBV-UHFFFAOYSA-N 0.000 description 1
- POTYORUTRLSAGZ-UHFFFAOYSA-N (3-chloro-2-hydroxypropyl) prop-2-enoate Chemical compound ClCC(O)COC(=O)C=C POTYORUTRLSAGZ-UHFFFAOYSA-N 0.000 description 1
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 1
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 1
- 150000003923 2,5-pyrrolediones Chemical class 0.000 description 1
- QHVBLSNVXDSMEB-UHFFFAOYSA-N 2-(diethylamino)ethyl prop-2-enoate Chemical compound CCN(CC)CCOC(=O)C=C QHVBLSNVXDSMEB-UHFFFAOYSA-N 0.000 description 1
- DPBJAVGHACCNRL-UHFFFAOYSA-N 2-(dimethylamino)ethyl prop-2-enoate Chemical compound CN(C)CCOC(=O)C=C DPBJAVGHACCNRL-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- BLOQTGXMKFTNJP-UHFFFAOYSA-N 2-[4,6-bis(2-hydroxyethyl)triazin-5-yl]ethanol;prop-2-enoic acid Chemical compound OC(=O)C=C.OCCC1=NN=NC(CCO)=C1CCO BLOQTGXMKFTNJP-UHFFFAOYSA-N 0.000 description 1
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 1
- WHBAYNMEIXUTJV-UHFFFAOYSA-N 2-chloroethyl prop-2-enoate Chemical compound ClCCOC(=O)C=C WHBAYNMEIXUTJV-UHFFFAOYSA-N 0.000 description 1
- QPXVRLXJHPTCPW-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-(4-propan-2-ylphenyl)propan-1-one Chemical compound CC(C)C1=CC=C(C(=O)C(C)(C)O)C=C1 QPXVRLXJHPTCPW-UHFFFAOYSA-N 0.000 description 1
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- GWZMWHWAWHPNHN-UHFFFAOYSA-N 2-hydroxypropyl prop-2-enoate Chemical compound CC(O)COC(=O)C=C GWZMWHWAWHPNHN-UHFFFAOYSA-N 0.000 description 1
- GASMGDMKGYYAHY-UHFFFAOYSA-N 2-methylidenehexanamide Chemical compound CCCCC(=C)C(N)=O GASMGDMKGYYAHY-UHFFFAOYSA-N 0.000 description 1
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- GXAZFDDOJOCXLO-UHFFFAOYSA-N 3,3-dibromopropyl prop-2-enoate Chemical compound BrC(Br)CCOC(=O)C=C GXAZFDDOJOCXLO-UHFFFAOYSA-N 0.000 description 1
- WGKYSFRFMQHMOF-UHFFFAOYSA-N 3-bromo-5-methylpyridine-2-carbonitrile Chemical compound CC1=CN=C(C#N)C(Br)=C1 WGKYSFRFMQHMOF-UHFFFAOYSA-N 0.000 description 1
- NDWUBGAGUCISDV-UHFFFAOYSA-N 4-hydroxybutyl prop-2-enoate Chemical compound OCCCCOC(=O)C=C NDWUBGAGUCISDV-UHFFFAOYSA-N 0.000 description 1
- DLFVBJFMPXGRIB-UHFFFAOYSA-N Acetamide Chemical group CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- KXDAEFPNCMNJSK-UHFFFAOYSA-N Benzamide Chemical group NC(=O)C1=CC=CC=C1 KXDAEFPNCMNJSK-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- ZHNUHDYFZUAESO-UHFFFAOYSA-N Formamide Chemical group NC=O ZHNUHDYFZUAESO-UHFFFAOYSA-N 0.000 description 1
- CNCOEDDPFOAUMB-UHFFFAOYSA-N N-Methylolacrylamide Chemical compound OCNC(=O)C=C CNCOEDDPFOAUMB-UHFFFAOYSA-N 0.000 description 1
- 241000233805 Phoenix Species 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N Tetraethylene glycol, Natural products OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- ASAPXSLRMDUMFX-QXMHVHEDSA-N [(z)-octadec-9-enyl] prop-2-enoate Chemical compound CCCCCCCC\C=C/CCCCCCCCOC(=O)C=C ASAPXSLRMDUMFX-QXMHVHEDSA-N 0.000 description 1
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 125000005396 acrylic acid ester group Chemical group 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
- 125000002252 acyl group Chemical group 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 125000005428 anthryl group Chemical group [H]C1=C([H])C([H])=C2C([H])=C3C(*)=C([H])C([H])=C([H])C3=C([H])C2=C1[H] 0.000 description 1
- 125000004104 aryloxy group Chemical group 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 1
- 125000000051 benzyloxy group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])O* 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 125000002592 cumenyl group Chemical group C1(=C(C=CC=C1)*)C(C)C 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- KBLWLMPSVYBVDK-UHFFFAOYSA-N cyclohexyl prop-2-enoate Chemical compound C=CC(=O)OC1CCCCC1 KBLWLMPSVYBVDK-UHFFFAOYSA-N 0.000 description 1
- 125000002933 cyclohexyloxy group Chemical group C1(CCCCC1)O* 0.000 description 1
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 1
- 125000006182 dimethyl benzyl group Chemical group 0.000 description 1
- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- IINNWAYUJNWZRM-UHFFFAOYSA-L erythrosin B Chemical compound [Na+].[Na+].[O-]C(=O)C1=CC=CC=C1C1=C2C=C(I)C(=O)C(I)=C2OC2=C(I)C([O-])=C(I)C=C21 IINNWAYUJNWZRM-UHFFFAOYSA-L 0.000 description 1
- 229940011411 erythrosine Drugs 0.000 description 1
- 235000012732 erythrosine Nutrition 0.000 description 1
- 239000004174 erythrosine Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- RBVLUTAXWVILBT-UHFFFAOYSA-N ethyl prop-2-eneperoxoate Chemical compound CCOOC(=O)C=C RBVLUTAXWVILBT-UHFFFAOYSA-N 0.000 description 1
- 125000000031 ethylamino group Chemical group [H]C([H])([H])C([H])([H])N([H])[*] 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical group C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- ACCCMOQWYVYDOT-UHFFFAOYSA-N hexane-1,1-diol Chemical compound CCCCCC(O)O ACCCMOQWYVYDOT-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- PBOSTUDLECTMNL-UHFFFAOYSA-N lauryl acrylate Chemical compound CCCCCCCCCCCCOC(=O)C=C PBOSTUDLECTMNL-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- ZIUHHBKFKCYYJD-UHFFFAOYSA-N n,n'-methylenebisacrylamide Chemical compound C=CC(=O)NCNC(=O)C=C ZIUHHBKFKCYYJD-UHFFFAOYSA-N 0.000 description 1
- YRDNVESFWXDNSI-UHFFFAOYSA-N n-(2,4,4-trimethylpentan-2-yl)prop-2-enamide Chemical compound CC(C)(C)CC(C)(C)NC(=O)C=C YRDNVESFWXDNSI-UHFFFAOYSA-N 0.000 description 1
- OMNKZBIFPJNNIO-UHFFFAOYSA-N n-(2-methyl-4-oxopentan-2-yl)prop-2-enamide Chemical compound CC(=O)CC(C)(C)NC(=O)C=C OMNKZBIFPJNNIO-UHFFFAOYSA-N 0.000 description 1
- UTSYWKJYFPPRAP-UHFFFAOYSA-N n-(butoxymethyl)prop-2-enamide Chemical compound CCCCOCNC(=O)C=C UTSYWKJYFPPRAP-UHFFFAOYSA-N 0.000 description 1
- DASJFYAPNPUBGG-UHFFFAOYSA-N naphthalene-1-sulfonyl chloride Chemical compound C1=CC=C2C(S(=O)(=O)Cl)=CC=CC2=C1 DASJFYAPNPUBGG-UHFFFAOYSA-N 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 125000005184 naphthylamino group Chemical group C1(=CC=CC2=CC=CC=C12)N* 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 229920000847 nonoxynol Polymers 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- QTECDUFMBMSHKR-UHFFFAOYSA-N prop-2-enyl prop-2-enoate Chemical compound C=CCOC(=O)C=C QTECDUFMBMSHKR-UHFFFAOYSA-N 0.000 description 1
- QLNJFJADRCOGBJ-UHFFFAOYSA-N propionamide Chemical group CCC(N)=O QLNJFJADRCOGBJ-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 125000003011 styrenyl group Chemical group [H]\C(*)=C(/[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- KZNICNPSHKQLFF-UHFFFAOYSA-N succinimide Chemical group O=C1CCC(=O)N1 KZNICNPSHKQLFF-UHFFFAOYSA-N 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- MUTNCGKQJGXKEM-UHFFFAOYSA-N tamibarotene Chemical compound C=1C=C2C(C)(C)CCC(C)(C)C2=CC=1NC(=O)C1=CC=C(C(O)=O)C=C1 MUTNCGKQJGXKEM-UHFFFAOYSA-N 0.000 description 1
- DQFBYFPFKXHELB-VAWYXSNFSA-N trans-chalcone Chemical group C=1C=CC=CC=1C(=O)\C=C\C1=CC=CC=C1 DQFBYFPFKXHELB-VAWYXSNFSA-N 0.000 description 1
- WBYWAXJHAXSJNI-VOTSOKGWSA-M trans-cinnamate Chemical class [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- 150000004072 triols Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
- H05K3/184—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、新規なる組成物に関し、さらに詳しくは、高
密度プリント基板の製造などに有用な、殊に耐アルカリ
性に優れた特性を有する無電解鋼メツキ用光硬化性組成
物に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a novel composition, and more particularly to a novel composition having particularly excellent alkali resistance, which is useful for manufacturing high-density printed circuit boards. The present invention relates to a photocurable composition for plating electrolytic steel.
現在、プリント基板の製造方法は、次の三法に大別され
る。すなわち、銅張積層板上に形成されたレジスト像を
保護皮膜としてエツチング等によシ所定の回路を作成し
ていくサブトラクティブ法、絶縁板上に所定のレジスト
像を形成し、化学銅メツキを行い回路を形成していくフ
ルアデイティブ法、および両者の中間的な手法であるセ
ミアデイティブ法が挙げられる。これらの中で、現在は
サブトラクティブ法が主流をなしているが、基板の高密
度化、高信頼性化の要求が高まっている技術趨勢の中で
、高アスペクト比ホール、小径ホール等のスルーホール
メツキが難しいという欠点を有し、さらに、製造工程が
長く複雑であることからもセミアデイティブ法、フルア
デイティブ法が急速に注目されてきている。一方、各々
の方法に応じて多種多様の光硬化型レジスト材料が開発
されてきており、プリント基板製造用として様々な特性
が要求されている。これら緒特性として、感度、解像力
といったリソグラフィー特性はもとよシ、耐熱性、機械
的強度、耐酸性、耐アルカリ性といった特性が挙げられ
る。中でも耐無電解銅メツキ液性能、とりわけ、高耐ア
ルカリ性能が重要となっている。Currently, printed circuit board manufacturing methods can be roughly divided into the following three methods. In other words, there is a subtractive method in which a resist image formed on a copper-clad laminate is used as a protective film to create a prescribed circuit by etching, etc., and a resist image is formed on an insulating plate and chemical copper plating is applied. There are full additive methods, in which a circuit is formed using a single process, and a semi-additive method, which is an intermediate method between the two. Among these methods, the subtractive method is currently the mainstream, but with the technological trend of higher density and higher reliability of substrates, it is becoming more difficult to use through-holes such as high aspect ratio holes and small diameter holes. Semi-additive and full-additive methods are rapidly attracting attention because they have the drawback that hole plating is difficult and the manufacturing process is long and complicated. On the other hand, a wide variety of photocurable resist materials have been developed according to each method, and various properties are required for use in printed circuit board manufacturing. These properties include lithography properties such as sensitivity and resolution, as well as properties such as heat resistance, mechanical strength, acid resistance, and alkali resistance. Among these, electroless copper plating solution resistance, especially high alkali resistance, is important.
従来、アディティブ法プロセスに用い得る光硬化型レジ
スト、とシわけ、セミアデイティブ法プロセス用のドラ
イフィルム状フォトレジストは十分な性能を有しておら
ず、メツキ時のレジスト像の基板からのずれや剥離、ま
た、現像液として1.1.1−)リクロロエタンが使用
できなかったシ、解像力が低かったり等の問題があり、
使用に耐え得るものではない。Conventionally, photocurable resists that can be used in additive processes, especially dry film photoresists for semi-additive processes, have not had sufficient performance, and the resist image shifts from the substrate during plating. There were problems such as peeling, the inability to use 1.1.1-)lichloroethane as a developer, and low resolution.
It is not suitable for use.
本発明者らは、こうした技術動向を踏まえ、鋭意検討を
重ねた結果、耐酸性、耐アルカリ性、耐熱性、機械的強
度に優れた剥離可能な、殊に高耐アルカリ性を有するが
故に無電解銅メツキ法によシ回路を形成していくプロセ
スに有効な無電解銅メツキ用光硬化性組成物を見いだし
、本発明をなすに至った。In light of these technological trends, the present inventors have conducted extensive studies and found that electroless copper has excellent acid resistance, alkali resistance, heat resistance, and mechanical strength, and can be peeled off, especially since it has high alkali resistance. We have discovered a photocurable composition for electroless copper plating that is effective in the process of forming circuits by the plating method, and have accomplished the present invention.
本発明は、下式(A”lで示される繰り返し構造単位を
含む重合体(以下、化合物(a)と略称する)100重
量部に対し〔但し、式(A)中ビニル基は、主鎖の炭素
原子に対して、オルト、メタ、もしくはパラ位に置換す
る〕、(イ)下式〔B〕もしくは(C)で示される縁9
返し構造単位を含み、数平均分子量が1 、000ない
し500,000である重合体0.5ないし100重量
部〔以下、化合物(b)および(C)と略称する〕〔但
し、式(B)中nはOないし2の整数を表し、Xは水酸
基、エーテル結合を有する基、アミノ基、アミド基、イ
ミド基を表し、また、(OH2)n−Xは主鎖の炭素原
子に対してメタ、もしくはパラ位に置換する〕、(ロ)
光重合性化合物10ないし300重量部を含有してなる
ことを特徴とする無電解銅メツキ用光硬化性組成物に関
するものである。The present invention is based on 100 parts by weight of a polymer containing a repeating structural unit represented by the following formula (A''l) (hereinafter abbreviated as compound (a)) [However, in formula (A), the vinyl group is ], (a) edge 9 represented by the following formula [B] or (C)
0.5 to 100 parts by weight of a polymer containing a return structural unit and having a number average molecular weight of 1,000 to 500,000 [hereinafter abbreviated as compounds (b) and (C)] [provided that formula (B) n represents an integer from O to 2, X represents a hydroxyl group, a group having an ether bond, an amino group, an amide group, or an imide group; , or substitute in the para position], (b)
The present invention relates to a photocurable composition for electroless copper plating, which contains 10 to 300 parts by weight of a photopolymerizable compound.
本発明で用い得る化合物(a)の数平均分子量は、光硬
化性組成物としての解像力の点で、−数的に500ない
し1 、000 、000であるが、光硬化性組成物と
しての感度の面から、5,000ないし500 、00
0が好ましい範囲である。The number average molecular weight of the compound (a) that can be used in the present invention is -500 to 1,000,000 in terms of resolution as a photocurable composition, but the sensitivity as a photocurable composition is From the aspect of 5,000 to 500,00
0 is a preferred range.
式(A)中ビニル基は、オルト、メタ、もしくは、パラ
位のいずれの位置でもとり得るが、光硬化性組成物とし
ての感度の面からメタ、もしくは、パラ位が好ましい。The vinyl group in formula (A) can be in any of the ortho, meta, or para positions, but is preferably in the meta or para position from the viewpoint of sensitivity as a photocurable composition.
化合物(a)は式(A)で示される繰り返し構造単位以
外に、一般式
で示されるRmb返し構造単位〔D〕を有することが出
来る。In addition to the repeating structural unit represented by formula (A), compound (a) can have an Rmb repeating structural unit [D] represented by the general formula.
繰り返し構造単位〔D〕におけるw、x、yおよび2は
各々、水素、ハロゲン、シアノ基、炭素数1ないし6の
アルキル基、炭素数1ないし6のハロゲン化アルキル基
、炭素数1ないし6のアルキル基もしくはハロゲン化ア
ルキル基によって置換された炭素数6ないし30のアリ
ール基、ケイ素原子を含む基によって置換された炭素数
6ないし30のアリール基、炭素数6ないし30のアリ
ール基、−cooal、 −co几1.−0−00R4
(R1は炭素数工ないし12のアルキル基もしくはハロ
ゲン化アルキル基、炭素数1ないし6のアルキル基もし
くはハロゲン化アルキル基で置換された炭素数6ないし
30のアリール基、ケイ素原子を含む基によって置換さ
れた炭素数6ないし30のアリール基、または炭素数6
ないし30のアリール基)、ニトロ基、または、ケイ素
原子を含む基を用い得る。w, x, y and 2 in the repeating structural unit [D] each represent hydrogen, halogen, cyano group, alkyl group having 1 to 6 carbon atoms, halogenated alkyl group having 1 to 6 carbon atoms, or halogenated alkyl group having 1 to 6 carbon atoms. An aryl group having 6 to 30 carbon atoms substituted with an alkyl group or a halogenated alkyl group, an aryl group having 6 to 30 carbon atoms substituted with a group containing a silicon atom, an aryl group having 6 to 30 carbon atoms, -cooal, -co几1. -0-00R4
(R1 is substituted with an alkyl group having 1 to 12 carbon atoms or a halogenated alkyl group, an aryl group having 6 to 30 carbon atoms substituted with an alkyl group having 1 to 6 carbon atoms or a halogenated alkyl group, or a group containing a silicon atom) aryl group having 6 to 30 carbon atoms, or aryl group having 6 carbon atoms
to 30 aryl groups), a nitro group, or a group containing a silicon atom.
具体的な好ましいw、x、yおよびZの組合せを(W、
X、Y、Z)の形式で示すと、(H,H,)I、I()
、(H+ H+ H+ 06H5)、(H、H、H、O
,H4−02H4)、(H。A specific preferred combination of w, x, y and Z is (W,
When expressed in the form of (X, Y, Z), (H, H,) I, I ()
, (H+ H+ H+ 06H5), (H, H, H, O
, H4-02H4), (H.
H+ H+ 0toHy)t (Hr II + H
r 014H9)、(H、H、OH3゜C,H5)、
(H+ OHa + H* ClH4S t (0Hs
)a)、 (H,H。H+ H+ 0toHy)t (Hr II + H
r 014H9), (H, H, OH3°C, H5),
(H+ OHa + H* ClH4S t (0Hs
)a), (H,H.
C6H5+ 061(s )、 (c、[i51 H+
H* 06H5)、 (c、n51 H+ )! +
01oHy)、 (0sHs + HJ HI 014
H9)、 (C1,H7,H,H。C6H5+ 061(s), (c, [i51 H+
H* 06H5), (c, n51 H+)! +
01oHy), (0sHs + HJ HI 014
H9), (C1, H7, H, H.
CxoIry)、 (H、H、H,0OOOH,)、
(H,H,H。CxoIry), (H,H,H,0OOOH,),
(H, H, H.
C00OF3)、 (H、H、OH3,0OOOHx)
、 (H,H,01゜000H3)、 (H,H,H,
ON)、 (H、H、H,0OOC16H,)、(H、
H、H、S i (OH3)3)、 (H+ H+ H
* S r (C6H5)3)等であシ、耐薬品性の面
からよシ好ましい具体例として、(H,H,H,H)、
(H,H,HI0sHs)、(H。C00OF3), (H,H,OH3,0OOOHx)
, (H,H,01°000H3), (H,H,H,
ON), (H, H, H, 0OOC16H,), (H,
H, H, S i (OH3)3), (H+ H+ H
* S r (C6H5)3), etc., but preferred specific examples from the viewpoint of chemical resistance include (H, H, H, H),
(H, H, HI0sHs), (H.
H+ HI C6I(4−C2H4)、(Hs H+
Hr 010H7)、(H,H。H+ HI C6I(4-C2H4), (Hs H+
Hr 010H7), (H,H.
Hr 014H9)、(Hr Hs OH3+ 0aH
s )、(H、OH3,H。Hr 014H9), (Hr Hs OH3+ 0aH
s ), (H, OH3, H.
0sHa −S i (CHs)s)、(H、H、O,
H5、0sHs)、(C5Hs +H+ H* 0aH
s)、(0sHs * Hr H* 010H7)、(
0,H5,H。0sHa −S i (CHs)s), (H, H, O,
H5, 0sHs), (C5Hs +H+ H* 0aH
s), (0sHs * Hr H* 010H7), (
0,H5,H.
014H9)、(01el”IT r H* H+ 0
1oHy)等であるが、これらに制限されない。014H9), (01el”IT r H* H+ 0
1oHy), but is not limited to these.
また、構造式CD〕で示される繰)返し構造単位は一種
類である必要はなく、二種類以上のものを適当な比率で
用いることにより、また、第三成分を用いることにより
、光硬化性組成物としての総合性能を向上させることが
できる。Furthermore, the repeating structural unit represented by the structural formula CD does not need to be of one type, but can be photocurable by using two or more types in an appropriate ratio or by using a third component. The overall performance of the composition can be improved.
化合物(a)の式(A)で示されるab返し構造単位の
モル分率は工ないし99%が一般的で、解像度、感度の
点で、5ないし95%が好ましい。The molar fraction of the ab repeating structural unit represented by formula (A) in compound (a) is generally from 1 to 99%, and preferably from 5 to 95% from the viewpoint of resolution and sensitivity.
本発明で用い得る化合物(a)は特開昭56−1650
9号公報に記載の方法によシ製造できる。Compound (a) that can be used in the present invention is disclosed in JP-A-56-1650.
It can be produced by the method described in Publication No. 9.
化合物(b)もしくは(e)の使用量は、化合物(a)
100重量部に対して、化合物(、)との相溶性の面で
、0.5ないし100重量部が一般的であるが、光硬化
性組成物としての解像力の点で1ないし80重量部が好
ましく、アルカリ耐性の面で1ないし50重量部がさら
に好ましい範囲である。The amount of compound (b) or (e) used is the same as that of compound (a).
For 100 parts by weight, the amount is generally 0.5 to 100 parts by weight in terms of compatibility with the compound (,), but in terms of resolution as a photocurable composition, 1 to 80 parts by weight is used. Preferably, from the viewpoint of alkali resistance, the range is more preferably 1 to 50 parts by weight.
化合物(b)もしくは(c)の数平均分子量は、解像力
の面から1 、000ないし500 、000が一般的
であるが、アルカリ耐性の面からs 、ooo以上、化
合物(、)との相溶性の点で200,000以下が好ま
しい。The number average molecular weight of compound (b) or (c) is generally 1,000 to 500,000 from the viewpoint of resolution, but from the viewpoint of alkali resistance it is s, ooo or more, and the number average molecular weight is compatibility with compound (,). From this point of view, it is preferably 200,000 or less.
化合物(b)の式CB)中、置換基−(OH2) −X
の置換位置はメタ位もしくはノぞう位のいずれもとり得
る。In the formula CB) of compound (b), the substituent -(OH2) -X
The substitution position can be either the meta position or the nozo position.
化合物(b)の式CB)中、nは0ないし2の整数を用
い得るが、製造上の面から、0ないし1が好ましい。In formula CB) of compound (b), n may be an integer of 0 to 2, but from the viewpoint of production, n is preferably 0 to 1.
また、Xには水酸基、エーテル結合を有する基、アミノ
基、アミド基、およびイミド基を用いることが出来る。Further, for X, a hydroxyl group, a group having an ether bond, an amino group, an amide group, and an imide group can be used.
エーテル結合を有する基の代表例として、メトキシ基、
エトキシ基、ブトキシ基、、シクロヘキシルオキシ基、
フェノキシ基、ベンジルオキシ基等のアルキルもしくは
アリールオキシ基を挙げることが出来る。Typical examples of groups having an ether bond include methoxy group,
Ethoxy group, butoxy group, cyclohexyloxy group,
Examples include alkyl or aryloxy groups such as phenoxy and benzyloxy groups.
本発明で言うアミノ基とは以下の例で代表される基のこ
とを言う。例えば、アミノ基、メチルアミノ基、エチル
アミノ基、シクロヘキシルアミノ基、フェニルアミノ基
、ベンジルアミノ基、ナフチルアミノ基、ジメチルアミ
ノ基、ジフェニルアミノ基、メチルエチルアミノ基等の
ことである。The amino group referred to in the present invention refers to a group represented by the following examples. Examples include an amino group, a methylamino group, an ethylamino group, a cyclohexylamino group, a phenylamino group, a benzylamino group, a naphthylamino group, a dimethylamino group, a diphenylamino group, and a methylethylamino group.
また、アミド基およびイミド基の代表例として、ホルム
アミド基、アセトアミド基、ベンズアミド基、メチルア
セトアミド基、メタクリルアミド基、アクリルアミド基
、スクシンイミド基、フタルイミド基、マレインイミド
基、ジメタクリルアミド基、ジアクリルアミド基等が挙
げられる。Typical examples of the amide group and imide group include formamide group, acetamide group, benzamide group, methylacetamide group, methacrylamide group, acrylamide group, succinimide group, phthalimide group, maleimide group, dimethacrylamide group, diacrylamide group. etc.
上記代表例の中で、解像力および製造の容易さの点から
、メトキシ基、エトキシ基、フェノキシ基、メチルアミ
ノ基、フェニルアミノ基、ベンジルアミノ基、ジフェニ
ルアミノ基、アクリアミド基、メタクリルアミド基、ア
クリルアミド基、フタルイミド基、ジメタクリルアミド
基、ジアクリルアミド基、マレインイミド基、等が好ま
しく、さらに、アルカリ耐性の面から、ジフェニルアミ
ノ基、フタルイミド基、メトキシ基がさらに好ましい。Among the above representative examples, from the viewpoint of resolution and ease of production, methoxy group, ethoxy group, phenoxy group, methylamino group, phenylamino group, benzylamino group, diphenylamino group, acrylamide group, methacrylamide group, acrylamide group A phthalimide group, a dimethacrylamide group, a diacrylamide group, a maleimide group, and the like are preferable, and from the viewpoint of alkali resistance, a diphenylamino group, a phthalimide group, and a methoxy group are even more preferable.
化合物(C)で示される例として下記のものを挙げるこ
とが出来る。Examples of compound (C) include the following.
に
上記式中、置換基Rはアルキル基、アリール基、アシル
基等を表す。これらの具体例として、メチル基、エチル
基、ブチル基、イソゾロビル基、フェニル基、ヘンシル
基、クメニル基、シンナミル基、フェネチル基、ナフチ
ル基、アントリル基等が挙げられる。これらの中で化合
物(−)との相溶性の面でメチル基、フェニル基、シン
ナミル基等が好ましい。In the above formula, the substituent R represents an alkyl group, an aryl group, an acyl group, etc. Specific examples of these include methyl group, ethyl group, butyl group, isozorobyl group, phenyl group, hensyl group, cumenyl group, cinnamyl group, phenethyl group, naphthyl group, anthryl group, and the like. Among these, methyl group, phenyl group, cinnamyl group, etc. are preferable in terms of compatibility with compound (-).
化合物(b)もしくは(C)は化合物(、)との相溶性
を高める目的で式〔B〕もしくは(0)で示される繰り
返し構造単位以外に繰シ返し構造単位〔D〕を含むこと
が好ましい。これらの好ましい繰シ返し構造単位の具体
例を(W、X、Y、Z)の形式で宍すと、(H、II、
Ha 0sHs)、(H、H、)I 、 061−1
4 02H4)、(H。Compound (b) or (C) preferably contains a repeating structural unit [D] in addition to the repeating structural unit represented by formula [B] or (0) for the purpose of increasing compatibility with compound (,). . Specific examples of these preferable repeating structural units are in the format (W, X, Y, Z), (H, II,
Ha0sHs), (H,H,)I, 061-1
4 02H4), (H.
H、H、0IOH7)、()I 、 H、Hs 014
H9)、(HI HI cHs *06Hs)、(H、
H* 08HISe 0sHs)が挙げられる。H, H, 0IOH7), ()I, H, Hs 014
H9), (HI HI cHs *06Hs), (H,
H* 08HISe 0sHs).
本発明で言う無電解銅メツキに対する耐性とは、銅張積
層板等の基板に光硬化性層を積層した積層体を無電解銅
メツキ液中に浸漬したとき、光硬化性層が基板から剥離
したシ、メツキ液のしみ込みが観測されたシ、メツキ反
応が停止したシ、さらには、メツキ反応が暴走したシと
言った影響が観測されないことを言う。In the present invention, resistance to electroless copper plating means that when a laminate in which a photocurable layer is laminated on a substrate such as a copper-clad laminate is immersed in an electroless copper plating solution, the photocurable layer peels off from the substrate. This refers to the fact that no effects were observed, such as when the Metsuki reaction occurred, when the Metsuki liquid seeped in, when the Metsuki reaction stopped, and even when the Metsuki reaction went out of control.
本発明の光重合性化合物の使用量は化合物(a)100
重量部に対して、感度の面から10ないし300重量部
が一般的で、光硬化性層の感度の面から、20重量部以
上が好ましく、また、解像力の点で250重量部以下が
好ましい範囲である。さらに、本発明の光硬化性組成物
としての総合的な面からは、30ないし250重量部が
特に好ましい範囲である。The amount of the photopolymerizable compound of the present invention used is compound (a) 100
The range is generally 10 to 300 parts by weight in terms of sensitivity, preferably 20 parts by weight or more in terms of sensitivity of the photocurable layer, and preferably 250 parts by weight or less in terms of resolution. It is. Further, from the overall viewpoint of the photocurable composition of the present invention, a particularly preferable range is 30 to 250 parts by weight.
本発明で言う光重合性化合物とは、官能基として、例え
ば、アクリロイル基、メタクリロイル基、ビニルフェニ
ル基、アリル基、シンナモイル基、シンナミリデンアセ
チル基、ベンザルアセトフェノン基、マレイミド基、フ
ェニルマレイミド基、ビニルフリル基、ビニルピリジル
基、ビニルイミダゾリル基等の二重結合、グリシジル基
等のエポキシ基等を有するものである。これらの一般例
として、ケイ皮酸エステル、マレイミド、フェニルマレ
イミド、ビスマレイミド、あるいはトリメチロールプロ
パントリアクリレート、ペンタエリトリトールトリアク
リレート、ペンタエリトリトールテトラアクリレート、
ジペンタエリトリトールへキサアクリレート、ジペンタ
エリトリトールペンタアクリレート、ジペンタエリトリ
トールテトラアクリレート、ジペンタエリトリトールト
リアクリレート、ジカルゼン酸とジオールもしくはトリ
オールのエステルのアクリレート、トリス(ヒドロキシ
エチル)トリアジンアクリレートなどのアクリル酸エス
テル、またはこれらに対応するメタクリル酸エステル、
アクリルアミド、メチレンビスアクリルアミド、N−1
−ブチルアクリルアミド、N−t−オクチルアクリルア
ミド、N−メチロールアクリルアミド、N−ブトキシメ
チルアクリルアミド、N−インブトキシメチルアクリル
アミド、ジアセトンアクリルアミド、2メチル−3−ス
ルフオシロビルアクリルアミド、トリアクリルアミドホ
ルマールなどのアクリルアミド類、またはとれらに対応
するメタクリルアミド、スチレン、ジビニルベンゼン、
アクリロニトリル、メタクリロイル基ル、エチルアクリ
レート、インプロピルアクリレート、ブチルアクリレー
ト、シクロヘキシルアクリレート、ベンジルアクリレー
ト、2−エチルへキシルアクリレート、ラウリルアクリ
レート、カルピトールアクリレート、エトキシアクリレ
ート、メトキシポリエチレングリコールアクリレート、
2−ヒドロキシエチルアクリレート、2−ヒドロキシプ
ロピルアクリレート、2−ヒドロキシ−3−クロロプロ
ピルアクリレート、1.4−ブチレングリコールモノア
クリレート、ジメチルアミノエチルアクリレート、ジエ
チルアミノエチルアクリレート、テトラヒドロフルフリ
ルアクリレート、2−クロロエテルアクリレート、2.
3−ジブロムプロピルアクリレート、トリブロムフェニ
ルアクリレート、アリルアクリレート、オレイルアクリ
レートなどのモノアクリレート、さらにベンタンジオー
ル、ヘキサンジオール、エチレンクリコール、テトラエ
チレンクリコール、ノナエチレングリコール、ポリエチ
レングリコール、ネオペンタ/ジオール、ポリプロピレ
ングリコール、アジピン酸のネオベンタンジオールエス
テルなどのジオールのアクリル酸エステルまたはメタク
リル酸エステル、などであるが、特にこれらに制限され
ない。The photopolymerizable compound referred to in the present invention refers to a functional group such as an acryloyl group, a methacryloyl group, a vinylphenyl group, an allyl group, a cinnamoyl group, a cinnamylideneacetyl group, a benzalacetophenone group, a maleimide group, and a phenylmaleimide group. , a double bond such as a vinylfuryl group, a vinylpyridyl group, a vinylimidazolyl group, and an epoxy group such as a glycidyl group. Common examples of these include cinnamate esters, maleimides, phenylmaleimides, bismaleimides, or trimethylolpropane triacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate,
Acrylic acid esters such as dipentaerythritol hexaacrylate, dipentaerythritol pentaacrylate, dipentaerythritol tetraacrylate, dipentaerythritol triacrylate, acrylates of esters of dicarzenic acid and diols or triols, tris(hydroxyethyl)triazine acrylate, or Methacrylic acid esters corresponding to these,
Acrylamide, methylenebisacrylamide, N-1
- Acrylamides such as butylacrylamide, N-t-octylacrylamide, N-methylolacrylamide, N-butoxymethylacrylamide, N-imbutoxymethylacrylamide, diacetone acrylamide, 2-methyl-3-sulfosylvir acrylamide, triacrylamide formal methacrylamide, styrene, divinylbenzene,
Acrylonitrile, methacryloyl group, ethyl acrylate, inpropyl acrylate, butyl acrylate, cyclohexyl acrylate, benzyl acrylate, 2-ethylhexyl acrylate, lauryl acrylate, carpitol acrylate, ethoxy acrylate, methoxypolyethylene glycol acrylate,
2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, 2-hydroxy-3-chloropropyl acrylate, 1,4-butylene glycol monoacrylate, dimethylaminoethyl acrylate, diethylaminoethyl acrylate, tetrahydrofurfuryl acrylate, 2-chloroethyl acrylate , 2.
Monoacrylates such as 3-dibromopropyl acrylate, tribromphenyl acrylate, allyl acrylate, and oleyl acrylate, as well as bentanediol, hexanediol, ethylene glycol, tetraethylene glycol, nonaethylene glycol, polyethylene glycol, neopenta/diol, and polypropylene. Examples include, but are not limited to, glycols, acrylic esters or methacrylic esters of diols such as neobentanediol ester of adipic acid, and the like.
例えば、グリシジルメタクリレート、スチレン等のモノ
マー類、およびスチレン骨格を有する多官能モノマー類
、あるいはエポキシ樹脂といった反応性官能基を有し、
かつ、光重合性のものであれば、本発明の光硬化性層の
光重合性化合物として使用できるし、また、これらは常
温で液状もしくは固体状の何れであってもよい。For example, monomers such as glycidyl methacrylate and styrene, polyfunctional monomers having a styrene skeleton, or reactive functional groups such as epoxy resins,
In addition, as long as it is photopolymerizable, it can be used as a photopolymerizable compound in the photocurable layer of the present invention, and it may be either liquid or solid at room temperature.
本発明をさらに有効ならしめる目的で、光重合開始剤ま
たは光増感剤を使用することができる。In order to make the present invention more effective, photoinitiators or photosensitizers can be used.
使用できる光重合開始剤または光増感剤としては、例、
t ハヘンゾイン、ベンゾインアルキルエーテル、アン
スラキノンなどの多核キノン類、ベンゾフェノン、クロ
ロベンゾフェノン、ミヒラーズヶトン、フレオノ/、チ
オキサントン、ジアルキルチオキサントン、ハロゲン化
チオキサントン、ナフタレンスルホニルクロリド、アゾ
ビスイソブチロニトリル、1−アゾビス−1−シクロヘ
キサンヵルゼニトリル、2.4−ジクロロペンゾイルパ
ーオキンド、ジフェニルジスルフィド、ジペンゾチアゾ
ール% 1−(4−イソプロピルフェニル)−2−ヒ
ドロキシ−2−メチルプロパン−1−オン、2−ヒドロ
キシ−2−メチル−1−フェニルプロパン−1−オン;
エリスロシンなどの色素と電子供与物質、トリエチルア
ミン、p−アミン安息香酸エステル類、トリフェニルホ
スフィン、2.2−ジメトキシ−2−フェニルアセトフ
ェノンなどモ挙げられる。これらの光重合開始剤または
光増感剤はそれぞれ単独で用いてもよいし、2種以上組
み合わせて用いてもよい。Examples of photopolymerization initiators or photosensitizers that can be used include:
t Polynuclear quinones such as hachenzoin, benzoin alkyl ether, anthraquinone, benzophenone, chlorobenzophenone, Michler's carbon, fleono/, thioxanthone, dialkylthioxanthone, halogenated thioxanthone, naphthalenesulfonyl chloride, azobisisobutyronitrile, 1-azobis-1 -Cyclohexanecarzenitrile, 2,4-dichloropenzoylperoquinde, diphenyl disulfide, dipenzothiazole% 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropan-1-one, 2-hydroxy- 2-methyl-1-phenylpropan-1-one;
Examples include dyes and electron-donating substances such as erythrosine, triethylamine, p-amine benzoates, triphenylphosphine, and 2,2-dimethoxy-2-phenylacetophenone. These photopolymerization initiators or photosensitizers may be used alone or in combination of two or more.
さらに、本発明の光硬化性組成物には、必要に応じて染
料、安定剤、可塑剤などの添加剤を加えることもできる
。Furthermore, additives such as dyes, stabilizers, and plasticizers can be added to the photocurable composition of the present invention, if necessary.
本発明の光硬化性組成物は、現像性が良好な故に高い解
像力を有し、かつ露光後の硬化膜の機械的強度、基板と
の密着力、耐薬品性、耐メツキ液性など特に耐アルカリ
性に優れるフォトレジスト材料として用いられ、また銅
スルーホール法、半田スルーホール法いずれにおいても
性能が優れ、かつ、このものを用いると高密度、高精密
なプリント基板の作成が容易であり、その上プリント基
板作成工程が簡略かできるという利点がある。The photocurable composition of the present invention has good developability and therefore high resolution, and is particularly resistant to mechanical strength of the cured film after exposure, adhesion to the substrate, chemical resistance, and plating solution resistance. It is used as a photoresist material with excellent alkalinity, and has excellent performance in both the copper through-hole method and the solder through-hole method. This has the advantage that the process for producing the upper printed circuit board can be simplified.
殊に無電解銅メツキ法によシ回路を形成していくプロセ
スに有効であシ、本発明の光硬化性組成物を用い回路を
形成する好ましい態様の一つは、基板上に該光硬化性組
成物を積層し、高エネルギー線により所望のパターンを
露光、現像した後、無電解銅メツキ液により銅メツキを
行い、しかる後、基板上に形成されているレジスト像を
剥離シ、所定の回路を作成する事例が挙げられる。It is particularly effective in the process of forming circuits by electroless copper plating, and one preferred embodiment of forming a circuit using the photocurable composition of the present invention is to apply the photocurable composition on a substrate. After laminating the resist composition and exposing and developing a desired pattern with high-energy radiation, copper plating is performed using an electroless copper plating solution. After that, the resist image formed on the substrate is peeled off and a desired pattern is formed. An example is creating a circuit.
ここで言う高エネルギー線とは、光硬化性層を効率よく
硬化させ得る。紫外光、遠紫外光、レーザー光等のこと
であシ、軟X線、電子線等も本発明の光硬化性層を硬化
させるのに有効である。The high-energy rays mentioned here are capable of efficiently curing the photocurable layer. Ultraviolet light, deep ultraviolet light, laser light, etc., soft X-rays, electron beams, etc. are also effective for curing the photocurable layer of the present invention.
以下に実施例により具体的実施態様を示すが、これによ
シ本発明を制限するものではない。Specific embodiments will be shown below with reference to Examples, but the present invention is not limited thereto.
実施例1〜10
攪拌機を備えた1λのセパラブルフラスコに、化合物(
a) 、 (b)もしくは(C)〔実施例で用いた化合
物(a) 、 (b)もしくは(c)に関しては表−1
及び表−2(で−括して示した〕および、表−3に示し
たような添加剤を加え、15時間室温で、攪拌を行った
。Examples 1 to 10 In a 1λ separable flask equipped with a stirrer, the compound (
a), (b) or (C) [For compounds (a), (b) or (c) used in Examples, see Table-1
Additives shown in Table 2 and Table 3 were added, and the mixture was stirred at room temperature for 15 hours.
次いで、支持体としての38μtn厚みのポリエチレン
テレフタレートフィルム上にブレードコーターを用いて
、上記で得られた各混合物を乾燥後の膜厚が50μmn
になるように調整し塗布した後、80℃、15分間熱風
炉で乾燥した。Next, each mixture obtained above was coated onto a polyethylene terephthalate film having a thickness of 38 μm as a support using a blade coater so that the film thickness after drying was 50 μm.
After coating, it was dried in a hot air oven at 80° C. for 15 minutes.
さらに、上記で得られた光硬化性積層体を、銅張ガラス
エポキシ積層板に100℃の温度で加圧ロールを用いて
圧着した。ここで得られた積層体にネガマスクフィルム
を通して超高圧水銀ランプ(オーク製作所、フェニック
ス3000型)により、表−4に示した露光量で光照射
を行った。次いで、スプレーノズルを用い1,1.1−
トリクロロエタンを表−4に示した時間噴霧し、未露光
部分を溶解除去したところ、何れも良好な画像を得た。Furthermore, the photocurable laminate obtained above was pressure-bonded to a copper-clad glass epoxy laminate using a pressure roll at a temperature of 100°C. The laminate thus obtained was irradiated with light at the exposure amount shown in Table 4 using an ultra-high pressure mercury lamp (Oak Seisakusho, Phoenix 3000 model) through a negative mask film. Then, using a spray nozzle, 1,1.1-
When trichloroethane was sprayed for the time shown in Table 4 to dissolve and remove the unexposed areas, good images were obtained in all cases.
上記で得られたレジストパターン〔40μmから200
μm(20μm間隔)までの独立線〕で残っている最小
線幅をもって解像力の評価とした。Resist pattern obtained above [from 40 μm to 200 μm
The minimum line width remaining in the independent lines up to μm (20 μm interval) was used as the evaluation of resolution.
ついで、上記と同様にして得られた画像(100μm角
)ぞターン 100個×100個)が形成された基板を
、市販の無電解銅メツキ液〔シブレイ社製、キューボジ
ツ) 251 ]に550℃30時間浸漬した。このと
きに基板上に残存している角ノソターンの残存数をもっ
て無電解銅メッキ液耐性とした。この試験中メツキ速度
の変化は認められなかった。Next, the substrate on which the image (100 μm square, 100 turns x 100 pieces) obtained in the same manner as above was formed was placed in a commercially available electroless copper plating solution [Cubojitsu 251, manufactured by Sibley Co., Ltd.] at 550°C for 30 minutes. Soaked for an hour. At this time, the number of residual square turns remaining on the substrate was defined as resistance to electroless copper plating solution. No change in plating speed was observed during this test.
以下余白 (注): 表中()内は添加重量(f)を表す。Margin below (note): In the table, the numbers in parentheses represent the added weight (f).
d成分
d−1旭化成工業株式会社製 スタイロンP683
d−2旭化成工業株式会社製 アサフレックス AF
X−800
d−3旭化成工業株式会社製 スタイロンP679
e成分
e−1束亜合成化学工業株式会社、「アロニツクスM−
305JC主成分;ペンタエリトリトールトリアクリレ
ート)
e −2新中村化学工業株式会社製、「NK エステ
ル BPE−2004
開始剤
I−1ベンジル
1−24.4’−(ジメチルアミノ)ベンゾフェノンl
−3トリフェニルホスフィン
1−4 ジメチルベンジルケタール
1−5 ベンゾフェノン
染料
D−1三菱化成工業株式会社製、″“Blue−p”D
−2同社製、 “Green−0”D−3同 社
製、 ”Blue−Q″以下余白
表−4
It)ULIυ
比較例1〜2
以下の組成で調製した混合物を用い、実施例と同様にし
て、解像力及び無電解銅メッキ液耐性の測定を行った。d component d-1 Styron P683 manufactured by Asahi Kasei Corporation d-2 Asaflex AF manufactured by Asahi Kasei Corporation
X-800 d-3 Styron P679 manufactured by Asahi Kasei Corporation e-component e-1 Aronix M-
305JC main component; pentaerythritol triacrylate) e-2 Shin Nakamura Chemical Co., Ltd., "NK Ester BPE-2004 Initiator I-1 Benzyl 1-24.4'-(dimethylamino)benzophenone l
-3 Triphenylphosphine 1-4 Dimethylbenzyl ketal 1-5 Benzophenone dye D-1 manufactured by Mitsubishi Chemical Corporation, "Blue-p" D
-2 Made by the same company, “Green-0”D-3 Made by the same company
Manufactured by "Blue-Q" Margin Table-4 It) ULIυ Comparative Examples 1 to 2 Using mixtures prepared with the following compositions, resolution and electroless copper plating solution resistance were measured in the same manner as in the examples. .
デルペット 70H220f
(旭化成工業株式会社)
トリメチロールプロパン
トリアクリレート 180tベンゾフエノ
ン 10fミヒラーズケトン
1.02メチルエテルケトン(MBK)
39(1スタイロン GP683 180
fトリメチロールプロパン
トリアクリレート 144tベンゾフエノ
ン 6fミヒラーズケトン
0.6 rMEK
320F実施例11
実施例1で得られた組成物を・マーコーターをもちい、
銅張積層板上に、膜厚が59p?nになるように調節し
て塗布した。ついで、80℃、10分間、熱風炉で乾燥
した。これを実施例1〜10と同様にして、露光・現像
を行ったところ、良好な画像を得た。Delpet 70H220f (Asahi Kasei Industries, Ltd.) Trimethylolpropane triacrylate 180t benzophenone 10f Michler's ketone
1.02 Methyl ether ketone (MBK)
39 (1 Styron GP683 180
f trimethylolpropane triacrylate 144t benzophenone 6f Michler's ketone
0.6 rMEK
320F Example 11 The composition obtained in Example 1 was coated using a marker coater.
The film thickness is 59p on the copper clad laminate? It was adjusted and applied so that it was n. Then, it was dried in a hot air oven at 80°C for 10 minutes. When this was exposed and developed in the same manner as in Examples 1 to 10, a good image was obtained.
特許出願人 旭化成工業株式会社Patent applicant: Asahi Kasei Industries, Ltd.
Claims (1)
00重量部に対し、 ▲数式、化学式、表等があります▼〔A〕 〔但し、式〔A〕中、ビニル基は主鎖の炭素原子に対し
て、オルト、メタ、もしくはパラ位に置換する〕 (イ)下式〔B〕もしくは〔C〕で示される繰り返し構
造単位を含み、数平均分子量が1,000ないし500
,000である重合体0.5〜100重量部、▲数式、
化学式、表等があります▼〔B〕 ▲数式、化学式、表等があります▼〔C〕 〔但し、式〔B〕中nは0ないし2の整数を表わし、X
は水酸基、エーテル結合を有する基、アミノ基、アミド
基、イミド基を表し、また、 −(CH_2)_n−Xは主鎖の炭素原子に対してメタ
、もしくはパラ位に置換する〕 (ロ)光重合性化合物10ないし300重量部を含有し
て成ることを特徴とする無電解銅メッキ用光硬化性組成
物[Claims] Polymer 1 containing a repeating structural unit represented by the following formula [A]
00 parts by weight, ▲ There are numerical formulas, chemical formulas, tables, etc. ▼ [A] [However, in formula [A], the vinyl group is substituted at the ortho, meta, or para position relative to the carbon atom in the main chain. ] (a) Contains a repeating structural unit represented by the following formula [B] or [C], and has a number average molecular weight of 1,000 to 500
,000, 0.5 to 100 parts by weight of the polymer, ▲ formula,
There are chemical formulas, tables, etc. ▼ [B] ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ [C] [However, in the formula [B], n represents an integer from 0 to 2, and
represents a hydroxyl group, a group having an ether bond, an amino group, an amide group, an imide group, and -(CH_2)_n-X is substituted at the meta or para position with respect to the carbon atom of the main chain] (b) A photocurable composition for electroless copper plating, comprising 10 to 300 parts by weight of a photopolymerizable compound.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9162488A JPH01263646A (en) | 1988-04-15 | 1988-04-15 | Photocurable composition for novel electroless plating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9162488A JPH01263646A (en) | 1988-04-15 | 1988-04-15 | Photocurable composition for novel electroless plating |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01263646A true JPH01263646A (en) | 1989-10-20 |
Family
ID=14031719
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9162488A Pending JPH01263646A (en) | 1988-04-15 | 1988-04-15 | Photocurable composition for novel electroless plating |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01263646A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0311351A (en) * | 1989-06-09 | 1991-01-18 | Tosoh Corp | Negative type photosensitive resin composition |
JP2005141243A (en) * | 2000-01-31 | 2005-06-02 | Mitsubishi Paper Mills Ltd | Photosensitive composition and photosensitive lithographic printing plate material |
WO2007102470A1 (en) * | 2006-03-09 | 2007-09-13 | Nippon Steel Chemical Co., Ltd. | Photosensitive resin composition for volume phase hologram recording and optical information recording medium using same |
US20160272737A1 (en) * | 2013-12-25 | 2016-09-22 | Dic Corporation | Resin composition, dry-etching resist mask, and patterning method |
JP2016531971A (en) * | 2013-07-09 | 2016-10-13 | エボニック デグサ ゲーエムベーハーEvonik Degussa GmbH | Electroactive polymer, method for producing the same, electrode and use thereof |
-
1988
- 1988-04-15 JP JP9162488A patent/JPH01263646A/en active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0311351A (en) * | 1989-06-09 | 1991-01-18 | Tosoh Corp | Negative type photosensitive resin composition |
JP2005141243A (en) * | 2000-01-31 | 2005-06-02 | Mitsubishi Paper Mills Ltd | Photosensitive composition and photosensitive lithographic printing plate material |
JP4648695B2 (en) * | 2000-01-31 | 2011-03-09 | 三菱製紙株式会社 | Photosensitive composition and photosensitive lithographic printing plate material |
WO2007102470A1 (en) * | 2006-03-09 | 2007-09-13 | Nippon Steel Chemical Co., Ltd. | Photosensitive resin composition for volume phase hologram recording and optical information recording medium using same |
US8163443B2 (en) | 2006-03-09 | 2012-04-24 | Nippon Steel Chemical Co., Ltd. | Photosensitive resin composition for volume phase hologram recording and optical information recording medium using the same |
JP4976373B2 (en) * | 2006-03-09 | 2012-07-18 | 新日鐵化学株式会社 | Photosensitive resin composition for volume phase hologram recording and optical information recording medium using the same |
JP2016531971A (en) * | 2013-07-09 | 2016-10-13 | エボニック デグサ ゲーエムベーハーEvonik Degussa GmbH | Electroactive polymer, method for producing the same, electrode and use thereof |
US10103384B2 (en) | 2013-07-09 | 2018-10-16 | Evonik Degussa Gmbh | Electroactive polymers, manufacturing process thereof, electrode and use thereof |
US20160272737A1 (en) * | 2013-12-25 | 2016-09-22 | Dic Corporation | Resin composition, dry-etching resist mask, and patterning method |
US9777079B2 (en) * | 2013-12-25 | 2017-10-03 | Dic Corporation | Resin composition, dry-etching resist mask, and patterning method |
CN105849862B (en) * | 2013-12-25 | 2019-07-05 | Dic株式会社 | Resin combination, dry-etching photoresistive mask and pattern forming method |
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