JPH0124840Y2 - - Google Patents

Info

Publication number
JPH0124840Y2
JPH0124840Y2 JP1514983U JP1514983U JPH0124840Y2 JP H0124840 Y2 JPH0124840 Y2 JP H0124840Y2 JP 1514983 U JP1514983 U JP 1514983U JP 1514983 U JP1514983 U JP 1514983U JP H0124840 Y2 JPH0124840 Y2 JP H0124840Y2
Authority
JP
Japan
Prior art keywords
sample
arm
link
link device
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1514983U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59121152U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1514983U priority Critical patent/JPS59121152U/ja
Publication of JPS59121152U publication Critical patent/JPS59121152U/ja
Application granted granted Critical
Publication of JPH0124840Y2 publication Critical patent/JPH0124840Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1514983U 1983-02-04 1983-02-04 電子線露光装置等における試料保持装置 Granted JPS59121152U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1514983U JPS59121152U (ja) 1983-02-04 1983-02-04 電子線露光装置等における試料保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1514983U JPS59121152U (ja) 1983-02-04 1983-02-04 電子線露光装置等における試料保持装置

Publications (2)

Publication Number Publication Date
JPS59121152U JPS59121152U (ja) 1984-08-15
JPH0124840Y2 true JPH0124840Y2 (cs) 1989-07-26

Family

ID=30146486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1514983U Granted JPS59121152U (ja) 1983-02-04 1983-02-04 電子線露光装置等における試料保持装置

Country Status (1)

Country Link
JP (1) JPS59121152U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015029527A1 (ja) * 2013-09-02 2015-03-05 株式会社カイジョー 駆動機構及び製造装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015029527A1 (ja) * 2013-09-02 2015-03-05 株式会社カイジョー 駆動機構及び製造装置
JP2015047667A (ja) * 2013-09-02 2015-03-16 株式会社カイジョー 駆動機構及び製造装置
CN105531077A (zh) * 2013-09-02 2016-04-27 株式会社海上 驱动机构以及制造装置
US9772012B2 (en) 2013-09-02 2017-09-26 Kaijo Corporation Drive mechanism and manufacturing device

Also Published As

Publication number Publication date
JPS59121152U (ja) 1984-08-15

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