JPH0124669Y2 - - Google Patents

Info

Publication number
JPH0124669Y2
JPH0124669Y2 JP5651984U JP5651984U JPH0124669Y2 JP H0124669 Y2 JPH0124669 Y2 JP H0124669Y2 JP 5651984 U JP5651984 U JP 5651984U JP 5651984 U JP5651984 U JP 5651984U JP H0124669 Y2 JPH0124669 Y2 JP H0124669Y2
Authority
JP
Japan
Prior art keywords
wafer
emitting
wafers
light receiving
receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5651984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60170869U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5651984U priority Critical patent/JPS60170869U/ja
Publication of JPS60170869U publication Critical patent/JPS60170869U/ja
Application granted granted Critical
Publication of JPH0124669Y2 publication Critical patent/JPH0124669Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging For Recording Disks (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP5651984U 1984-04-17 1984-04-17 ウエハカウンタ Granted JPS60170869U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5651984U JPS60170869U (ja) 1984-04-17 1984-04-17 ウエハカウンタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5651984U JPS60170869U (ja) 1984-04-17 1984-04-17 ウエハカウンタ

Publications (2)

Publication Number Publication Date
JPS60170869U JPS60170869U (ja) 1985-11-12
JPH0124669Y2 true JPH0124669Y2 (enrdf_load_html_response) 1989-07-26

Family

ID=30580189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5651984U Granted JPS60170869U (ja) 1984-04-17 1984-04-17 ウエハカウンタ

Country Status (1)

Country Link
JP (1) JPS60170869U (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06105746B2 (ja) * 1986-07-03 1994-12-21 東京エレクトロン相模株式会社 ウェハカウンタ及びウェハカウント方法
JPH0611070B2 (ja) * 1987-02-13 1994-02-09 東京エレクトロン株式会社 ウエハカウンタ

Also Published As

Publication number Publication date
JPS60170869U (ja) 1985-11-12

Similar Documents

Publication Publication Date Title
US5183378A (en) Wafer counter having device for aligning wafers
KR100299579B1 (ko) 기판검출장치
EP0284445A1 (en) Disk storage and retrieval device
JPH0124669Y2 (enrdf_load_html_response)
CN212459975U (zh) 电池测试系统
US4859993A (en) Wafer accounting and processing system
CN213355191U (zh) 晶圆载具的存储装置
US4986729A (en) Wafer transfer apparatus
US5780849A (en) Apparatus for detecting objects to be transferred for use in semiconductor device fabrication apparatus
CN118883360A (zh) 一种泡沫塑料表观密度自动检测设备及检测方法
JPH0611070B2 (ja) ウエハカウンタ
JPH1125553A (ja) 媒体搬送装置の位置決め方法及び媒体搬送装置
JPH01743A (ja) ウエハカウンタ
TW571378B (en) Slot detector of cassette for substrate
JPH0727957B2 (ja) 半導体製造装置
JPH0126106Y2 (enrdf_load_html_response)
JP5270953B2 (ja) ロボットハンド装置
JP2000121344A (ja) 半導体ウェーハの厚さ測定装置
JPH06105746B2 (ja) ウェハカウンタ及びウェハカウント方法
JPH0691152B2 (ja) 半導体ウエハ計数装置
CN221543358U (zh) 装片装置及自动装片设备
CN220625209U (zh) 测量装置
CN220316384U (zh) 料盘定位装置
JPH0750698Y2 (ja) Ｌｅｄアレイの保持機構
JPH019167Y2 (enrdf_load_html_response)