JPH0124669Y2 - - Google Patents

Info

Publication number
JPH0124669Y2
JPH0124669Y2 JP5651984U JP5651984U JPH0124669Y2 JP H0124669 Y2 JPH0124669 Y2 JP H0124669Y2 JP 5651984 U JP5651984 U JP 5651984U JP 5651984 U JP5651984 U JP 5651984U JP H0124669 Y2 JPH0124669 Y2 JP H0124669Y2
Authority
JP
Japan
Prior art keywords
wafer
emitting
wafers
light receiving
receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5651984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60170869U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5651984U priority Critical patent/JPS60170869U/ja
Publication of JPS60170869U publication Critical patent/JPS60170869U/ja
Application granted granted Critical
Publication of JPH0124669Y2 publication Critical patent/JPH0124669Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Packaging For Recording Disks (AREA)
JP5651984U 1984-04-17 1984-04-17 ウエハカウンタ Granted JPS60170869U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5651984U JPS60170869U (ja) 1984-04-17 1984-04-17 ウエハカウンタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5651984U JPS60170869U (ja) 1984-04-17 1984-04-17 ウエハカウンタ

Publications (2)

Publication Number Publication Date
JPS60170869U JPS60170869U (ja) 1985-11-12
JPH0124669Y2 true JPH0124669Y2 (cs) 1989-07-26

Family

ID=30580189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5651984U Granted JPS60170869U (ja) 1984-04-17 1984-04-17 ウエハカウンタ

Country Status (1)

Country Link
JP (1) JPS60170869U (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06105746B2 (ja) * 1986-07-03 1994-12-21 東京エレクトロン相模株式会社 ウェハカウンタ及びウェハカウント方法
JPH0611070B2 (ja) * 1987-02-13 1994-02-09 東京エレクトロン株式会社 ウエハカウンタ

Also Published As

Publication number Publication date
JPS60170869U (ja) 1985-11-12

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