JPH01243335A - Manufacture of shadow mask - Google Patents
Manufacture of shadow maskInfo
- Publication number
- JPH01243335A JPH01243335A JP6969588A JP6969588A JPH01243335A JP H01243335 A JPH01243335 A JP H01243335A JP 6969588 A JP6969588 A JP 6969588A JP 6969588 A JP6969588 A JP 6969588A JP H01243335 A JPH01243335 A JP H01243335A
- Authority
- JP
- Japan
- Prior art keywords
- resin film
- photosensitive resin
- shadow mask
- face
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000011347 resin Substances 0.000 claims abstract description 47
- 229920005989 resin Polymers 0.000 claims abstract description 47
- 238000005530 etching Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 8
- 230000004888 barrier function Effects 0.000 abstract description 4
- 239000002994 raw material Substances 0.000 abstract 2
- 238000004033 diameter control Methods 0.000 abstract 1
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 description 13
- 238000005260 corrosion Methods 0.000 description 13
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 12
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 9
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 235000011121 sodium hydroxide Nutrition 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 3
- 239000005018 casein Substances 0.000 description 3
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 3
- 235000021240 caseins Nutrition 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 235000006408 oxalic acid Nutrition 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- JOSWYUNQBRPBDN-UHFFFAOYSA-P ammonium dichromate Chemical compound [NH4+].[NH4+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O JOSWYUNQBRPBDN-UHFFFAOYSA-P 0.000 description 2
- 239000000872 buffer Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000012286 potassium permanganate Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 230000023753 dehiscence Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［発明の目的１
（産業上の利用分野）
この発明は、カラーブラウン管に使用されるシャドウマ
スクの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention 1 (Field of Industrial Application) The present invention relates to a method for manufacturing a shadow mask used in a color cathode ray tube.
（従来の技術）
シャドウマスク型カラーブラウン管は、第２図に示すよ
うに、パネル（１）およびファンネル（２）からなる外
囲器（３）を有し、そのパネル（１）内面に形成された
３色蛍光体層からなる蛍光面（４）に対向して、その内
側にシャドウマスク（５）が配置されている。(Prior Art) As shown in FIG. 2, a shadow mask type color cathode ray tube has an envelope (3) consisting of a panel (1) and a funnel (2). A shadow mask (5) is disposed inside the phosphor screen (4), facing the phosphor screen (4) made of three color phosphor layers.
このシャドウマスク（５）は、ファンネル（２）のネッ
ク（６）内に配設された電子銃（７）から放出された電
子ビームを選別して、上記蛍光面（４）の３色蛍光体層
に正しく射突させるためのものであり、その蛍光面（４
）と対向する主面（８）には、電子ビームが通過する円
形あるいはスロット状の多数の透孔が形成されている。This shadow mask (5) selects the electron beams emitted from the electron gun (7) disposed within the neck (6) of the funnel (2) and selects the three-color phosphors of the phosphor screen (4). This is to ensure that the light hits the layer correctly, and its fluorescent screen (4
) is formed with a large number of circular or slot-shaped through holes through which the electron beam passes.
このようなカラーブラウン管において、特にモニタやデ
イスプレィに使用されるカラーブラウン管は、通常の受
像用力ラーブウウン管より高解像度のものが要求され、
そのために、そのシャドウマスクは、通常の受像用力ラ
ーブウウン管のシャドウマスクにくらべて、透孔径およ
び透孔ピッチが小さく、かつ透孔形状も高精度のものが
必要となっている。Among these color cathode ray tubes, color cathode ray tubes used for monitors and displays in particular are required to have higher resolution than normal image-receiving Rabeun tubes.
For this reason, the shadow mask must have a smaller diameter and pitch of the holes and a highly accurate hole shape than the shadow mask of a normal image-receiving tube.
一般に、上記シャドウマスク（５）の透孔は写真製版法
によって形成され、その工程は、第３図に示すように、
感光液塗布乾燥、露光、現像、バーニング、腐蝕の各工
程からなる。この各工程を七二夕やデイスプレィに使用
される高解像度力ラーブウウン管のシャドウマスクにつ
いて、さらに詳しく説明すると、つぎのとおりである。Generally, the through holes of the shadow mask (5) are formed by photolithography, and the process is as shown in FIG.
It consists of the following steps: applying photosensitive liquid, drying, exposing, developing, burning, and etching. Each of these steps will be explained in more detail with respect to the shadow mask of the high-resolution Rabeun tube used for Tanabata and displays as follows.
まず、第４図（Ａ）図に示すように、両面が清浄にされ
たアルミキルト鋼などのシャドウマスク素材（１０）の
両面にカゼインと重クロム酸アンモニウムとを主成分と
する感光液を塗布し、これを乾燥して感光性樹脂膜（１
１）を形成する。つぎに、（Ｂ）図に示すように、上記
両面の感光性樹脂膜（１１）にシャドウマスクの透孔に
対応する所定のネガパターンの形成された一対の原版（
１２ａ）、 （１２ｂ）を密着して露光し、両面の感光
性樹脂膜（１１）に一対の原版（１２８）、 （１２ｂ
）のネガパターンを焼付ける。First, as shown in FIG. 4(A), a photosensitive liquid containing casein and ammonium dichromate as main components is applied to both sides of a shadow mask material (10) made of aluminum quilted steel, which has been cleaned on both sides. Then, dry this to form a photosensitive resin film (1
1) Form. Next, as shown in Figure (B), a pair of original plates (
12a) and (12b) are exposed in close contact with each other to form a pair of original plates (128) and (12b) on the photosensitive resin film (11) on both sides.
) print the negative pattern.
通常、この一対の原版（１２ａ）、 （１２ｂ）のネガ
パターンは、シャドウマスクの透孔に対応するドツト状
あるいはスロット状なし、その大きさは、シャドウマス
ク素材（１０）の両面で相違する。Usually, the negative patterns of the pair of master plates (12a) and (12b) do not have dot-like or slot-like patterns corresponding to the through holes of the shadow mask, and the sizes thereof are different on both sides of the shadow mask material (10).
つぎに、（Ｃ）図に示すように、上記露光を終了した感
光性樹脂膜（１１）に温水をスプレィして現像し、上記
ネガパターンに対応する未感光部分（１３）を除去し、
両面で大小大きさの異なる素材露出面をもつ感光性樹脂
１！！ （１４ａ）、 （１４ｂ）とする。その後、界
面活性剤溶液により水切り処理し、ついで、乾燥し、さ
らに耐食性を増すためにバーニングを施す。Next, as shown in Figure (C), the exposed photosensitive resin film (11) is sprayed with warm water to develop it, and the unexposed portion (13) corresponding to the negative pattern is removed.
Photosensitive resin 1 with exposed material surfaces of different sizes on both sides! ! (14a) and (14b). Thereafter, it is drained using a surfactant solution, then dried, and then burnt to increase its corrosion resistance.
ざらに、蓚酸、過酸化水素水、′Ｑ硫酸の混液で処理す
るか、あるいは過マンガン酸カリウムと苛性ソーダの混
液で処理したのちに蓚酸で処理するなどの肌出し処理を
おこなって、露出しているシャドウマスク素材面の緩衝
、清浄、溶出カゼインの分解などをおこなう。ついで水
洗し、その後、（Ｄ）図に示すように、原版（１２ａ）
、 （１２ｂ）のネガパターンに対応して大径の素材露
出面をもつ感光性樹脂膜（１４ａ）側に耐食性フィルム
（１５）を貼着して、小径の素材露出面をもつ感光性樹
脂膜（１４ｂ）側を下向きにして腐蝕液をスプレィし、
凹孔（１６）を形成する。In addition, the skin can be exposed by treatment with a mixture of oxalic acid, hydrogen peroxide, and 'Q sulfuric acid, or by treatment with a mixture of potassium permanganate and caustic soda followed by treatment with oxalic acid. buffers and cleans the surface of the shadow mask material, and decomposes eluted casein. Next, the original plate (12a) is washed with water, and then the original plate (12a) is washed as shown in FIG.
Corresponding to the negative pattern (12b), a corrosion-resistant film (15) is attached to the side of the photosensitive resin film (14a) having a large diameter material exposed surface to form a photosensitive resin film having a small diameter material exposed surface. (14b) Spray the corrosive solution with the side facing down,
A recessed hole (16) is formed.
つぎに、（Ｅ）図に示すように、上記凹孔（１６）の形
成された面側の感光性樹脂膜（１４ｂ）を苛性ソーダ溶
液により剥離し、水洗、乾燥したのちに、その凹孔（１
６）の形成された面にニス（１７）を塗布するとともに
、上記大径の素材露出面側に貼着された耐食性フィルム
（１５）を剥離する。そして、その面を下向きにして腐
蝕液をスプレィし、（Ｆ）図に示すように、上記凹孔（
１６）に連通ずる凹孔（１８）を形成する。Next, as shown in FIG. 1
A varnish (17) is applied to the surface on which 6) is formed, and the corrosion-resistant film (15) attached to the exposed surface of the large-diameter material is peeled off. Then, spray the corrosive solution with the surface facing downward, and as shown in figure (F),
A recessed hole (18) is formed which communicates with 16).
その後、苛性ソーダ溶液により上記ニス（１７）および
反対側の感光性樹脂膜（１４ａ）を剥離し、さらに水洗
、乾燥して、（Ｇ）図に示すように、中央部にくびれ部
をもち、かつ一方の面の開口（１９ａ）が他方の面の開
口（１９ｂ）より大きい断面はぼ鼓形の透孔（２０）を
もつシャドウマスクとする。Thereafter, the varnish (17) and the photosensitive resin film (14a) on the opposite side are peeled off using a caustic soda solution, and further washed with water and dried to form a constricted part in the center as shown in Figure (G). The cross section in which the opening (19a) on one side is larger than the opening (19b) on the other side is a shadow mask having a concave-shaped through hole (20).
（発明が解決しようとする課題）
上記方法によりシャドウマスクを製造する場合、特に高
解像度カラー受像管、たとえばデイスプレィに使用され
るカラー受像管では、透孔径が０．１００〜０．１８０
ｍｍ 、透孔ピッチが０．２００〜０．３８０ｍｍのシ
ャドウマスクが使用され、所要の形状、寸法の透孔を形
成するためには、露光工程においてシャドウマスク素材
の両面の感光性樹脂膜に密着する一対の原版のネガパタ
ーンのずれ量を５μｍ以下にする必要があることが経験
的に知られている。しかし、通常、上記露光工程で使用
される一対の原版のネガパターンには５μｍ程度のずれ
があり、ざらに、この一対の原版をシャドウマスク素材
の両面の感光性樹脂膜に密着する露光機の精度は１０μ
ｍ程度であるため、露光後の腐蝕により両面から形成さ
れる各凹孔に５μｍ以上のずれを生じ、透孔形状および
寸法精度がいちじるしく損なわれる。実際には、一対の
原版のネガパターンのずれと露光機の精度に基づくずれ
とが相殺されるように調整して露光をおこなっているが
、このような方法で所要品位のシャドウマスクを製造す
ることはいちじるしく困難でおる。(Problem to be Solved by the Invention) When manufacturing a shadow mask by the above method, especially in a high-resolution color picture tube, for example, a color picture tube used for a display, the through-hole diameter is 0.100 to 0.180.
A shadow mask with a hole pitch of 0.200 to 0.380 mm is used, and in order to form holes of the desired shape and size, the shadow mask material must be brought into close contact with the photosensitive resin film on both sides of the material during the exposure process. It is empirically known that it is necessary to keep the amount of deviation between the negative patterns of a pair of original plates to 5 μm or less. However, there is usually a difference of about 5 μm between the negative patterns of the pair of master plates used in the above exposure process, and this is caused by the fact that the exposure machine that brings the pair of master plates into close contact with the photosensitive resin films on both sides of the shadow mask material has a difference of about 5 μm. Accuracy is 10μ
Since the diameter is approximately 5 μm, corrosion after exposure causes a deviation of 5 μm or more in each concave hole formed from both surfaces, significantly impairing the hole shape and dimensional accuracy. In reality, exposure is performed by adjusting the deviations between the negative patterns of the pair of original plates and the deviations due to the precision of the exposure machine, but this method is used to manufacture shadow masks of the required quality. This is extremely difficult.
この発明は、上記問題点に鑑みてなされたものであり、
シャドウマスクの透孔形状および寸法を正確かつ容易に
形成することができるシャドウマスクの製造方法を得る
ことを目的とする。This invention was made in view of the above problems, and
It is an object of the present invention to provide a method for manufacturing a shadow mask that can accurately and easily form the shape and size of the holes in the shadow mask.
［発明の構成］
（課題を解決するための手段）
写真製版法によるカラーブラウン管シャドウマスクの製
造方法において、シャドウマスク素材の両面に感光性樹
脂膜を形成し、その一方の面の感光性樹脂膜にシャドウ
マスクの透孔に対応するネガパターンが形成された原版
を密着して上記一方の面の感光性樹脂膜に上記ネガパタ
ーンを焼付けるとともに、他方の面の感光性樹脂膜を全
面露光し、その後、現像工程を経て、上記シャドウマス
ク素材を上記一方の面から腐蝕して透孔に形成するよう
にした。[Structure of the Invention] (Means for Solving the Problems) In a method for manufacturing a color cathode ray tube shadow mask by photolithography, a photosensitive resin film is formed on both sides of a shadow mask material, and the photosensitive resin film on one side is A master plate on which a negative pattern corresponding to the through-holes of the shadow mask is formed is closely attached to the plate, and the negative pattern is printed on the photosensitive resin film on one side, and the entire photosensitive resin film on the other side is exposed to light. Then, through a development process, the shadow mask material was etched from one side to form a through hole.
（作 用）
上記のようにシャドウマスク素材の一方の面の感光性樹
脂膜にシャドウマスクの透孔に対応するパターンを焼付
けるとともに、他方の面の感光性樹脂膜を全面露光し、
その後、一方の面からのみ腐蝕すると、全面露光により
得られる他方の面の感光性樹脂膜が腐蝕液の防壁となっ
て、両面から腐蝕する場合のように腐蝕液が行き交うこ
とがなく、しかも、一方の面からのみ腐蝕が進行するの
で、所定形状、寸法の透孔を容易に形成することができ
る。(Function) As described above, a pattern corresponding to the through holes of the shadow mask is printed on the photosensitive resin film on one side of the shadow mask material, and the entire photosensitive resin film on the other side is exposed to light.
After that, when corrosion occurs only from one side, the photosensitive resin film on the other side obtained by full exposure acts as a barrier against the corrosive solution, and the corrosive solution does not come and go as it would when corroding from both sides. Since corrosion progresses only from one side, a through hole with a predetermined shape and size can be easily formed.
（実施例）
以下、図面を参照してこの発明を実施例に基づいて説明
する。(Example) Hereinafter, the present invention will be described based on an example with reference to the drawings.
まず、第１図（＾）図に示すように、たとえば板厚約０
．１５ｍｍのアルミキルト鋼からなるシャドウマスク素
材（８）の両面を清浄にし、その両面にカビインと重ク
ロム酸アンモニウムとを主成分とする感光液を塗布し、
これを９０℃で約２．５分かけて乾燥し、厚さ約５μｍ
の感光性樹脂膜（１１）を形成する。つぎに、（Ｂ）図
に示すように、一方の面の感光性樹脂膜（１１）にシャ
ドウマスクの透孔に対応する所定のネガパターンの形成
された原版（３０）を密着して、そのネガパターンを焼
付けるとともに、他方の面の感光性樹脂膜（１１）にネ
ガパターンの形成されていない青板ガラス（３１） （
原版）を密着して全面露光する。First, as shown in Figure 1 (^), for example, the plate thickness is approximately 0.
．． Both sides of a shadow mask material (8) made of 15 mm aluminum quilted steel were cleaned, and a photosensitive liquid containing Kabin and ammonium dichromate as main components was applied to both sides.
This was dried at 90℃ for about 2.5 minutes to a thickness of about 5μm.
A photosensitive resin film (11) is formed. Next, as shown in Figure (B), an original plate (30) on which a predetermined negative pattern has been formed corresponding to the through holes of the shadow mask is closely attached to the photosensitive resin film (11) on one side. At the same time as printing a negative pattern, the photosensitive resin film (11) on the other side is coated with blue plate glass (31) on which no negative pattern is formed (
The entire surface of the original plate is exposed in close contact.
上記原版（３０）のネガパターンとしては、たとえば１
２インチ型高解像度カラーブラウン管用シャドウマスク
として、円形透孔を有し、その一方の面の間口径が０．
３２０ｍｍ 、他方の面の間口径が０．１７０＠ｍ１透
孔ピッチが０．３５０ｍｍであるシャドウマスクについ
ては、直径０．２２０ｍｍのドツト状パターンが同一ピ
ッチ０．３５０ｍｍで配列されたものが用いられる。そ
して、露光は、両面からそれぞれ約１ｍ離れた位置に５
ＫＷの水銀ランプを配置して、約４０秒照射することに
より所要の露光が得られる。For example, the negative pattern of the original plate (30) is 1
As a shadow mask for a 2-inch high-resolution color cathode ray tube, it has a circular hole, and one side of the hole has a diameter of 0.
320mm, and the other side has a diameter of 0.170@m1 and a hole pitch of 0.350mm, a shadow mask in which dot-like patterns with a diameter of 0.220mm are arranged at the same pitch of 0.350mm is used. . Then, the exposure was carried out at 5 points at a position approximately 1 m away from both sides.
The required exposure can be obtained by arranging a KW mercury lamp and irradiating for about 40 seconds.
つぎに、（Ｃ）図に示すように、上記露光を終了した感
光性樹脂膜（１１）に４０℃の温水を１に（Ｊ／ｃｍの
圧力でスプレィして現像し、上記ネガパターンに対応す
る未感光部分（３２）を除去し、ネガパターンに対応し
た素材露出面をもつ感光性樹脂膜（３３）とする。一方
、全面露光した他方の面の感光性樹脂膜（１１）は、上
記現像をおこなっても、除去されることなくその全面に
硬化した感光性樹脂膜（３４）として残存する。この現
像復、界面活性剤溶液により水切り処理し、ついで、１
５０℃の雰囲気で約３０秒乾燥し、ざらに、耐食性を増
すために２００ ’Ｃの雰囲気で約３０秒バーニングを
施す。Next, as shown in Figure (C), the exposed photosensitive resin film (11) is developed by spraying warm water at 40°C at a pressure of 1 J/cm to form the negative pattern. The unexposed portion (32) is removed to form a photosensitive resin film (33) with an exposed material surface corresponding to the negative pattern.On the other hand, the photosensitive resin film (11) on the other side, which has been fully exposed, is Even after development, it remains as a hardened photosensitive resin film (34) on the entire surface without being removed.After this development, water is removed using a surfactant solution, and then
It is dried for about 30 seconds in an atmosphere of 50°C, and then roughly burnt for about 30 seconds in an atmosphere of 200'C to increase corrosion resistance.
つぎに、好ましくは蓚酸、過酸化水素水、濃硫酸の混液
で処理するか、あるいは過マンガン酸カリウムと苛性ソ
ーダの混液で処理したのちに離開で処理するなどの肌出
し処理をおこない、露出しているシャドウマスク素材面
の緩衝、清浄、溶出カゼインの分解などをおこなう。そ
して、水洗したのちに、原版（３０）のネガパターンに
対応する素材露出面をもつ感光性樹脂膜（３３）の形成
された一方の面を下向きにして、液温６７°Ｃ１比重１
．４６７に調整された塩化第２鉄溶液からなる腐蝕液を
１ＫＱ／ｒ：ｔＡの液圧でスプレィして、（Ｄ）図に示
すように、一方の面から他方の面に目通する透孔（３５
）を形成する。Next, the skin is exposed by treatment, preferably with a mixture of oxalic acid, hydrogen peroxide, and concentrated sulfuric acid, or with a mixture of potassium permanganate and caustic soda, followed by dehiscence treatment. buffers and cleans the surface of the shadow mask material, and decomposes eluted casein. After washing with water, one side on which the photosensitive resin film (33) with the exposed material surface corresponding to the negative pattern of the original plate (30) was formed was facing downward, and the liquid temperature was 67°C1 and the specific gravity was 1.
．． A corrosive solution consisting of a ferric chloride solution adjusted to 467° C. is sprayed at a hydraulic pressure of 1 KQ/r:tA to form a through hole passing from one surface to the other as shown in the figure (D). (35
) to form.
しかるのら、（Ｅ）図に示すように、苛性ソーダ溶液に
より両面の感光性樹脂膜（３３）、 （３４）を剥離し
、さらに水洗、乾燥してシャドウマスクとする。Then, as shown in Figure (E), the photosensitive resin films (33) and (34) on both sides are peeled off using a caustic soda solution, and then washed with water and dried to form a shadow mask.
特にこのような方法で形成された透孔（３５）は、−方
の面の開口（３６ａ）が他方の面の開口（３６ｂ）より
大きいテーパ孔状に形成される。In particular, the through hole (35) formed by such a method is formed in a tapered hole shape in which the opening (36a) on the - side is larger than the opening (36b) on the other side.
ところで、上記のように一方の面からのみ腐蝕して透孔
（３５）を形成すると、他方の面側の開口（３６ｂ）の
端縁はナイフェツジとなり、一般的には、その口径制御
がむつかしいが、特にこの例の製造方法のように、単に
一方の面から腐蝕するだけでなく、他方の面全面を硬化
感光性樹脂膜（３４）で覆って腐蝕液の防壁とし、この
他方の面側から腐蝕液が侵入しないようにして腐蝕をお
こなうと、その口径制御を比較的容易におこなうことが
できる。By the way, if the through hole (35) is formed by corrosion from only one side as described above, the edge of the opening (36b) on the other side becomes a knife edge, and it is generally difficult to control the diameter. In particular, as in the manufacturing method of this example, instead of simply corroding from one side, the entire other surface is covered with a cured photosensitive resin film (34) to act as a barrier against the corrosive liquid, and the other surface is corroded from the other side. If the corrosion is carried out in a manner that prevents the corrosive liquid from entering, the diameter can be controlled relatively easily.
したがって、従来の両面から腐蝕するシャドウマスクの
製造方法のように、両面からの腐蝕のために生じた透孔
形状、寸法精度の劣化がなく、両面の開口径のずれを５
μｍ以下におさえ、かつ正しい形状の透孔からなる所要
のシャドウマスクとすることができる。Therefore, there is no deterioration in the through-hole shape and dimensional accuracy caused by corrosion from both sides, unlike in the conventional shadow mask manufacturing method in which corrosion occurs from both sides.
It is possible to obtain a desired shadow mask made of through-holes with a diameter of μm or less and with the correct shape.
［発明の効果］
シャドウマスク素材の一方の面の感光性樹脂膜にシャド
ウマスクの透孔に対応するパターンを焼付けるとともに
、他方の面の感光性樹脂膜を全面露光し、その後、一方
の面からのみ腐蝕すると、全面露光により得られる他方
の面の感光性樹脂膜が腐蝕液の防壁となって、両面から
腐蝕するシャドウマスクの製造方法のように腐蝕液が行
交うことがなく、しかも、一方の面からのみ腐蝕が進行
するので、所定形状、寸法の透孔を容易に形成すること
ができる。[Effect of the invention] A pattern corresponding to the through-holes of the shadow mask is printed on the photosensitive resin film on one side of the shadow mask material, and the entire photosensitive resin film on the other side is exposed to light. When corrosion occurs only from the surface, the photosensitive resin film on the other side obtained by full-surface exposure acts as a barrier against the corrosive solution, and the corrosive solution does not circulate as in the shadow mask manufacturing method, which corrodes from both sides. Since corrosion progresses only from one side, a through hole of a predetermined shape and size can be easily formed.
第１図（Ａ）乃至（Ｅ）図はそれぞれこの発明の一実施
例であるシャドウマスクの製造工程説明図、第２図はカ
ラーブラウン管の一部を切欠いて示した構成図、第３図
はそのシャドウマスクの製造工程図、第４図（Ａ）乃至
（Ｇ）図はそれぞれ従来のシャドウマスクの製造工程説
明図である。
１０・・・シャドウマスク素材
１１・・・感光性樹脂膜
３０・・・原版
３５・・・透孔1A to 1E are explanatory diagrams of the manufacturing process of a shadow mask according to an embodiment of the present invention, FIG. The manufacturing process diagrams of the shadow mask and FIGS. 4(A) to 4(G) are explanatory diagrams of the manufacturing process of the conventional shadow mask, respectively. 10...Shadow mask material 11...Photosensitive resin film 30...Original plate 35...Through hole
Claims (1)
程と、上記シャドウマスク素材の一方の面の感光性樹脂
膜にシャドウマスクの透孔に対応するネガパターンが形
成された原版を密着して上記一方の面の感光性樹脂膜に
上記ネガパターンを焼付けるとともに、上記シヤドウマ
スク素材の他方の面の感光性樹脂膜を全面露光する工程
と、上記感光性樹脂膜を現像して上記シャドウマスク素
材の一方の面に上記ネガパターンに対応する素材露出面
をもつ感光性樹脂膜を形成する工程と、このシャドウマ
スク素材を上記一方の面から腐蝕して透孔を形成する工
程とを備えることを特徴とするシヤドウマスクの製造方
法。A step of forming a photosensitive resin film on both sides of the shadow mask material, and adhering an original plate on which a negative pattern corresponding to the through holes of the shadow mask is formed to the photosensitive resin film on one side of the shadow mask material. A step of printing the negative pattern on the photosensitive resin film on one side and fully exposing the photosensitive resin film on the other side of the shadow mask material, and developing the photosensitive resin film to form the shadow mask material. It is characterized by comprising a step of forming a photosensitive resin film having an exposed material surface corresponding to the negative pattern on one surface, and a step of etching the shadow mask material from the one surface to form a through hole. A method for manufacturing a shadow mask.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6969588A JPH01243335A (en) | 1988-03-25 | 1988-03-25 | Manufacture of shadow mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6969588A JPH01243335A (en) | 1988-03-25 | 1988-03-25 | Manufacture of shadow mask |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01243335A true JPH01243335A (en) | 1989-09-28 |
Family
ID=13410260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6969588A Pending JPH01243335A (en) | 1988-03-25 | 1988-03-25 | Manufacture of shadow mask |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01243335A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0512996A (en) * | 1991-07-02 | 1993-01-22 | Dainippon Printing Co Ltd | Manufacture of shadow mask |
| JP2002275661A (en) * | 2001-03-16 | 2002-09-25 | Tomoegawa Paper Co Ltd | Method for manufacturing metal foil mesh |
-
1988
- 1988-03-25 JP JP6969588A patent/JPH01243335A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0512996A (en) * | 1991-07-02 | 1993-01-22 | Dainippon Printing Co Ltd | Manufacture of shadow mask |
| JP2002275661A (en) * | 2001-03-16 | 2002-09-25 | Tomoegawa Paper Co Ltd | Method for manufacturing metal foil mesh |
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