JPH0124034B2 - - Google Patents
Info
- Publication number
- JPH0124034B2 JPH0124034B2 JP57203168A JP20316882A JPH0124034B2 JP H0124034 B2 JPH0124034 B2 JP H0124034B2 JP 57203168 A JP57203168 A JP 57203168A JP 20316882 A JP20316882 A JP 20316882A JP H0124034 B2 JPH0124034 B2 JP H0124034B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- bimorph
- signal
- piezoelectric element
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003990 capacitor Substances 0.000 claims description 5
- 230000010287 polarization Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57203168A JPS5996880A (ja) | 1982-11-19 | 1982-11-19 | 電気機械変換装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57203168A JPS5996880A (ja) | 1982-11-19 | 1982-11-19 | 電気機械変換装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5996880A JPS5996880A (ja) | 1984-06-04 |
JPH0124034B2 true JPH0124034B2 (zh) | 1989-05-09 |
Family
ID=16469570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57203168A Granted JPS5996880A (ja) | 1982-11-19 | 1982-11-19 | 電気機械変換装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5996880A (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07109566B2 (ja) * | 1985-04-20 | 1995-11-22 | 洋太郎 畑村 | 微細位置決め装置 |
JPH07109567B2 (ja) * | 1986-02-14 | 1995-11-22 | 日立建機株式会社 | 微細位置決め装置 |
JPS62214412A (ja) * | 1986-03-15 | 1987-09-21 | Hitachi Constr Mach Co Ltd | 微細位置決め装置 |
JPS62214413A (ja) * | 1986-03-15 | 1987-09-21 | Hitachi Constr Mach Co Ltd | 微細位置決め装置 |
JPS632390A (ja) * | 1986-06-20 | 1988-01-07 | Murata Mfg Co Ltd | 積層型セラミツク変位装置 |
JPS6366615A (ja) * | 1986-09-09 | 1988-03-25 | Hitachi Constr Mach Co Ltd | 微細位置決め装置 |
JPH071449B2 (ja) * | 1986-11-29 | 1995-01-11 | 日立建機株式会社 | 微細位置決め装置 |
JPS6366613A (ja) * | 1986-09-09 | 1988-03-25 | Hitachi Constr Mach Co Ltd | 微細位置決め装置 |
JPH071450B2 (ja) * | 1986-11-29 | 1995-01-11 | 日立建機株式会社 | 微細位置決め装置 |
JPH071448B2 (ja) * | 1986-11-29 | 1995-01-11 | 日立建機株式会社 | 微細位置決め装置 |
JPH071447B2 (ja) * | 1986-09-09 | 1995-01-11 | 日立建機株式会社 | 微細位置決め装置 |
JPH01202178A (ja) * | 1988-02-08 | 1989-08-15 | Res Dev Corp Of Japan | 圧電アクチュエータの特性線形化方法 |
JPH07104723B2 (ja) * | 1993-09-10 | 1995-11-13 | 洋太郎 畑村 | 微細位置決め装置 |
-
1982
- 1982-11-19 JP JP57203168A patent/JPS5996880A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5996880A (ja) | 1984-06-04 |
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