JPH01234165A - Soot mixed diamond polishing grindstone - Google Patents
Soot mixed diamond polishing grindstoneInfo
- Publication number
- JPH01234165A JPH01234165A JP5749688A JP5749688A JPH01234165A JP H01234165 A JPH01234165 A JP H01234165A JP 5749688 A JP5749688 A JP 5749688A JP 5749688 A JP5749688 A JP 5749688A JP H01234165 A JPH01234165 A JP H01234165A
- Authority
- JP
- Japan
- Prior art keywords
- soot
- diamond particles
- base material
- diamond
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 53
- 239000010432 diamond Substances 0.000 title claims abstract description 53
- 239000004071 soot Substances 0.000 title claims description 28
- 238000005498 polishing Methods 0.000 title description 9
- 239000002245 particle Substances 0.000 claims abstract description 30
- 239000007789 gas Substances 0.000 claims abstract description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 7
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 7
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 abstract description 5
- 239000000919 ceramic Substances 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 230000001376 precipitating effect Effects 0.000 abstract description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 12
- 238000003754 machining Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 239000006061 abrasive grain Substances 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000004050 hot filament vapor deposition Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は研摩等の砥石に係り、基材の表面に煤混入ダイ
ヤモンド粒子を析出形成した煤混入ダイヤモンド研摩砥
石に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a grindstone for polishing, etc., and relates to a soot-laced diamond polishing whetstone in which soot-laced diamond particles are precipitated and formed on the surface of a base material.
従来、金属やセラミックス等の被加工物を精度よく加工
するには、ダイヤモンド砥石による研摩やダイヤモンド
砥粒によるラッピングがある。Conventionally, in order to accurately process workpieces such as metals and ceramics, polishing with a diamond grindstone and lapping with diamond abrasive grains have been used.
前記ダイヤモンド砥石はダイヤモンド粒子と結合材を焼
結してなるもので、表面のダイヤモンド粒子によって被
加工物を研摩する。The diamond grindstone is made by sintering diamond particles and a binder, and grinds a workpiece using the diamond particles on the surface.
前記ラッピングは、被加工物と加工すべき理想形状にき
わめて近い工具（以下ラップという）との間に微細粉末
状のランプ剤を入れて、これらの間に相対運動を行なう
もので、前記ラップ剤がダイヤモンド砥粒であり、この
ダイヤモンド砥粒の切削作用により被加工物の加工面を
摩耗する。The above-mentioned lapping is a method in which a fine powder lamp agent is placed between the workpiece and a tool (hereinafter referred to as lapping) that is very close to the ideal shape to be machined, and relative movement is performed between them. are diamond abrasive grains, and the cutting action of these diamond abrasive grains abrades the machined surface of the workpiece.
、上記従来技術では次のような問題点がある。 However, the above conventional technology has the following problems.
１）ダイヤモンド砥石では表面にダイヤモンド粒子と結
合剤があり、刃先となるダイヤモンド粒子が均一になら
ず精密加工に適していない。1) A diamond whetstone has diamond particles and a binder on its surface, and the diamond particles that form the cutting edge are not uniform, making it unsuitable for precision machining.
２）ダイヤモンド砥粒によるラッピングでは仕事量に比
して加工量が少なく、加工時間を多（必要とする。2) When lapping with diamond abrasive grains, the amount of processing is small compared to the amount of work and requires a lot of processing time.
３）ダイヤモンド砥石及びダイヤモンド砥粒によるラッ
ピングの両者とも、ダイヤモンド粒子による加工であり
、被加工物に対してあたりが硬い。3) Both lapping with a diamond whetstone and diamond abrasive grains are processes using diamond particles, which are hard against the workpiece.
また、そのダイヤモンド粒子の形状の不均一により、被
加工物に傷等を生じさせてしまうことがある。よって超
精密加工に適応しえない。Furthermore, the non-uniform shape of the diamond particles may cause scratches on the workpiece. Therefore, it cannot be applied to ultra-precision machining.
本発明は上記課題に鑑みてなされたもので、精密加工及
び超精密加工に適応し、加工能率がよい煤混入ダイヤモ
ンド研摩砥石を提供することにある。The present invention has been made in view of the above problems, and an object of the present invention is to provide a soot-containing diamond abrasive grindstone that is suitable for precision machining and ultra-precision machining and has good machining efficiency.
本発明は上記課題を解決するために次のように構成した
。In order to solve the above problems, the present invention is configured as follows.
水素ガスと炭化水素ガスから合成される球状の煤混入ダ
イヤモンド粒子を、基材の表面に析出形成してなること
を特徴とする煤混入ダイヤモンド研摩砥石とした。This soot-containing diamond abrasive grinding wheel is characterized in that spherical soot-containing diamond particles synthesized from hydrogen gas and hydrocarbon gas are precipitated and formed on the surface of a base material.
本発明は上記構成により次のように作用する。 The present invention operates as follows with the above configuration.
基材の表面に水素ガスと炭化水素ガスから合成される球
状の煤混入ダイヤモンド粒子を析出形成することにより
、基材の表面は球状の煤混入ダイヤモンド粒子で均一な
刃先となる。By precipitating and forming spherical soot-containing diamond particles synthesized from hydrogen gas and hydrocarbon gas on the surface of the base material, the surface of the base material becomes a uniform cutting edge with spherical soot-containing diamond particles.
本発明の実施例を図面に基づいて詳細に説明する。 Embodiments of the present invention will be described in detail based on the drawings.
本実施例の煤混入ダイヤモンド研摩砥石Ａは第１図に示
すように、アルミナ、モリブデン、タングステン等の基
材ｌの表面に球状の煤混入ダイヤモンド粒子２を析出形
成してなる。As shown in FIG. 1, the soot-containing diamond polishing wheel A of this embodiment is formed by depositing spherical soot-containing diamond particles 2 on the surface of a base material l of alumina, molybdenum, tungsten, or the like.
前記基材１は板状のものであり、前記煤混入ダイヤモン
ド粒子２は水素ガスと炭化水素ガスから合成され、その
炭化水素ガスはメタンガスとし、そのメタンの濃度は３
〜５％とした。The base material 1 is plate-shaped, the soot-containing diamond particles 2 are synthesized from hydrogen gas and hydrocarbon gas, and the hydrocarbon gas is methane gas, and the methane concentration is 3.
~5%.
前記煤混入ダイヤモンド粒子２を合成する装置は、基材
１を収納する容器と、容器内を排気して真空にする真空
発生機と、マイクロ波を発生させるマグネトロンと、マ
イクロ波を容器に導く導波管と、マイクロ波の反射波を
調整するプランジャーとから成る。The apparatus for synthesizing the soot-containing diamond particles 2 includes a container that stores the base material 1, a vacuum generator that evacuates the inside of the container to create a vacuum, a magnetron that generates microwaves, and a guide that guides the microwaves to the container. It consists of a wave tube and a plunger that adjusts the reflected microwave waves.
基材１は、支持台に載置し容器と導波管の交わる中央に
設置する。The base material 1 is placed on a support stand and placed at the center where the container and the waveguide intersect.
前記容器には、石英管を使用した。A quartz tube was used as the container.
基材１に煤混入ダイヤモンド粒子を析出させるには、容
器内を真空度１０−Ｔｏｒｒまで真空にした後、メタン
ガスの濃度が３％となるようにメタンガスと水素ガスを
容器内に容器の上開口部より導入しつつ、容器内を容器
の下開口部より排気して容器内の圧力を真空度３０Ｔｏ
ｒｒに維持すると共に、基材１に波長２．４５ＧＨｚ、
出力３００Ｗのマイクロ波を照射して基材１の温度を８
６０℃にする。To precipitate soot-containing diamond particles on the substrate 1, after evacuating the inside of the container to a degree of vacuum of 10-Torr, methane gas and hydrogen gas are poured into the container so that the concentration of methane gas is 3%. The inside of the container is evacuated from the bottom opening of the container, and the pressure inside the container is reduced to a vacuum degree of 30To.
rr, and a wavelength of 2.45 GHz to the base material 1.
Irradiate microwaves with an output of 300W to lower the temperature of base material 1 to 8.
Bring to 60℃.
そして数時間この状態を維持する。And maintain this state for several hours.
前記メタンガスと水素ガスの流量は１００ｃｃ／ｓｉｎ
とした。The flow rate of the methane gas and hydrogen gas is 100cc/sin.
And so.
前記容器内の圧力およびマイクロ波により、基材１の周
囲に放電プラズマが発生して水素ガスが原子状水素とな
り、この原子状水素とメタンガスが反応すると共にマイ
クロ波の吸収とプラズマの衝撃により基材１は加熱して
基材１の表面に多数の煤混入ダイヤモンド粒子２が析出
する。Due to the pressure in the container and microwaves, discharge plasma is generated around the base material 1, and the hydrogen gas becomes atomic hydrogen.This atomic hydrogen and methane gas react, and the absorption of the microwaves and the impact of the plasma cause the base material to become atomic. The material 1 is heated and a large number of soot-containing diamond particles 2 are deposited on the surface of the base material 1.
この煤混入ダイヤモンド粒子２は第２図に示すように、
球状で、煤（無定形炭素あるいは、ダイヤモンドと炭素
の中間体であるダイヤモンドライクカーボン）２ａとダ
イヤモンド微粒子２ｂが共存している状態のものである
。As shown in FIG. 2, the soot-containing diamond particles 2 are
It is spherical and contains soot (amorphous carbon or diamond-like carbon, which is an intermediate between diamond and carbon) 2a and diamond fine particles 2b.
前記煤混入ダイヤモンド研摩砥石２の表面は、多数の煤
混入ダイヤモンド粒子２が均一に析出しており、しかも
、その煤混入ダイヤモンド粒子２が球状で煤２ａとダイ
ヤモンド微粒子２ｂからなるため、被加工物に対してあ
たりが軟らかく、潤滑作用もあるので、研摩加工に適し
ている。またダイヤモンド微粒子２ｂが超微粒子である
ため精密加工及び超精密加工に適している
、本実施例は上記装置及び方法により基材１に煤混入ダ
イヤモンド粒子２を析出形成したが、他の装置及び方法
を用いてもよく、例えば熱フイラメントＣＶＤ法や高周
波ＣＶＤ法等でもよい、また、基材１が板状のものであ
ったが基材１の形状を円柱状のにして、その周面に煤混
入ダイヤモンド粒子２を析出形成してもよい。さらに、
種々の形状の基材に煤混入ダイヤモンド粒子を析出形成
できるので煤混入ダイヤモンド研摩砥石をラップとして
用いることができ、この場合ラップ剤は不要となる。On the surface of the soot-containing diamond polishing wheel 2, a large number of soot-containing diamond particles 2 are uniformly precipitated, and since the soot-containing diamond particles 2 are spherical and consist of soot 2a and diamond fine particles 2b, the workpiece It is soft against the surface and has a lubricating effect, making it suitable for polishing. In addition, since the diamond fine particles 2b are ultrafine particles, they are suitable for precision machining and ultra-precision machining.In this example, the soot-containing diamond particles 2 were deposited and formed on the base material 1 using the above-mentioned apparatus and method, but other apparatus and methods may be used. For example, a hot filament CVD method or a high frequency CVD method may be used.Also, although the base material 1 was plate-shaped, the shape of the base material 1 was changed to a cylindrical shape, and soot was applied to the circumferential surface of the base material 1. The mixed diamond particles 2 may also be formed by precipitation. moreover,
Since soot-laced diamond particles can be precipitated and formed on substrates of various shapes, the soot-laced diamond polishing wheel can be used as a lap, and in this case, no lapping agent is required.
本発明は上記のように構成したので次のような効果があ
る。Since the present invention is constructed as described above, it has the following effects.
水素ガスと炭化水素ガスから合成される球状の煤混入ダ
イヤモンド粒子を基材の表面に析出形成してなることに
より、基材の表面は煤混入ダイヤモンド粒子で均一な刃
先となり、精密加工に適応し加工能率がよく、加工時間
を短縮できる。また、煤混入ダイヤモンド粒子が球状で
あり、煤を有するので、被加工物に対してあたりが軟ら
かく、被加工物に傷等を生じさせることがなく、超精密
加工に適応しえる。By precipitating and forming spherical soot-laced diamond particles synthesized from hydrogen gas and hydrocarbon gas on the surface of the base material, the surface of the base material becomes a uniform cutting edge with soot-laced diamond particles, making it suitable for precision machining. It has good processing efficiency and can shorten processing time. Furthermore, since the soot-containing diamond particles are spherical and contain soot, they are soft against the workpiece, do not cause scratches on the workpiece, and can be applied to ultra-precision machining.
図面の第１図は本発明の本実施例を示す説明図、第２図
は煤混入ダイヤモンド粒子の説明図である。
Ａ・・・煤混入ダイヤモンド研摩砥石
１・・・基材
２・・・煤混入ダイヤモンド粒子
２ａ・・・煤
２ｂ・・・ダイヤモンド微粒子
第１図
第２図FIG. 1 is an explanatory diagram showing this embodiment of the present invention, and FIG. 2 is an explanatory diagram of soot-containing diamond particles. A... Soot-containing diamond polishing wheel 1... Base material 2... Soot-containing diamond particles 2a... Soot 2b... Diamond fine particles Fig. 1 Fig. 2
Claims (1)
イヤモンド粒子を、基材の表面に析出形成してなること
を特徴とする煤混入ダイヤモンド研摩砥石。A soot-containing diamond abrasive grinding wheel characterized in that spherical soot-containing diamond particles synthesized from hydrogen gas and hydrocarbon gas are deposited and formed on the surface of a base material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5749688A JPH0665466B2 (en) | 1988-03-11 | 1988-03-11 | Soot mixed diamond polishing wheel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5749688A JPH0665466B2 (en) | 1988-03-11 | 1988-03-11 | Soot mixed diamond polishing wheel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01234165A true JPH01234165A (en) | 1989-09-19 |
| JPH0665466B2 JPH0665466B2 (en) | 1994-08-24 |
Family
ID=13057333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5749688A Expired - Lifetime JPH0665466B2 (en) | 1988-03-11 | 1988-03-11 | Soot mixed diamond polishing wheel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0665466B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5327995A (en) * | 1991-09-12 | 1994-07-12 | Koyo Seiko Co., Ltd. | Method of lubrication between two sliding members |
| JP2010155324A (en) * | 2008-12-27 | 2010-07-15 | Fuji Dies Kk | Resin bond grinding wheel suitable for grinding of hard material such as nitrogen-added cermet and grinding method |
| JP2013046960A (en) * | 2012-10-16 | 2013-03-07 | Fuji Dies Kk | Resin bond grinding wheel suitable for grinding processing of hard material such as nitride-added cermet |
-
1988
- 1988-03-11 JP JP5749688A patent/JPH0665466B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5327995A (en) * | 1991-09-12 | 1994-07-12 | Koyo Seiko Co., Ltd. | Method of lubrication between two sliding members |
| JP2010155324A (en) * | 2008-12-27 | 2010-07-15 | Fuji Dies Kk | Resin bond grinding wheel suitable for grinding of hard material such as nitrogen-added cermet and grinding method |
| JP2013046960A (en) * | 2012-10-16 | 2013-03-07 | Fuji Dies Kk | Resin bond grinding wheel suitable for grinding processing of hard material such as nitride-added cermet |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0665466B2 (en) | 1994-08-24 |
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