JPH0355164A - Grinding disc and its manufacture - Google Patents

Abstract

PURPOSE:To raise the polishing and grinding power and the durability by covering the surface of a disc-shaped base material with needle-shaped or columnar diamond film and/or diamond like carbon film. CONSTITUTION:A needle-shaped or columnar diamond film and/or a diamond like carbon film are formed over the surface of a disc-shaped base material by the plasma gaseous phase deposition method in which 1-10GHz is impressed under the hydrocarbonic and hydrogen atmosphere. Thus the desired grinding material is obtained. This should enhance the polishing and grinding power and the durability of a grinding disc.

Description

Detailed Description of the Invention (Industrial Field of Application) The present invention relates to a polishing plate with excellent durability, clogging resistance, and excellent grinding power used for precision polishing of metals, wood, ceramics, plastics, etc., and its manufacture. It is about the method.

(Prior Art) Conventionally, a polishing plate has been used as a base material for polishing by coating or electrodepositing abrasive grains on the surface of metal or wood, or by pouring abrasive slurry on the surface. In some cases, the abrasive material itself was used as a base material, such as a whetstone. For both, there is a lower limit to the size of the abrasive grains on the surface depending on the performance of the grinder and the grinding method, and it is difficult to uniformly apply ultrafine grains to the base material, and it is difficult to harden them like a grindstone. Although it is easy to use, it is easily clogged and cannot be said to be a good quality polishing plate for items that require precision polishing.

(Problems to be Solved by the Invention) The present invention aims to provide a durable polishing plate which improves the above-mentioned drawbacks, has excellent polishing power, is resistant to clogging, and is resistant to clogging.

(Means for Solving the Problems) In order to solve the above problems, the present inventors have conducted intensive studies on the material of the polishing plate and its surface treatment method, and have arrived at the present invention. 1. 2. A polishing plate in which the surface of a disc-shaped base material is coated with an acicular and/or columnar diamond film and/or a diamond-like carbon film; 1 on the surface of a disc-shaped substrate in a hydrocarbon and hydrogen atmosphere.
2. The method of manufacturing a polishing plate according to claim 1, wherein the acicular and/or columnar diamond film and/or diamond-like carbon film is formed by a plasma vapor deposition method applying a frequency of up to 10 GHz.

The present invention will be explained in detail below.

First, the structure of the polishing plate of the present invention will be described.

By directly attaching abrasive grains, that is, needle-shaped and/or columnar diamond films and/or diamond-like carbon films, to the disc-shaped base material without applying or electrodepositing the abrasive grains to the disc-shaped base material. Any abrasive grain size can be obtained, from large to minute abrasive grains. The base material of the disc-shaped polishing plate includes ceramics such as alumina, carborundum, and zirconia, Mo. W, Ta. Metals such as Ti or alloys such as stainless steel are used, and examples include those in which the above metals are vapor-deposited on one side or a part of a plate-shaped base material. Next, a diamond film and/or a diamond-like carbon film is coated on the surface of this base material by plasma vapor deposition. The purpose of this is to use the minimum necessary amount of diamond, which has the highest hardness among materials, to achieve the maximum polishing effect. The diamond film and/or diamond-like carbon deposited on the surface of the substrate by the plasma vapor deposition method has acicular and/or columnar crystals, and the thickness is 10 to 1,000 μm.
m, preferably in the range of 20 to 500 μm. If it is less than 10 μm, it will be too thin and unreliable, and if it exceeds 1,000 μm, the frictional resistance during polishing will increase, clogging will occur easily, and the polishing power will decrease rapidly. The feature of this method for producing a disc-shaped polishing plate is that it is coated with a diamond film by plasma vapor deposition. For the plasma vapor deposition method, any known technology may be used.
This method is carried out by depositing a diamond film and/or a diamond-like carbon film from the hydrocarbon on the surface of the substrate using a mixed gas consisting of hydrocarbon and hydrogen or, if necessary, an inert gas. The volume ratio of hydrocarbon (A) and hydrogen gas (B) is A/B=500 to o. Can be used in a wide range of ooi. The volume ratio of hydrogen gas (B), inert gas (C) and hydrocarbon (A) used is A/B.
+C=500 to 0.001, and the substitution ratio of C to B is preferably 50% or less. Examples of the plasma vapor deposition method in this case include high frequency, direct current, microwave, plasma methods using metal wire heating coils, and ion beam evaporation methods.
It is preferable to use microwave high frequency power of ~10 GHz. 1G}{z, a reliable film cannot be obtained.

Examples of the hydrocarbon used here include methane, ethane, propane, and ethylene, with methane being preferred.

In carrying out this method, first, a polishing plate substrate is placed in a reactor, and a mixed gas of hydrocarbon and hydrogen or, if necessary, an inert gas is introduced into the reactor. The pressure inside the chamber is adjusted to be in the range of 100 to 220 Pascals in order to maintain a stable plasma, and then microwave high frequency power is applied to generate plasma within the system and the temperature of the components is increased. Adjust the temperature to 500-1300°C. If the member temperature is below 500°C, hydrogen may be mixed into the precipitated diamond film, and if it exceeds 1300°C, the deposited diamond will undergo reverse transition to graphite, so it is recommended to keep it in the range of 700 to 1200°C. preferable. As a result, the hydrocarbon is thermally decomposed by contact with the plasma flame, and a diamond film containing diamond or graphite and/or a diamond-like carbon film is formed into a uniform plate shape and deposited on the substrate to a desired thickness. be done.

Next, specific aspects of the present invention will be explained with reference to Examples, but the present invention is not limited thereto.

(Example) A Mo disk-shaped substrate with a diameter of 22 mmφ and a thickness of 0.2 mm was placed on a substrate support of a reaction device having a waveguide port and a pair of plungers inside, in the direction of flow of a gaseous mixture. Spread it out flat and line it up. Next, after exhausting the pressure inside this reactor to about 5 Pascals, a mixed gas of methane (concentration: 3% by volume) and hydrogen was introduced into the reactor, and microwaves emitted from a magnetron were generated in this atmosphere while the gas was flowing. (2.45
GHz) is guided through an isolator, a power motor, and a three-stap tuner to a quartz reaction tube using a waveguide to generate a plasma discharge around the substrate, bringing the substrate to a predetermined temperature of 930°C. microwave power 2
When the power was adjusted to 50 W, a 150 μm columnar diamond crystal film was formed on the base material.

The polishing plate made in this way is fixed on the base of the polishing machine,
A polishing test was conducted. Setting the cutting depth as polishing conditions: 0.
6mm, feed speed 4m/min. As a result of polishing with
The surface roughness was 6 μm. When using an alumina polishing plate under the same conditions, the finished surface roughness was 12 with AA120#.
μm, it was found that it was clearly effective compared with this.

(Effects of the Invention) The present invention provides a polishing plate having excellent polishing and grinding power by coating the surface of the disc-shaped polishing plate with a diamond film and/or a diamond-like carbon film by plasma vapor deposition method. Its industrial value is extremely high.

Claims (2)

[Claims] 1. A polishing plate in which the surface of a disc-shaped base material is coated with an acicular and/or columnar diamond film and/or a diamond-like carbon film. 2. 1 on the surface of a disc-shaped substrate in a hydrocarbon and hydrogen atmosphere.
2. The method for manufacturing a polishing plate according to claim 1, wherein the acicular and/or columnar diamond film and/or diamond-like carbon film are formed by plasma vapor deposition method applying a frequency of ~10 GHz.