JP2002028865A - Diamond dresser and manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a diamond dresser suppressing dislodgment and chipping of diamond crystalline particle at a boundary surface with metal bond and having stable performance and a long service life and manufacturing method therefor. SOLUTION: This method is the manufacturing method for the diamond dresser for fixing a multiple crystal diamond columnar body prepared by a CVD method constituted by performing a metalizing processing for at least a side surface to an operating surface of a dresser base body by a powder sintering method and the diamond dresser for performing the metalizing processing for at least the side surface of a multiple crystal diamond thin film prepared by the CVD method and fixing the multiple crystal diamond thin film to the operating surface of the dresser base body by the powder sintering method after the multiple crystal diamond thin film is cut into a columnar body of a prescribed dimension.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a diamond dresser and a method for manufacturing the same. More specifically, the present invention relates to dressing and truing of a grinding wheel or the like including a super-abrasive wheel, in which falling and chipping of diamond crystal particles at a boundary surface with a metal bond are suppressed, the diamond has a stable performance and a long life. The present invention relates to a diamond dresser suitably used for the present invention and a method for efficiently producing the same.

[0002]

2. Description of the Related Art When a grinding wheel is continuously used, the grinding efficiency is reduced due to the occurrence of blind spots and dents, and the finished surface is often deteriorated, and the roundness of the grinding wheel is also deteriorated due to vibration. There is. In such a case, truing and dressing are usually performed. Here, truing is a reshaping operation in which the outer periphery of the grindstone is concentric with the grindstone axis by shaving off the abrasive grains and the binder, while dressing is for the abrasive grain to give the best sharpness. This is a grading work to crush the dulled abrasive grains and create a new cutting edge. For such truing and dressing, a diamond dresser is generally used. Examples of the diamond dresser include a single-stone or multi-stone dresser, an overall rotary dresser, and a disc-shaped or cup-shaped truer. The truer indicates a traverse type rotary dresser, and in the present invention, both the dresser and the truer are collectively referred to as a dresser. In this diamond dresser, diamond is usually fixed to the working surface of a dresser base, and methods for fixing diamond to the base include, for example, a fastening method, a brazing method, a casting method, and a sintering method. However, with the development of powder metallurgy, the powder sintering method is currently the mainstream. By the way, a dresser using diamond produced by a chemical vapor synthesis method (CVD method) is known. For example, a dresser in which polycrystalline diamond produced by a CVD method is fixed by brazing as a tool material (Japanese Patent Laid-Open No. -317112), a grinding wheel dresser in which a diamond cutting blade of a predetermined shape obtained from a vapor-phase synthetic diamond thin film is fixed by means such as sintering, electroforming, electrodeposition, etc.
No. 39716) and the like. In a dresser using diamond by the CVD method, since the diamond is a polycrystalline diamond,
It is less susceptible to cleavage like single crystal diamond, has constant wear and stable dressing performance, and has advantages such as lower production cost compared to dressers using artificial or natural single crystal prismatic diamond. . However, in a dresser using a polycrystalline diamond columnar body manufactured by the CVD method, the diamond crystal particles are likely to fall off or chip at the interface with the metal bond, and as a result, the dressing performance is not stable and the life is long. There were drawbacks such as shortening.

[0003]

SUMMARY OF THE INVENTION Under such circumstances, the present invention suppresses the falling and chipping of diamond crystal particles at the interface with a metal bond, has stable performance and has a long life. SUMMARY OF THE INVENTION It is an object of the present invention to provide a diamond dresser suitably used for dressing and truing of a grinding wheel including a superabrasive wheel.

[0004]

Means for Solving the Problems The present inventors have conducted intensive studies to develop a diamond dresser having the above-mentioned preferable properties, and as a result, have found that at least the side surfaces of the columnar body of polycrystalline diamond manufactured by the CVD method. It has been found that the object can be achieved by performing a metallizing treatment and fixing it to a dresser substrate by a powder sintering method, and based on this finding, the present invention has been completed. That is, the present invention provides (1) a diamond dresser in which a columnar body of polycrystalline diamond produced by a chemical vapor synthesis method is fixed to a working surface of a dresser substrate, at least a side surface of which is subjected to a metallizing treatment. Wherein the polycrystalline diamond column is fixed by a powder sintering method. (2) The polycrystalline diamond column having a metallized surface on at least a side surface thereof is a polycrystalline diamond column. The diamond dresser according to claim 1, wherein a metal material layer having an affinity for diamond is provided on the surface of the diamond dresser.
(3) A polycrystalline diamond column having at least side surfaces subjected to a metallizing treatment, a metal material layer having an affinity for diamond is provided on the surface of the polycrystalline diamond column, and a powder is further formed thereon. 2. The diamond dresser according to claim 1, wherein a metal material layer having an affinity for a metal bond used for sintering is provided.
And (4) cutting the polycrystalline diamond thin film produced by the chemical vapor synthesis method into a columnar body having a predetermined size,
4. The method for producing a diamond dresser according to claim 1, wherein at least a side surface thereof is subjected to a metallizing treatment, and then fixed to the working surface of the dresser substrate by a powder sintering method. Things.

[0005]

BEST MODE FOR CARRYING OUT THE INVENTION The diamond dresser of the present invention is obtained by fixing a polycrystalline diamond columnar body produced by a CVD method to a working surface of a dresser substrate by a powder sintering method. The method for producing the polycrystalline diamond thin film by the CVD method is not particularly limited, and conventionally known methods, for example, a microwave plasma method, a hot filament method,
Any of a direct current plasma method, a combustion method, and the like can be appropriately selected and used. In the microwave plasma method, a reaction tube is installed between a waveguide connected to a microwave oscillator and an applicator, a substrate is placed in the reaction tube, and a mixed gas obtained by diluting methane with hydrogen is used as a source gas. By generating plasma under a relatively low vacuum of 2 to 10 kPa, a polycrystalline diamond thin film is formed on a substrate. In the hot filament method, the substrate is placed in a reduced pressure vessel at 700 to 1,000 ° C.
And a mixed gas of methane and hydrogen is allowed to flow under reduced pressure of 1 to 10 kPa, and is heated by a filament of about 2,000 ° C. provided on the upper portion of the substrate to be decomposed into reactive radicals and the like. To form a polycrystalline diamond thin film. In the DC plasma method, a substrate is placed on a grounded anode provided in a decompression vessel, heated to about 800 ° C., a mixed gas of methane and hydrogen is introduced under a reduced pressure of about 25 kPa, and a direct current of 1,000 V is applied to the cathode. Multiply the current 4
A polycrystalline diamond thin film is formed by performing abnormal glow discharge at a current of about 00 mA. The combustion method is 600
A polycrystalline diamond thin film is formed in a reducing atmosphere in an internal flame by applying a flame in which acetylene is excessive with respect to oxygen to the substrate heated to about 1,000 ° C.

The crystal grain size of the polycrystalline diamond constituting the polycrystalline diamond thin film thus formed by the CVD method is preferably 200 μm or less, more preferably 100 μm or less, and particularly preferably 50 μm or less. In these methods, as a substrate on which a polycrystalline diamond thin film is formed, for example, a silicon substrate, a Mo substrate, a ceramic substrate such as Al ₂ O ₃ or Si ₃ N _4, or a cemented carbide substrate is used. In the present invention, a columnar body having a predetermined size is cut out from the polycrystalline diamond thin film thus produced by the CVD method. The method for cutting out is not particularly limited, and a conventionally known method,
For example, a laser method, an ion beam method, a cutting method using abrasive grains, or the like can be used. There is no particular limitation on the shape of the polycrystalline diamond column, and any one can be selected and used from columnar members such as a triangular column, a quadrangular column, a polygonal column having five or more angles, a circular column, a semicircular column, and an elliptical column. However, in general, a rectangular prism is used. The size of the column is not particularly limited, and is appropriately selected according to the type and use of the diamond dresser. When the column is a quadrangular column, the length of one side is generally 0.1. 1.5 mm and a length of about 0.5-10 mm. In addition, the polycrystalline diamond column, depending on the type of substrate used when manufacturing by the CVD method, for example, in the case of a ceramic or cemented carbide substrate, without removing the substrate,
The polycrystalline diamond column can be fixed to the dresser substrate together with the substrate.

Further, the polycrystalline diamond column is not limited to a single unit, but may be, for example, a comb-shaped unit in which the bases of a plurality of columns arranged at regular intervals are integrally connected. Such a comb-shaped diamond segment can be obtained by forming a silicon substrate into a comb shape, forming a diamond thin film on the silicon substrate by a CVD method, and then removing the substrate by etching. Alternatively, a masking material such as cobalt is plated on the surface of a silicon substrate by physical vapor deposition (PVD), and a comb-shaped pattern is masked in advance, and a diamond thin film is formed thereon by CVD. It may be formed. Such a comb-shaped diamond segment can be used for, for example, a multi-stone dresser or a rotary dresser. Further, the comb-shaped diamond segment may be formed by a CVD method on a surface of a comb-shaped ceramic substrate or a cemented carbide substrate instead of the silicon substrate, and in this case, the comb-shaped diamond segment may be used. Can be fixed to the dresser substrate for each of the ceramic substrate and the cemented carbide substrate. In the present invention, a metallizing treatment is applied to at least a side surface of the polycrystalline diamond column thus obtained. This metallizing process can sufficiently exert the effects of the present invention even if it is performed only on the side surface of the columnar body. However, due to the processing operation, the metallizing process is also performed on portions other than the side surface of the columnar body. There is no problem if it is given.

It is generally known that diamond has a low bonding strength with other substances. In the present invention,
A metallizing treatment is applied to at least the side surfaces of the polycrystalline diamond column to prevent the polycrystalline diamond column from falling off or chipping at the interface with the metal bond, to provide stable dressing performance, and to extend the life. The application improves the bonding strength between the diamond columnar body and the metal bond. For such a purpose, as a metallization treatment directly applied to the polycrystalline diamond column, a metal material having an affinity for diamond is used, and the metal material layer (hereinafter referred to as a metal material) is formed on at least a side surface of the diamond column. (Referred to as layer I). As the metal material having an affinity for diamond, those capable of forming carbide at the contact surface with diamond are preferable, and examples thereof include titanium, chromium, tantalum, niobium, vanadium, and zirconium. In terms of performance, titanium is particularly preferred. There is no particular limitation on the method of the metallizing treatment, and a conventionally known method such as a PVD method or
Any method can be used from among such methods, and among these, a PVD method such as a vacuum evaporation method, a sputtering method, and an ion plating method is preferable.

The thickness of the metal material layer I formed in this way is usually 0.1 in consideration of the effects and the economics.
To 5 μm, preferably 0.1 to 3 μm, more preferably 0.1 to 1 μm. The metallization treatment in the present invention may be one in which only the metal material layer I is formed. However, in order to further improve the effect of the present invention, a powder described later may be formed on the metal material layer I, if desired. A layer made of a metal material having an affinity for a metal bond used for sintering (hereinafter, referred to as a metal material layer II) can be formed. Here, the metal material having an affinity for the metal bond can be appropriately selected from, for example, copper, tungsten, nickel, chromium, cobalt and the like according to the type of the metal bond to be used. As a method of forming the metal material layer II, as in the case of the metal material layer I, any method can be used from among a PVD method, a CVD method, and a plating method. , Vacuum deposition method, sputtering method,
A PVD method such as an ion plating method is preferred.

The thickness of the metal material layer II formed in this manner is usually 1 to 1 in consideration of the effect and economy.
0 μm, preferably 1-5 μm, more preferably 1-3
It is selected in the range of μm. When the metal material layer II is provided on the metal material layer I, the effect of the present invention may be impaired due to the interaction of both metal material layers depending on the type of metal material constituting each layer. For example, when the metal material layer I is a titanium layer and the metal material layer II is a tungsten layer, titanium and tungsten react with each other, and the effect of the present invention is not sufficiently exerted. In such a case, it is preferable to provide an inert buffer layer between the metal material layer I and the metal material layer II. As the buffer layer, a platinum layer is particularly suitable. As a method of forming the buffer layer,
As in the case of the metal material layer I and the metal material layer II,
Any method can be used from the PVD method, the CVD method, and the like, and among these, PVD methods such as a vacuum evaporation method, a sputtering method, and an ion plating method are preferable. The thickness of the buffer layer thus formed is usually 0.5 to 10 μm in consideration of the effect and economy, and the like.
Preferably 0.5-5 μm, more preferably 0.5-2 μm
m. In the metallizing process of such a polycrystalline diamond column, a metal material layer I is provided on at least a side surface of the column, and a metal material layer II is further provided thereon, or on the metal material layer I,
When the metal material layer II is provided via the buffer layer, the method of forming each layer may be the same or different. That is, each layer may be formed by appropriately combining a PVD method, a CVD method, and the like.

In the present invention, the metallization treatment is performed on at least the side surfaces of the polycrystalline diamond columnar body, and then this is fixed to the working surface of the dresser substrate by a powder sintering method, whereby the desired shape is obtained. Manufactures diamond dressers. The metal bond used in the powder sintering method is not particularly limited, and may be a conventionally known metal bond such as a bronze alloy such as a copper-tin alloy, a brass alloy such as copper-zinc, or an iron-bronze alloy. And can be appropriately selected and used. The material of the dresser substrate is not particularly limited, and can be appropriately selected from various metal materials conventionally used as a substrate for a diamond dresser. Generally, various steel materials such as carbon steel and alloy steel are used as the metal material. The method of fixing the metallized polycrystalline diamond column to the working surface of the dresser substrate by the powder sintering method is not particularly limited, and a conventionally known method can be used. As an example, a matrix of a diamond dresser in which the shape of a completed diamond dresser is inverted is formed of graphite or the like, and an end face of the above-mentioned metal-bonded polycrystalline diamond column is bonded to a predetermined portion of its inner surface. After that, the dresser substrate is filled with a metal bond powder for powder sintering, disposed on the matrix, and sintered to form a metal bond layer, and the diamond columnar shape is formed. Fix your body. Thus, the diamond dresser of the present invention is obtained. There is no particular limitation on the form of the diamond dresser of the present invention, and various forms are possible, for example, a single-stone dresser, a multi-stone dresser such as a blade type, a rotary dresser of a full shape, or a disk-shaped or cup-shaped truer. is there.

[0012]

EXAMPLES Next, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples. Example 1 A polycrystalline diamond thin film (average crystal grain size: 20 μm) produced by a CVD method was measured with a laser to measure 0.5 mm on a side.
And cut out into a square pillar shape of 2 mm in length. A titanium layer, a platinum layer and a tungsten layer were sequentially formed on the entire surface of the quadrangular prism diamond particles by sputtering, and a metallizing treatment was performed. The thickness of the titanium layer is 0.5 μm,
The thickness of the platinum layer was 1.0 μm and the thickness of the tungsten layer was 1.5 μm. Next, the metallized quadrangular prism diamond particles were placed in a single row in the circumferential direction on the working surface of a disk-shaped base metal having an outer diameter of 100 mm by a powder sintering method using a copper-bronze-based metal bond powder. 1 at 2.5mm intervals
By fixing 25 arrays, the rotary truer (1
00 was manufactured ^D -15 ^T -30 ^H). Example 2 A rotary truer was manufactured in exactly the same manner as in Example 1 except that a chromium layer was formed instead of the titanium layer in the metallizing process in Example 1. Comparative Example 1 A rotary truer was manufactured in exactly the same manner as in Example 1 except that the metallization treatment of the square pillar diamond particles was not performed. FIG. 1 is a cross-sectional view of the rotary truer obtained in Examples 1 and 2 and Comparative Example 1, and FIG. 2 is a plan view of a cutting blade portion of the rotary truer. FIG. 1B is an enlarged view of a portion A in FIG. Reference numeral 1 is a base metal, 2 is a cutting blade, 3 is a metal bond, and 4 is a square pillar diamond particle. <Performance test of rotary truer> Dressing the grindstone with the truer set in the driving device, and from the wear amount of the grindstone and the truer, according to the formula dressing efficiency = (volume wear amount of the grindstone) / (volume wear amount of the truer) Dress efficiency was determined. Table 1 shows the test conditions.
Table 2 shows the dressing efficiency of each truer.

[0013]

[Table 1]

[0014]

[Table 2]

As can be seen from Table 2, the truer using the metallized polycrystalline quadrangular prismatic diamond particles is about 1.2 times larger than the truer using the polycrystalline square prismatic diamond particles not metallized. A dress efficiency of ~ 1.5 times was obtained.

[0016]

The diamond dresser of the present invention is a diamond dresser which is obtained by subjecting at least a side surface of a polycrystalline diamond columnar body produced by a CVD method to metallizing treatment and fixed to a dresser substrate by a powder sintering method. In addition, the dropping and chipping of diamond crystal particles at the interface with the metal bond is suppressed, and has a stable performance and a long life, and is suitably used for dressing and truing of a grinding wheel including a superabrasive wheel. Can be

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a rotary truer obtained in Examples 1 and 2 and Comparative Example 1.

FIG. 2 is a plan view of a cutting blade portion of the rotary truer.

[Explanation of symbols]

 1 base metal 2 cutting edge 3 metal bond 4 square pillar diamond particles

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B24D 5/00 B24D 5/00 Z C23C 16/27 C23C 16/27 // C01B 31/06 C01B 31/06 Z F term (reference) 3C047 EE18 EE19 3C063 AA02 AB03 BA37 BB02 BC02 CC11 EE26 FF22 4G046 GA01 GB02 GB07 4K030 AA10 AA17 BA28 BB03 DA08 FA01 FA10 LA11

Claims (4)

[Claims] 1. A diamond dresser obtained by fixing a columnar body of polycrystalline diamond produced by a chemical vapor synthesis method to a working surface of a dresser substrate, wherein at least a side surface of the diamond dresser is subjected to a metallizing treatment. A diamond dresser wherein a diamond column is fixed by a powder sintering method. 2. A polycrystalline diamond column having at least side surfaces subjected to a metallizing treatment, wherein a metal material layer having affinity for diamond is provided on the surface of the polycrystalline diamond column. The diamond dresser according to claim 1. 3. A polycrystalline diamond column having at least side surfaces subjected to a metallizing treatment, a metal material layer having an affinity for diamond is provided on the surface of the polycrystalline diamond column, and The diamond dresser according to claim 1, further comprising a metal material layer having an affinity for a metal bond used for powder sintering. 4. A polycrystalline diamond thin film produced by a chemical vapor synthesis method is cut into a columnar body having a predetermined size, and at least a side surface thereof is metallized, and then a working surface of a dresser substrate is formed by a powder sintering method. The method for producing a diamond dresser according to claim 1, 2 or 3, wherein the diamond dresser is fixed to a diamond dresser.