JPH0123137Y2 - - Google Patents

Info

Publication number

JPH0123137Y2

JPH0123137Y2 JP1985050919U JP5091985U JPH0123137Y2 JP H0123137 Y2 JPH0123137 Y2 JP H0123137Y2 JP 1985050919 U JP1985050919 U JP 1985050919U JP 5091985 U JP5091985 U JP 5091985U JP H0123137 Y2 JPH0123137 Y2 JP H0123137Y2

Authority

JP

Japan

Prior art keywords

photomask

protection device

adhesive layer

support frame

thin film

Prior art date

1985-04-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000012790 adhesive layer Substances 0.000 claims description 20
• 239000010409 thin film Substances 0.000 claims description 15
• 239000000853 adhesive Substances 0.000 claims description 9
• 230000001070 adhesive effect Effects 0.000 claims description 9
• 239000010410 layer Substances 0.000 claims description 8
• 238000009423 ventilation Methods 0.000 claims description 6
• 230000001681 protective effect Effects 0.000 description 17
• 239000010408 film Substances 0.000 description 15
• 239000002184 metal Substances 0.000 description 14
• 239000011521 glass Substances 0.000 description 6
• 239000000758 substrate Substances 0.000 description 6
• 238000000034 method Methods 0.000 description 5
• 239000000428 dust Substances 0.000 description 4
• 239000004065 semiconductor Substances 0.000 description 4
• 239000011148 porous material Substances 0.000 description 3
• 229920000742 Cotton Polymers 0.000 description 2
• 230000002411 adverse Effects 0.000 description 2
• 230000007547 defect Effects 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 229920000544 Gore-Tex Polymers 0.000 description 1
• SMEGJBVQLJJKKX-HOTMZDKISA-N [(2R,3S,4S,5R,6R)-5-acetyloxy-3,4,6-trihydroxyoxan-2-yl]methyl acetate Chemical compound CC(=O)OC[C@@H]1[C@H]([C@@H]([C@H]([C@@H](O1)O)OC(=O)C)O)O SMEGJBVQLJJKKX-HOTMZDKISA-N 0.000 description 1
• UGZICOVULPINFH-UHFFFAOYSA-N acetic acid;butanoic acid Chemical compound CC(O)=O.CCCC(O)=O UGZICOVULPINFH-UHFFFAOYSA-N 0.000 description 1
• 229920002301 cellulose acetate Polymers 0.000 description 1
• 230000002950 deficient Effects 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 238000001459 lithography Methods 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 230000003287 optical effect Effects 0.000 description 1
• 239000005011 phenolic resin Substances 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000010935 stainless steel Substances 0.000 description 1
• 239000000057 synthetic resin Substances 0.000 description 1
• 229920003002 synthetic resin Polymers 0.000 description 1