JPH0122954B2 - - Google Patents

Info

Publication number
JPH0122954B2
JPH0122954B2 JP57180970A JP18097082A JPH0122954B2 JP H0122954 B2 JPH0122954 B2 JP H0122954B2 JP 57180970 A JP57180970 A JP 57180970A JP 18097082 A JP18097082 A JP 18097082A JP H0122954 B2 JPH0122954 B2 JP H0122954B2
Authority
JP
Japan
Prior art keywords
region
circuit
particle
area
mask pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57180970A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5969868A (ja
Inventor
Makoto Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP57180970A priority Critical patent/JPS5969868A/ja
Publication of JPS5969868A publication Critical patent/JPS5969868A/ja
Publication of JPH0122954B2 publication Critical patent/JPH0122954B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/60Analysis of geometric attributes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP57180970A 1982-10-15 1982-10-15 画像位置計測装置 Granted JPS5969868A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57180970A JPS5969868A (ja) 1982-10-15 1982-10-15 画像位置計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57180970A JPS5969868A (ja) 1982-10-15 1982-10-15 画像位置計測装置

Publications (2)

Publication Number Publication Date
JPS5969868A JPS5969868A (ja) 1984-04-20
JPH0122954B2 true JPH0122954B2 (enExample) 1989-04-28

Family

ID=16092457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57180970A Granted JPS5969868A (ja) 1982-10-15 1982-10-15 画像位置計測装置

Country Status (1)

Country Link
JP (1) JPS5969868A (enExample)

Also Published As

Publication number Publication date
JPS5969868A (ja) 1984-04-20

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