JPH0122726B2 - - Google Patents

Info

Publication number
JPH0122726B2
JPH0122726B2 JP54129735A JP12973579A JPH0122726B2 JP H0122726 B2 JPH0122726 B2 JP H0122726B2 JP 54129735 A JP54129735 A JP 54129735A JP 12973579 A JP12973579 A JP 12973579A JP H0122726 B2 JPH0122726 B2 JP H0122726B2
Authority
JP
Japan
Prior art keywords
arm
sample
pressing
sample holder
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54129735A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5654037A (en
Inventor
Yoshinori Takaba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP12973579A priority Critical patent/JPS5654037A/ja
Publication of JPS5654037A publication Critical patent/JPS5654037A/ja
Publication of JPH0122726B2 publication Critical patent/JPH0122726B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP12973579A 1979-10-08 1979-10-08 Sample holder in electron ray exposure device, etc. Granted JPS5654037A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12973579A JPS5654037A (en) 1979-10-08 1979-10-08 Sample holder in electron ray exposure device, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12973579A JPS5654037A (en) 1979-10-08 1979-10-08 Sample holder in electron ray exposure device, etc.

Publications (2)

Publication Number Publication Date
JPS5654037A JPS5654037A (en) 1981-05-13
JPH0122726B2 true JPH0122726B2 (enrdf_load_stackoverflow) 1989-04-27

Family

ID=15016903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12973579A Granted JPS5654037A (en) 1979-10-08 1979-10-08 Sample holder in electron ray exposure device, etc.

Country Status (1)

Country Link
JP (1) JPS5654037A (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142636A (en) * 1980-04-07 1981-11-07 Toshiba Corp Holding mechanism for cassette of electron ray device
JPS57201023A (en) * 1981-06-04 1982-12-09 Toshiba Mach Co Ltd Cassette holder for electron beam drawing apparatus
JPS5964695A (ja) * 1982-10-05 1984-04-12 Nippon Petrochem Co Ltd 石油中間留出燃料油組成物
GB8521393D0 (en) * 1985-08-28 1985-10-02 Exxon Chemical Patents Inc Middle distillate compositions
US4659336A (en) * 1986-03-28 1987-04-21 Texaco Inc. Motor fuel composition
US5814110A (en) * 1986-09-24 1998-09-29 Exxon Chemical Patents Inc. Chemical compositions and use as fuel additives
GB2197878A (en) * 1986-10-07 1988-06-02 Exxon Chemical Patents Inc Middle distillate compositions with reduced wax crystal size
US5425789A (en) * 1986-12-22 1995-06-20 Exxon Chemical Patents Inc. Chemical compositions and their use as fuel additives
GB8820295D0 (en) * 1988-08-26 1988-09-28 Exxon Chemical Patents Inc Chemical compositions & use as fuel additives
EP0525040B1 (en) * 1990-04-19 1996-06-19 Exxon Chemical Patents Inc. Additives for distillate fuels and distillate fuels containing them
JPH04329625A (ja) * 1991-04-30 1992-11-18 Eiko Eng:Kk 半導体基板の固定装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS568188Y2 (enrdf_load_stackoverflow) * 1976-04-27 1981-02-23
JPS5454580A (en) * 1977-10-11 1979-04-28 Hitachi Ltd Cassette chucking device in electron beam lithography apparatus

Also Published As

Publication number Publication date
JPS5654037A (en) 1981-05-13

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