JPS568188Y2 - - Google Patents

Info

Publication number
JPS568188Y2
JPS568188Y2 JP5217176U JP5217176U JPS568188Y2 JP S568188 Y2 JPS568188 Y2 JP S568188Y2 JP 5217176 U JP5217176 U JP 5217176U JP 5217176 U JP5217176 U JP 5217176U JP S568188 Y2 JPS568188 Y2 JP S568188Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5217176U
Other languages
Japanese (ja)
Other versions
JPS52145774U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5217176U priority Critical patent/JPS568188Y2/ja
Publication of JPS52145774U publication Critical patent/JPS52145774U/ja
Application granted granted Critical
Publication of JPS568188Y2 publication Critical patent/JPS568188Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP5217176U 1976-04-27 1976-04-27 Expired JPS568188Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5217176U JPS568188Y2 (enrdf_load_stackoverflow) 1976-04-27 1976-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5217176U JPS568188Y2 (enrdf_load_stackoverflow) 1976-04-27 1976-04-27

Publications (2)

Publication Number Publication Date
JPS52145774U JPS52145774U (enrdf_load_stackoverflow) 1977-11-04
JPS568188Y2 true JPS568188Y2 (enrdf_load_stackoverflow) 1981-02-23

Family

ID=28511253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5217176U Expired JPS568188Y2 (enrdf_load_stackoverflow) 1976-04-27 1976-04-27

Country Status (1)

Country Link
JP (1) JPS568188Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654037A (en) * 1979-10-08 1981-05-13 Jeol Ltd Sample holder in electron ray exposure device, etc.
JPS5833702Y2 (ja) * 1981-10-29 1983-07-28 日本電信電話株式会社 電子ビ−ム露光装置
JPH0620037B2 (ja) * 1982-12-28 1994-03-16 株式会社東芝 試料搬送装置

Also Published As

Publication number Publication date
JPS52145774U (enrdf_load_stackoverflow) 1977-11-04

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