JPS5654037A - Sample holder in electron ray exposure device, etc. - Google Patents

Sample holder in electron ray exposure device, etc.

Info

Publication number
JPS5654037A
JPS5654037A JP12973579A JP12973579A JPS5654037A JP S5654037 A JPS5654037 A JP S5654037A JP 12973579 A JP12973579 A JP 12973579A JP 12973579 A JP12973579 A JP 12973579A JP S5654037 A JPS5654037 A JP S5654037A
Authority
JP
Japan
Prior art keywords
moving body
sample holder
holder
arms
released
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12973579A
Other languages
Japanese (ja)
Other versions
JPH0122726B2 (en
Inventor
Yoshinori Takaba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP12973579A priority Critical patent/JPS5654037A/en
Publication of JPS5654037A publication Critical patent/JPS5654037A/en
Publication of JPH0122726B2 publication Critical patent/JPH0122726B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To prevent the damage of the receiving surface of the sample holder and obviate the lowering of the accuracy of movement by a method wherein arms are rotated by little force according to the principle of a lever and pushing force to a moving body is released when exchanging samples. CONSTITUTION:When a sample exchanging mechanism 8 is brought near to a moving body 2 after exposure, a wedge 22 expands arms 18a, 18b, and pulleys 16a, 16b are turned. Thus, pushing bodies 9a-9d are pushed down through lever bodies 14a-14d, and upward pressure toward the moving body 2 of the sample holder 6 is released. At the same time, a drum 26 is rotated, and sideways pressure is also released. A handle 36 is chucked 8 at that time, and the holder is extracted from the moving body 2. When a new sample holder 6 is chucked 8 and brought close to the moving body 2, insertion is easy because the wedge 22 turns the arms 18a, 18b again and pushing bodies 9a-9d and 23a, 23b are pushed down, and the holder is pushed and fixed to the moving body 2 when returning the chuck 8. Thus, exposure having high accuracy can be conducted without lowering the accuracy of the movement of the moving body.
JP12973579A 1979-10-08 1979-10-08 Sample holder in electron ray exposure device, etc. Granted JPS5654037A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12973579A JPS5654037A (en) 1979-10-08 1979-10-08 Sample holder in electron ray exposure device, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12973579A JPS5654037A (en) 1979-10-08 1979-10-08 Sample holder in electron ray exposure device, etc.

Publications (2)

Publication Number Publication Date
JPS5654037A true JPS5654037A (en) 1981-05-13
JPH0122726B2 JPH0122726B2 (en) 1989-04-27

Family

ID=15016903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12973579A Granted JPS5654037A (en) 1979-10-08 1979-10-08 Sample holder in electron ray exposure device, etc.

Country Status (1)

Country Link
JP (1) JPS5654037A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142636A (en) * 1980-04-07 1981-11-07 Toshiba Corp Holding mechanism for cassette of electron ray device
JPS57201023A (en) * 1981-06-04 1982-12-09 Toshiba Mach Co Ltd Cassette holder for electron beam drawing apparatus
JPS5964695A (en) * 1982-10-05 1984-04-12 Nippon Petrochem Co Ltd Fuel oil composition consisting of petroleum heart cut
JPS62240379A (en) * 1986-03-28 1987-10-21 テキサコ・デベロツプメント・コ−ポレ−シヨン Car fuel composition
DE3634081A1 (en) * 1986-10-07 1988-04-21 Exxon Chemical Patents Inc FUEL OR FUEL OIL BASED ON PETROLEUM DISTILLATES
US5045088A (en) * 1988-08-26 1991-09-03 Exxon Chemical Patents Inc. Chemical compositions and use as fuel additives
JPH04329625A (en) * 1991-04-30 1992-11-18 Eiko Eng:Kk Fixer of semiconductor substrate
US5425789A (en) * 1986-12-22 1995-06-20 Exxon Chemical Patents Inc. Chemical compositions and their use as fuel additives
US5441545A (en) * 1985-08-28 1995-08-15 Exxon Chemical Patents Inc. Middle distillate compositions with improved low temperature properties
US5478368A (en) * 1990-04-19 1995-12-26 Exxon Chemical Patents Inc. Additives for distillate fuels and distillate fuels containing them
US5814110A (en) * 1986-09-24 1998-09-29 Exxon Chemical Patents Inc. Chemical compositions and use as fuel additives

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52145774U (en) * 1976-04-27 1977-11-04
JPS5454580A (en) * 1977-10-11 1979-04-28 Hitachi Ltd Cassette chucking device in electron beam lithography apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52145774U (en) * 1976-04-27 1977-11-04
JPS5454580A (en) * 1977-10-11 1979-04-28 Hitachi Ltd Cassette chucking device in electron beam lithography apparatus

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0322047B2 (en) * 1980-04-07 1991-03-26 Toshiba Kk
JPS56142636A (en) * 1980-04-07 1981-11-07 Toshiba Corp Holding mechanism for cassette of electron ray device
JPS57201023A (en) * 1981-06-04 1982-12-09 Toshiba Mach Co Ltd Cassette holder for electron beam drawing apparatus
JPS5964695A (en) * 1982-10-05 1984-04-12 Nippon Petrochem Co Ltd Fuel oil composition consisting of petroleum heart cut
JPH0316400B2 (en) * 1982-10-05 1991-03-05 Nippon Petrochemicals Co Ltd
US5441545A (en) * 1985-08-28 1995-08-15 Exxon Chemical Patents Inc. Middle distillate compositions with improved low temperature properties
JPS62240379A (en) * 1986-03-28 1987-10-21 テキサコ・デベロツプメント・コ−ポレ−シヨン Car fuel composition
US5814110A (en) * 1986-09-24 1998-09-29 Exxon Chemical Patents Inc. Chemical compositions and use as fuel additives
DE3634081A1 (en) * 1986-10-07 1988-04-21 Exxon Chemical Patents Inc FUEL OR FUEL OIL BASED ON PETROLEUM DISTILLATES
US5425789A (en) * 1986-12-22 1995-06-20 Exxon Chemical Patents Inc. Chemical compositions and their use as fuel additives
US5045088A (en) * 1988-08-26 1991-09-03 Exxon Chemical Patents Inc. Chemical compositions and use as fuel additives
US5478368A (en) * 1990-04-19 1995-12-26 Exxon Chemical Patents Inc. Additives for distillate fuels and distillate fuels containing them
JPH04329625A (en) * 1991-04-30 1992-11-18 Eiko Eng:Kk Fixer of semiconductor substrate

Also Published As

Publication number Publication date
JPH0122726B2 (en) 1989-04-27

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