JPH0121492B2 - - Google Patents

Info

Publication number
JPH0121492B2
JPH0121492B2 JP56161431A JP16143181A JPH0121492B2 JP H0121492 B2 JPH0121492 B2 JP H0121492B2 JP 56161431 A JP56161431 A JP 56161431A JP 16143181 A JP16143181 A JP 16143181A JP H0121492 B2 JPH0121492 B2 JP H0121492B2
Authority
JP
Japan
Prior art keywords
resist
formula
dry etching
solution
polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56161431A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5862643A (ja
Inventor
Kyoshi Oguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP56161431A priority Critical patent/JPS5862643A/ja
Priority to US06/432,448 priority patent/US4520097A/en
Priority to EP82109353A priority patent/EP0077056B1/en
Priority to DE8282109353T priority patent/DE3269664D1/de
Publication of JPS5862643A publication Critical patent/JPS5862643A/ja
Publication of JPH0121492B2 publication Critical patent/JPH0121492B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387—Polyamides or polyimides

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Polyamides (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP56161431A 1981-10-09 1981-10-09 電離放射線感応ネガ型レジスト Granted JPS5862643A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP56161431A JPS5862643A (ja) 1981-10-09 1981-10-09 電離放射線感応ネガ型レジスト
US06/432,448 US4520097A (en) 1981-10-09 1982-10-04 Negative-type resist sensitive to ionizing radiation
EP82109353A EP0077056B1 (en) 1981-10-09 1982-10-08 Negative-type resist sensitive to ionizing radiation
DE8282109353T DE3269664D1 (en) 1981-10-09 1982-10-08 Negative-type resist sensitive to ionizing radiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56161431A JPS5862643A (ja) 1981-10-09 1981-10-09 電離放射線感応ネガ型レジスト

Publications (2)

Publication Number Publication Date
JPS5862643A JPS5862643A (ja) 1983-04-14
JPH0121492B2 true JPH0121492B2 (en, 2012) 1989-04-21

Family

ID=15734974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56161431A Granted JPS5862643A (ja) 1981-10-09 1981-10-09 電離放射線感応ネガ型レジスト

Country Status (4)

Country Link
US (1) US4520097A (en, 2012)
EP (1) EP0077056B1 (en, 2012)
JP (1) JPS5862643A (en, 2012)
DE (1) DE3269664D1 (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5862643A (ja) * 1981-10-09 1983-04-14 Kiyoshi Oguchi 電離放射線感応ネガ型レジスト
JP5144127B2 (ja) * 2007-05-23 2013-02-13 キヤノン株式会社 ナノインプリント用のモールドの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US26018A (en) * 1859-11-08 Railroad-gate
USRE26018E (en) 1966-05-03 Epoxidized polyamides
JPS5862643A (ja) * 1981-10-09 1983-04-14 Kiyoshi Oguchi 電離放射線感応ネガ型レジスト

Also Published As

Publication number Publication date
JPS5862643A (ja) 1983-04-14
EP0077056B1 (en) 1986-03-05
DE3269664D1 (en) 1986-04-10
EP0077056A1 (en) 1983-04-20
US4520097A (en) 1985-05-28

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