JPH0121235B2 - - Google Patents

Info

Publication number

JPH0121235B2

JPH0121235B2 JP4052282A JP4052282A JPH0121235B2 JP H0121235 B2 JPH0121235 B2 JP H0121235B2 JP 4052282 A JP4052282 A JP 4052282A JP 4052282 A JP4052282 A JP 4052282A JP H0121235 B2 JPH0121235 B2 JP H0121235B2

Authority

JP

Japan

Prior art keywords

alloy

layer

conductor

bath

diffusion barrier

Prior art date

1982-03-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 229910045601 alloy Inorganic materials 0.000 claims description 42
• 239000000956 alloy Substances 0.000 claims description 42
• 239000004020 conductor Substances 0.000 claims description 32
• 229910052759 nickel Inorganic materials 0.000 claims description 20
• 239000000758 substrate Substances 0.000 claims description 14
• 229910052742 iron Inorganic materials 0.000 claims description 13
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
• 229910052709 silver Inorganic materials 0.000 claims description 7
• 239000004332 silver Substances 0.000 claims description 7
• 229910052718 tin Inorganic materials 0.000 claims description 3
• 238000007747 plating Methods 0.000 description 30
• 238000009792 diffusion process Methods 0.000 description 16
• 230000004888 barrier function Effects 0.000 description 15
• 229910017980 Ag—Sn Inorganic materials 0.000 description 11
• 229910000679 solder Inorganic materials 0.000 description 10
• 229910001128 Sn alloy Inorganic materials 0.000 description 7
• LFAGQMCIGQNPJG-UHFFFAOYSA-N silver cyanide Chemical compound [Ag+].N#[C-] LFAGQMCIGQNPJG-UHFFFAOYSA-N 0.000 description 6
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
• 229910052739 hydrogen Inorganic materials 0.000 description 5
• 239000001257 hydrogen Substances 0.000 description 5
• 229910052802 copper Inorganic materials 0.000 description 4
• 239000013505 freshwater Substances 0.000 description 4
• 238000005406 washing Methods 0.000 description 4
• 229910000881 Cu alloy Inorganic materials 0.000 description 3
• 229910017709 Ni Co Inorganic materials 0.000 description 3
• 229910003267 Ni-Co Inorganic materials 0.000 description 3
• 241000080590 Niso Species 0.000 description 3
• 229910003262 Ni‐Co Inorganic materials 0.000 description 3
• 229910001096 P alloy Inorganic materials 0.000 description 3
• HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
• 229910000831 Steel Inorganic materials 0.000 description 3
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
• 230000007797 corrosion Effects 0.000 description 3
• 238000005260 corrosion Methods 0.000 description 3
• 238000010438 heat treatment Methods 0.000 description 3
• 239000000463 material Substances 0.000 description 3
• 229910052760 oxygen Inorganic materials 0.000 description 3
• 239000001301 oxygen Substances 0.000 description 3
• 239000010959 steel Substances 0.000 description 3
• 238000009736 wetting Methods 0.000 description 3
• 229910018104 Ni-P Inorganic materials 0.000 description 2
• 229910018536 Ni—P Inorganic materials 0.000 description 2
• FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
• 238000007796 conventional method Methods 0.000 description 2
• 230000006866 deterioration Effects 0.000 description 2
• XPPKVPWEQAFLFU-UHFFFAOYSA-J diphosphate(4-) Chemical compound [O-]P([O-])(=O)OP([O-])([O-])=O XPPKVPWEQAFLFU-UHFFFAOYSA-J 0.000 description 2
• 235000011180 diphosphates Nutrition 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• 239000011347 resin Substances 0.000 description 2
• 229920005989 resin Polymers 0.000 description 2
• 238000005476 soldering Methods 0.000 description 2
• 229910000521 B alloy Inorganic materials 0.000 description 1
• 229910000531 Co alloy Inorganic materials 0.000 description 1
• XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
• 229910000640 Fe alloy Inorganic materials 0.000 description 1
• 229910003271 Ni-Fe Inorganic materials 0.000 description 1
• 229910018100 Ni-Sn Inorganic materials 0.000 description 1
• 229910018532 Ni—Sn Inorganic materials 0.000 description 1
• 229910018605 Ni—Zn Inorganic materials 0.000 description 1
• QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
• 230000003213 activating effect Effects 0.000 description 1
• 238000004140 cleaning Methods 0.000 description 1
• 230000000052 comparative effect Effects 0.000 description 1
• 238000002845 discoloration Methods 0.000 description 1
• 238000001035 drying Methods 0.000 description 1
• 230000005496 eutectics Effects 0.000 description 1
• 235000013372 meat Nutrition 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 150000002739 metals Chemical class 0.000 description 1
• 230000003647 oxidation Effects 0.000 description 1
• 238000007254 oxidation reaction Methods 0.000 description 1
• 230000000149 penetrating effect Effects 0.000 description 1
• 230000035515 penetration Effects 0.000 description 1
• 238000005554 pickling Methods 0.000 description 1
• 150000003839 salts Chemical class 0.000 description 1
• 239000011780 sodium chloride Substances 0.000 description 1
• IIACRCGMVDHOTQ-UHFFFAOYSA-N sulfamic acid Chemical class NS(O)(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-N 0.000 description 1
• 238000010301 surface-oxidation reaction Methods 0.000 description 1