JPH0121048B2 - - Google Patents

Info

Publication number
JPH0121048B2
JPH0121048B2 JP20248284A JP20248284A JPH0121048B2 JP H0121048 B2 JPH0121048 B2 JP H0121048B2 JP 20248284 A JP20248284 A JP 20248284A JP 20248284 A JP20248284 A JP 20248284A JP H0121048 B2 JPH0121048 B2 JP H0121048B2
Authority
JP
Japan
Prior art keywords
products
foaming liquid
product
transported
foaming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20248284A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6181324A (ja
Inventor
Atsuji Karita
Masanobu Harada
Susumu Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Priority to JP20248284A priority Critical patent/JPS6181324A/ja
Publication of JPS6181324A publication Critical patent/JPS6181324A/ja
Publication of JPH0121048B2 publication Critical patent/JPH0121048B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00Non-mechanical conveyors not otherwise provided for
    • B65G54/02Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic

Landscapes

  • Non-Mechanical Conveyors (AREA)
JP20248284A 1984-09-26 1984-09-26 搬送装置 Granted JPS6181324A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20248284A JPS6181324A (ja) 1984-09-26 1984-09-26 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20248284A JPS6181324A (ja) 1984-09-26 1984-09-26 搬送装置

Publications (2)

Publication Number Publication Date
JPS6181324A JPS6181324A (ja) 1986-04-24
JPH0121048B2 true JPH0121048B2 (en, 2012) 1989-04-19

Family

ID=16458237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20248284A Granted JPS6181324A (ja) 1984-09-26 1984-09-26 搬送装置

Country Status (1)

Country Link
JP (1) JPS6181324A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4307730A1 (de) * 1993-03-11 1994-09-15 United States Surgical Corp Verfahren und Vorrichtung zum Transport und zum Positionieren mikromechanischer Teilchen
DE10038611C2 (de) * 2000-08-08 2003-08-07 Karlsruhe Forschzent Fördereinrichtung für den berührungslosen Transport von Bauteilen aus Kunststoff, Halbleitermaterial oder Metall
US7416370B2 (en) * 2005-06-15 2008-08-26 Lam Research Corporation Method and apparatus for transporting a substrate using non-Newtonian fluid

Also Published As

Publication number Publication date
JPS6181324A (ja) 1986-04-24

Similar Documents

Publication Publication Date Title
GB1321191A (en) Vibratory feeder having a pile conveying surface
KR920016318A (ko) 조립.가공장치
JPH0121048B2 (en, 2012)
JP2021130530A (ja) 搬送装置
JPS5499353A (en) Method of cleaning of board shaped materials
JPS6158366B2 (en, 2012)
JP2003261213A (ja) 空気浮上式ベルトコンベヤ
JP2001341827A (ja) 枚葉式洗浄機および枚葉式洗浄機に用いられるローラーコンベア用の中間軸受け
US3286813A (en) Apparatus for feeding stampings to machines
GB1002072A (en) Improvements in or relating to conveyors
KR101356032B1 (ko) 컨베이어의 기판용 반송홀더
JPS6043895A (ja) 基板洗浄装置
JPS5846170B2 (ja) 半導体ウェファ−の搬送方法および搬送装置
CN104290126B (zh) 具有干式洁净机之板材切断装置
JP2774917B2 (ja) 円柱状又は円筒状物品の洗浄装置
JPS6323965Y2 (en, 2012)
KR20020075165A (ko) 표면처리장치
JPH0427854Y2 (en, 2012)
JPH026030Y2 (en, 2012)
JPH11334874A (ja) 搬送装置
JPS59124623A (ja) 搬送装置
JPS6348594Y2 (en, 2012)
JPH04108580A (ja) 液中ジェット洗浄装置のワーク搬送機構
JPS644728Y2 (en, 2012)
JPH0544080Y2 (en, 2012)