JPH01197703A - Hermetic sealing method - Google Patents
Hermetic sealing methodInfo
- Publication number
- JPH01197703A JPH01197703A JP2310588A JP2310588A JPH01197703A JP H01197703 A JPH01197703 A JP H01197703A JP 2310588 A JP2310588 A JP 2310588A JP 2310588 A JP2310588 A JP 2310588A JP H01197703 A JPH01197703 A JP H01197703A
- Authority
- JP
- Japan
- Prior art keywords
- gold
- hole
- indium
- vacuum
- coating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 title claims description 15
- 239000010931 gold Substances 0.000 claims abstract description 21
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052737 gold Inorganic materials 0.000 claims abstract description 19
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052738 indium Inorganic materials 0.000 claims abstract description 12
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- 229910001020 Au alloy Inorganic materials 0.000 claims description 2
- 229910000846 In alloy Inorganic materials 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 abstract description 11
- 238000000576 coating method Methods 0.000 abstract description 11
- 239000010935 stainless steel Substances 0.000 abstract description 9
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 7
- 229910045601 alloy Inorganic materials 0.000 abstract description 5
- 239000000956 alloy Substances 0.000 abstract description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 4
- 239000011521 glass Substances 0.000 abstract description 4
- 239000000155 melt Substances 0.000 abstract description 3
- 229910052759 nickel Inorganic materials 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract description 2
- 239000013307 optical fiber Substances 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、例えば炭酸ガスレーザーメスに使用する光フ
アイバケーブル等の気密封着方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for hermetically sealing optical fiber cables used, for example, in carbon dioxide laser scalpels.
従来の技術
金属同志や、金属とガラスなどを気密封着する方法とし
て、従来インジウムシール技術が知られている。この方
法に関しては、例えば、ＴＨＥＲＥＶＩＥＷ ＯＦ ５
ＣＩＥＮＴＩＦＩＣＩＮＳＴＲＵＭＥＮＴＳ ノＶＯＬ
ＵＭＥ ４３ 、 ＮＵＭＢＥＲ８、Ｐ １０８Ｂ
に開示せられており、この方法によれば、２６０°Ｃ程
度の比較的低温の条件で、放出ガスの少ない清浄な、か
つ気密度の高い恒久的な封着が可能である０第３図に従
来行なわれてきたインジウムシールの方法を示す。筒状
体７の端部を研磨仕上げした上に金コーティング膜９ｆ
、焼結又は蒸着により形成し、蓋体８にも同様にして金
コーティング膜１０を形成したのち、互いの金コーティ
ング膜９，１゜が接触するように重ね、上方に１００〜
ｓｏｏｇｒの荷重１１全載せ、接合部の周囲にインジウ
ムワイヤ１２を周回せしめる。この状態で真空中で加熱
すると、インジウムワイヤ１２が溶融し金との合金が生
成され、この合金により気密封着が為される。Conventional Technology Indium sealing technology is conventionally known as a method for hermetically sealing metals together or metals and glass. For this method, for example, THEREVIEW OF 5
CIENTIFICINSTRUMENTS NO VOL
UME 43, NUMBER8, P 108B
According to this method, it is possible to achieve a clean, airtight, and permanent seal with little released gas at a relatively low temperature of about 260°C. The conventional indium sealing method is shown below. A gold coating film 9f is applied on the polished end of the cylindrical body 7.
, by sintering or vapor deposition, and after forming a gold coating film 10 on the lid body 8 in the same way, stack them so that their gold coating films 9 and 1° are in contact with each other, and apply a film of 100 to 100° above.
The load 11 of the soogr is fully loaded, and the indium wire 12 is wound around the joint. When heated in a vacuum in this state, the indium wire 12 is melted to form an alloy with gold, and this alloy forms an airtight seal.
発明が解決しようとする課題
しかし、ある種の構造物に於いては、接合面に対し荷重
をかけられない場合がある０貫通孔に嵌合する棒状体を
気密封着する場合が、これに相当し、接合面には荷重が
加えられないため、前記文献に開示されている方法は適
用できない。Problems to be Solved by the Invention However, in some types of structures, it is difficult to hermetically seal a rod-shaped body that fits into a through-hole in which it may not be possible to apply a load to the joint surface. Correspondingly, no load is applied to the joint surfaces, so the method disclosed in said document cannot be applied.
課題を解決するための手段
本発明は、上記課題を解決するため、貫通孔の内面に金
をコーティングし、この貫通孔に嵌合する棒状体の側面
にも金をコーティングしたのち、両者を嵌合せしめ、該
嵌合部近傍にインジウムを押し付け密着させた状態で、
これらを真空中で加熱し、インジウムと金の合金を形成
して貫通孔を密封することを特徴とする。Means for Solving the Problems In order to solve the above problems, the present invention coats the inner surface of the through hole with gold, coats the side surface of the rod-shaped body that fits into the through hole with gold, and then fits the two together. With the indium pressed close to the fitting part,
It is characterized by heating these in a vacuum to form an alloy of indium and gold to seal the through holes.
作用
本発明は、上記した方法により、嵌合部近傍で溶融した
インジウムが、金と合金を作りながら、毛細管現象によ
って接合面間に確実に侵入してゆき、気密度のよい封着
が得られる。According to the present invention, by the above-described method, indium melted near the fitting portion forms an alloy with gold and reliably infiltrates between the joint surfaces by capillary action, resulting in a seal with good airtightness. .
実施例 第１図は、本発明の気密封着方法を示す断面図である。Example FIG. 1 is a sectional view showing the hermetic sealing method of the present invention.
第１図において、１は直径１電の貫通孔２を有するステ
ンレス基材、３は貫通孔内面にニッケルを下地にしてメ
ツキした厚み３１１ｍの金コーティング膜、４はガラス
製のロッドレンズ、５はその側面にクロム、白金を下地
にして真空蒸着法で形成した厚み０．１μｍの金コーテ
ィング膜、６はステンレス基材１の貫通孔２にロッドレ
ンズ４を嵌合した近傍に、すき間なく押し付け密着させ
たインジウムである。ステンレス基材１は、メツキを施
したのち、洗浄し、真空中４６０”Ｃで脱ガスのための
ペーキーグを経たものを用いるが、メツキにより製膜し
た場合、このプロセスは不可欠である。また、メツキし
た貫通孔２の内径は、ロッドレンズ外径とのクリアラン
スが片側で６〜２００／７ｍに設定することにより、歩
留りの良い気密封着が得られる。ロッドレンズ４の落下
を防ぐための支持体を用いるが、図では省略している。In Fig. 1, 1 is a stainless steel base material having a through hole 2 with a diameter of 1 mm, 3 is a gold coating film with a thickness of 311 m plated on the inner surface of the through hole with a nickel base, 4 is a glass rod lens, and 5 is a A gold coating film with a thickness of 0.1 μm is formed on the side surface using a vacuum evaporation method using chromium and platinum as a base, and 6 is pressed tightly into the vicinity of the rod lens 4 fitted into the through hole 2 of the stainless steel base material 1 without any gaps. This is indium. The stainless steel base material 1 used is one that has been plated, washed, and then pasted in a vacuum at 460''C for degassing, but this process is essential when a film is formed by plating. By setting the clearance between the inner diameter of the plated through hole 2 and the outer diameter of the rod lens to 6 to 200/7 m on one side, airtight sealing with good yield can be obtained. Support to prevent the rod lens 4 from falling body is used, but it is omitted in the figure.
これらを、真空加熱炉に収納し、真空度１ｏ−’Ｔｏｒ
ｒ。These were stored in a vacuum heating furnace and the vacuum degree was 1o-'Tor.
r.
温度２１５”Ｃで数時間加熱すると、インジウムが溶融
し、金と合金を作りながら毛細管現象により接合面間に
侵入し、良好な気密封止が得られる。When heated at a temperature of 215"C for several hours, indium melts and enters between the joint surfaces by capillary action while forming an alloy with gold, resulting in a good hermetic seal.
前記クリアランスが６μｍ以下の場合、冷却時にロッド
レンズ４がステンレス基板１の収縮のため締め付けられ
破損しやすくなる。また２ ００ ｐｍ以上になると、
恐らくは溶融液の表面張力のため接合面間への侵入が不
十分になることによって、。If the clearance is less than 6 μm, the rod lens 4 is likely to be tightened and damaged due to contraction of the stainless steel substrate 1 during cooling. Also, when the temperature exceeds 200 pm,
This is probably due to insufficient penetration between the joint surfaces due to the surface tension of the melt.
気密封着が得られ難くなる。このような材質、形状の気
密封着は、例えば炭酸ガスレーザメスの光フアイバケー
ブルにおいて有用である。？ＦＪ２図は、本発明をこの
光フアイバケーブルのハンドピース部に適用した実施例
を示す。第３図に於て、１３は炭酸ガスレーザー伝送用
光ファイバ、１４は集光用Ｚｎ５ｅ レンズ、１６は前
記光ファイバ１３やＺｎ５ｅレンズ１４を支持するステ
ンレスホルダー、１６はガラス製ロッドレンズ、１７は
ガイド光のための光ファイバである。高エネルギ光を伝
送する光フアイバケーブルは、湿度の吸収等を防ぐため
、気密構造にすることが好ましい。It becomes difficult to obtain an airtight seal. Hermetic sealing with such a material and shape is useful, for example, in an optical fiber cable for a female carbon dioxide laser. ? Figure FJ2 shows an embodiment in which the present invention is applied to a handpiece portion of this optical fiber cable. In FIG. 3, 13 is an optical fiber for transmitting a carbon dioxide laser, 14 is a Zn5e lens for focusing, 16 is a stainless steel holder that supports the optical fiber 13 and the Zn5e lens 14, 16 is a glass rod lens, and 17 is a This is an optical fiber for guiding light. Optical fiber cables that transmit high-energy light preferably have an airtight structure in order to prevent moisture absorption and the like.
本実施例では、ガイド光を集光せしめるロッドレンズ１
６が図のように斜めに貫通した孔に配設せられるが、こ
の場合も前述の実施例で示した方法の適用により、ロッ
ドレンズ周りの良好な気密封着が得られる。In this embodiment, a rod lens 1 that focuses the guide light is used.
6 is disposed in a diagonally penetrating hole as shown in the figure, and in this case as well, by applying the method shown in the above embodiment, a good airtight seal around the rod lens can be obtained.
発明の効果
以上述べたように、本発明によれば、貫通孔に嵌合する
棒状体の周りの良好な気密封着が得られ、実用的にきわ
めて有用である。Effects of the Invention As described above, according to the present invention, good airtight sealing can be obtained around the rod-shaped body that fits into the through hole, and it is extremely useful in practice.
第１図は本発明の一実施例における気密封着方法を示す
断面図、第２図は本発明の他の実施例における気密封着
方法を示す断面図、第３図は従来のインジウムシール方
法を示す断面図である。
１・・・・・・ステンレス基材、２・・・・・・貫通孔
、３・・・・・・金コーティング膜、４・・・・・・ロ
ッドレンズアレイ、６・・・・・・金コーティング膜、
６・・・・・・インジウム。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名／−
−−ステンレス基材
Ｚ−−一貫蓮孔
３−・金コーティ〉グ瑛
４−一一ロツドレンス゛
ｆ４−−一集光用ＩｎＳｉレンズ
！５−−−ステンレスホルター
／６−−− ’ロッドレソス゛FIG. 1 is a sectional view showing an airtight sealing method in one embodiment of the present invention, FIG. 2 is a sectional view showing an airtight sealing method in another embodiment of the invention, and FIG. 3 is a conventional indium sealing method. FIG. 1...Stainless steel base material, 2...Through hole, 3...Gold coating film, 4...Rod lens array, 6... gold coating film,
6...Indium. Name of agent: Patent attorney Toshio Nakao and 1 other person/-
--Stainless steel base material Z--Consistent lotus hole 3--Gold coating>Gue 4-11 rod lens f4--1 InSi lens for focusing! 5---Stainless Steel Halter/6---'Rod Resus''
Claims (1)
する棒状体の側面にも金をコーティングしたのち、両者
を嵌合せしめ、嵌合部近傍にインジウムを押し付け密着
させた状態で、これらを真空中で加熱、インジウムと金
の合金を形成し前記貫通孔を密封することを特徴とする
気密封着方法。The inner surface of the through hole is coated with gold, and the side surface of the rod-shaped body that fits into the through hole is also coated with gold.Then, the two are fitted together, and indium is pressed near the fitting part to bring them into close contact. An airtight sealing method characterized by heating in a vacuum to form an alloy of indium and gold to seal the through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2310588A JPH01197703A (en) | 1988-02-02 | 1988-02-02 | Hermetic sealing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2310588A JPH01197703A (en) | 1988-02-02 | 1988-02-02 | Hermetic sealing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01197703A true JPH01197703A (en) | 1989-08-09 |
Family
ID=12101183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2310588A Pending JPH01197703A (en) | 1988-02-02 | 1988-02-02 | Hermetic sealing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01197703A (en) |
-
1988
- 1988-02-02 JP JP2310588A patent/JPH01197703A/en active Pending
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