JPH0119225B2 - - Google Patents

Info

Publication number
JPH0119225B2
JPH0119225B2 JP54000672A JP67279A JPH0119225B2 JP H0119225 B2 JPH0119225 B2 JP H0119225B2 JP 54000672 A JP54000672 A JP 54000672A JP 67279 A JP67279 A JP 67279A JP H0119225 B2 JPH0119225 B2 JP H0119225B2
Authority
JP
Japan
Prior art keywords
magnification
brightness
data
excitation current
upper limit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54000672A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5593643A (en
Inventor
Toshuki Oohashi
Masashi Kamimura
Moriki Kubozoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP67279A priority Critical patent/JPS5593643A/ja
Publication of JPS5593643A publication Critical patent/JPS5593643A/ja
Publication of JPH0119225B2 publication Critical patent/JPH0119225B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP67279A 1979-01-10 1979-01-10 Brightness controller in electron microscope Granted JPS5593643A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP67279A JPS5593643A (en) 1979-01-10 1979-01-10 Brightness controller in electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP67279A JPS5593643A (en) 1979-01-10 1979-01-10 Brightness controller in electron microscope

Publications (2)

Publication Number Publication Date
JPS5593643A JPS5593643A (en) 1980-07-16
JPH0119225B2 true JPH0119225B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-11

Family

ID=11480225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP67279A Granted JPS5593643A (en) 1979-01-10 1979-01-10 Brightness controller in electron microscope

Country Status (1)

Country Link
JP (1) JPS5593643A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866244A (ja) * 1981-10-16 1983-04-20 Jeol Ltd 電子顕微鏡
JPS62110241A (ja) * 1985-11-07 1987-05-21 Univ Osaka 電子顕微鏡のプロ−ブ電流制御方法及び装置

Also Published As

Publication number Publication date
JPS5593643A (en) 1980-07-16

Similar Documents

Publication Publication Date Title
JPS60140641A (ja) 電子顕微鏡の像補正制御変数を光学的に調整する方法
JPH03152846A (ja) 電子顕微鏡のオートフォーカス方法
US4547669A (en) Electron beam scanning device
JPH0119225B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
US4851674A (en) Electron beam control apparatus for use in transmission electron microscope
JP3524776B2 (ja) 走査電子顕微鏡
JPH06236743A (ja) 電子線装置のプローブ電流設定方式
US5134289A (en) Field emission electron device which produces a constant beam current
JPH03134944A (ja) 電子線装置
JPS5854463B2 (ja) 電子プロ−ブ装置
JP4229610B2 (ja) 荷電粒子ビーム装置、及びその制御方法
JP4041260B2 (ja) 荷電粒子ビーム装置及び荷電粒子ビーム装置の制御方法
JP3123861B2 (ja) 電子線装置
JP2705056B2 (ja) 自動焦点装置
JPH051585B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0370340B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH03289036A (ja) 電子顕微鏡の信号検出装置
JPH073772B2 (ja) 電子ビ−ム収束装置
JP2948242B2 (ja) 収束電子線回析装置
JPH0562629A (ja) 電子顕微鏡におけるフオーカス調整方式
JPS62110241A (ja) 電子顕微鏡のプロ−ブ電流制御方法及び装置
JPH0756787B2 (ja) 走査電子顕微鏡の自動焦点制御装置
JPH04522Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS589545B2 (ja) デンシケンビキヨウニオケルタイブツレンズノ ヒテンシユウサホセイホウホウ
JPS5914222B2 (ja) 走査電子顕微鏡等用倍率制御装置