JPH01192204A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPH01192204A JPH01192204A JP63017737A JP1773788A JPH01192204A JP H01192204 A JPH01192204 A JP H01192204A JP 63017737 A JP63017737 A JP 63017737A JP 1773788 A JP1773788 A JP 1773788A JP H01192204 A JPH01192204 A JP H01192204A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- piezoelectric
- width
- rate
- change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010355 oscillation Effects 0.000 claims description 19
- 239000013078 crystal Substances 0.000 abstract description 12
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract 5
- 239000000463 material Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B18/00—Use of agglomerated or waste materials or refuse as fillers for mortars, concrete or artificial stone; Treatment of agglomerated or waste materials or refuse, specially adapted to enhance their filling properties in mortars, concrete or artificial stone
- C04B18/04—Waste materials; Refuse
- C04B18/0481—Other specific industrial waste materials not provided for elsewhere in C04B18/00
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Environmental & Geological Engineering (AREA)
- Civil Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
Abstract
Description
【発明の詳細な説明】
〔概要〕
圧電振動子の構成、特に圧電体の対向主面に形成した電
極に関し、
発振周波数の温度特性の向上を目的とし、許容使用温度
範囲で発振周波数の変化率の温度特性に極小点のできる
圧電体の対向主面に形成した電極が、長さ方向の中間部
に該温度範囲で複数の極小点を形成せしめる狭幅部の設
けて構成する。[Detailed Description of the Invention] [Summary] With regard to the structure of a piezoelectric vibrator, particularly regarding the electrodes formed on the opposing main surfaces of the piezoelectric body, the purpose of this invention is to improve the temperature characteristics of the oscillation frequency, and to improve the rate of change of the oscillation frequency within the allowable operating temperature range. The electrodes formed on the opposing main surfaces of the piezoelectric material, which have a minimum point in the temperature characteristic of , are configured such that a narrow portion is provided in the middle part in the longitudinal direction to form a plurality of minimum points in the temperature range.
本発明は圧電振動予め構成、特に所定の使用温度範囲で
発振周波数の変化率を低減させる構成上の改良に関する
。The present invention relates to piezoelectric vibration preconfigurations, and in particular to improvements in the configuration to reduce the rate of change of the oscillation frequency over a given operating temperature range.
振動子の圧電体には、水晶やセラミックおよびタンタル
酸リチウム、ニオブ酸リチウム等が利用されており、例
えば−ｌＯ℃〜＋６０℃の如く決められた使用温度範囲
で発振周波数の変化率（発振周波数の温度特性）Δｆ／
ｆは、±２００ｐｐｍの如き所定値に納まるように製造
されている。The piezoelectric material of the vibrator is made of crystal, ceramic, lithium tantalate, lithium niobate, etc., and the rate of change of the oscillation frequency (oscillation frequency temperature characteristics) Δf/
f is manufactured to fall within a predetermined value such as ±200 ppm.
かかる温度特性は使用する圧電体の材質および結晶方位
、外付はコンデンサの容量等によって変化し、一定幅の
電極を形成し共振周波数の変化率特性が使用温度範囲に
１つの極小点を有する従来の圧電素子、即ち水晶やセラ
ミックおよびタンタル酸リチウムを圧電体に使用した圧
電振動子は、該極小点が該温度範囲のほぼ中央に位置す
るようにしていた。Such temperature characteristics vary depending on the material and crystal orientation of the piezoelectric material used, the capacitance of the external capacitor, etc., and conventional methods in which electrodes of a constant width are formed and the rate of change characteristic of the resonant frequency has one minimum point within the operating temperature range. In the piezoelectric element, ie, the piezoelectric vibrator using quartz crystal, ceramic, or lithium tantalate as the piezoelectric material, the minimum point is located approximately at the center of the temperature range.
第３図は従来の圧電素子を示す斜視図（イ）とその圧電
体に形成した電極の対向長さと発振周波数の変化率との
関係を示す図（０）であり、圧電素子１はリチウム酸タ
ンタレート等にてなる圧電体２の対向主面のそれぞれに
、圧電体２の全幅に渡る電極３または４を形成してなり
、電極３．４から外部接続用の刀−ド端子３ａまたは４
ａが圧電体２の端部に導出されている。FIG. 3 is a perspective view (a) showing a conventional piezoelectric element and a diagram (0) showing the relationship between the opposing length of electrodes formed on the piezoelectric body and the rate of change in oscillation frequency. An electrode 3 or 4 extending over the entire width of the piezoelectric body 2 is formed on each of the opposing main surfaces of the piezoelectric body 2 made of tantalate or the like, and a sword terminal 3a or 4 for external connection is formed from the electrode 3.4.
a is led out to the end of the piezoelectric body 2.
かかる圧電素子１において、圧電体２の厚さをＨとし、
電極３と４の対向長さを２としたとき、圧電素子１の発
振周波数の変化率Δｆ ／ ｆ （ｐｐｍ）は、ｌ／Ｈ
によって変化し、縦軸を発振周波数の変化率Δｆ ／
ｆ （ｐｐｍ） 、横軸を温度Ｔ （℃）とした第３図
（Ｅｌ）において、実線で示す曲線はＪ／Ｈが３．６で
ある圧電素子１の周波数温度特性、−点鎖線で示す曲線
はｌ／Ｈが３．２である圧電素子１の周波数温度特性、
二点鎖線で示す曲線はＡ／Ｈが５．２である圧電素子１
の周波数温度特性である。In such a piezoelectric element 1, the thickness of the piezoelectric body 2 is H,
When the opposing length of electrodes 3 and 4 is 2, the rate of change Δf / f (ppm) of the oscillation frequency of piezoelectric element 1 is l/H
The vertical axis represents the rate of change in oscillation frequency Δf/
f (ppm), and the horizontal axis is the temperature T (°C). In Fig. 3 (El), the curve shown by the solid line is the frequency-temperature characteristic of the piezoelectric element 1 with J/H of 3.6, and the -dotted chain line shows the curve shown by the solid line. The curve shows the frequency temperature characteristics of piezoelectric element 1 with l/H of 3.2,
The curve shown by the two-dot chain line is the piezoelectric element 1 whose A/H is 5.2.
is the frequency temperature characteristic of
そこで、従来の圧電素子１はその使用温度範囲の中央、
例えば使用温度範囲が一１Ｏ℃〜＋６０℃であるときは
＋２５℃に周波数温度特性の極小点が位置するようにさ
れていたが、圧電素子１の周波数温度特性は圧電体２の
結晶方位によっても変化する。Therefore, the conventional piezoelectric element 1 is located at the center of its operating temperature range.
For example, when the operating temperature range is 110°C to +60°C, the minimum point of the frequency-temperature characteristic is located at +25°C, but the frequency-temperature characteristic of the piezoelectric element 1 also depends on the crystal orientation of the piezoelectric body 2. Change.
第４図はクンタル酸リチウムの単結晶よりなる圧電体の
結晶方位と発振周波数の温度特性との示す図であり、縦
軸を発振周波数の変化率Δｆ／ｆ（ｐｐｍ） 、横軸を
温度Ｔ （’Ｃ）とした第４図において、実線で示す曲
線はＸ軸まわりの回転角度θが０度である圧電体の周波
数の温度特性、−点鎖線で示す曲線はＸ軸まわりの回転
角度θが一１度である圧電体の周波数の温度特性、二点
鎖線で示す曲線はＸ軸まわりの回転角度θが＋１度であ
る圧電体の周波数の温度特性であり、−１０℃〜＋６０
℃の使用温度範囲でθ−０度の圧電素子の周波数変化率
Δｆ／ｆはＯ〜８０ｐｐｍであるのに対し、θ−＋１度
およびθ＝−１度である圧電素子のそれらは一２０〜＋
１３５ｐｐｍ、 −１０〜＋１３５ｐｐｍ程度である。Figure 4 is a diagram showing the crystal orientation of a piezoelectric material made of a single crystal of lithium quantalate and the temperature characteristics of the oscillation frequency, where the vertical axis represents the rate of change in the oscillation frequency Δf/f (ppm), and the horizontal axis represents the temperature T. In Fig. 4 ('C), the curve shown by the solid line is the temperature characteristic of the frequency of the piezoelectric material when the rotation angle θ around the X-axis is 0 degrees, and the curve shown by the -dotted line is the rotation angle θ around the The curve shown by the two-dot chain line is the temperature characteristic of the frequency of the piezoelectric material whose rotation angle θ around the
In the operating temperature range of °C, the frequency change rate Δf/f of the piezoelectric element at θ-0 degrees is O~80 ppm, whereas that of the piezoelectric elements at θ-+1 degrees and θ=-1 degrees is -20~80 ppm. +
135 ppm, about -10 to +135 ppm.
以上説明したように従来の圧電振動子は発振周波数の変
化率の極小点が１つであり、該極小点は使用温度範囲の
ほぼ中央に位置するように、圧電体の結晶方位、対向電
極の対向長さ等を設定していたが、該結晶方位は単結晶
からの切り出しによって決まるものであり、対向電極の
対向長さは発振周波数に係わるため、温度特性の調整が
極めて困難であるという問題点があった。As explained above, conventional piezoelectric vibrators have one minimum point in the rate of change of oscillation frequency, and the crystal orientation of the piezoelectric material and the counter electrode are adjusted so that the minimum point is located approximately in the center of the operating temperature range. However, since the crystal orientation is determined by cutting from a single crystal, and the opposing length of the opposing electrodes is related to the oscillation frequency, it is extremely difficult to adjust the temperature characteristics. There was a point.
上記問題点の除去を目的とした本発明の圧電振動子は、
第１図によれば、−１０℃〜＋６０℃の許容使用温度範
囲で発振周波数の変化率の温度特性に極小点のできる圧
電体１２の対向主面に形成した電極１３．１４が、長さ
方向の中間部に該温度範囲で複数の極小点を形成せしめ
る狭幅部１３ｄの設けてなることを特徴とする。The piezoelectric vibrator of the present invention aims to eliminate the above problems,
According to FIG. 1, the electrodes 13 and 14 formed on the opposing main surfaces of the piezoelectric body 12, which have a minimum point in the temperature characteristic of the rate of change of the oscillation frequency in the allowable operating temperature range of -10°C to +60°C, are It is characterized in that a narrow portion 13d is provided in the middle of the direction to form a plurality of minimum points in the temperature range.
本発明によれば、圧電体１２の対向主面に形成した電極
の長さ方向の中間部に、許容された使用温度範囲で発振
周波数の変化率の極小点を複数にする狭幅部を設けたこ
とにより、該温度範囲における該変化率の幅は従来より
も狭められるようになる。According to the present invention, a narrow portion is provided in the longitudinally intermediate portion of the electrode formed on the opposing main surface of the piezoelectric body 12 to provide a plurality of minimum points of the rate of change of the oscillation frequency within the allowed operating temperature range. As a result, the width of the rate of change in the temperature range becomes narrower than before.
以下に、図面を用いて本発明の実施例による圧電振動子
を説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Piezoelectric vibrators according to embodiments of the present invention will be described below with reference to the drawings.
第１図は本発明の一実施例による圧電素子を示す斜視図
（イ）と該圧電素子の周波数温度特性を示す図（Ｕ）、
第２図は本発明の他の実施例による圧電素子を示す斜視
図（イ）と該圧電素子の周波数温度特性を示す図（ＩＩ
）である。FIG. 1 is a perspective view (A) showing a piezoelectric element according to an embodiment of the present invention, a diagram (U) showing frequency temperature characteristics of the piezoelectric element,
FIG. 2 is a perspective view (A) showing a piezoelectric element according to another embodiment of the present invention, and a diagram (II) showing the frequency-temperature characteristics of the piezoelectric element.
).
第１図（イ）において、圧電振動子１１は発振周波−数
の変化率特性が使用温度範囲で極小点を形成する圧電体
（例えばタンタル酸リチウムの単結晶より切り出した圧
電体）１２の対向主面に電極１３および１４を形成し、
電極１３の長さ方向の中間部にレーザトリミングによる
各一対のＬ字形の溝１５と直線溝１６を形成すると共に
、電極１４に溝１５．１６にそれぞれ相当する溝（図、
示されず）を形成してなる。In FIG. 1(a), a piezoelectric vibrator 11 is placed opposite a piezoelectric material 12 (for example, a piezoelectric material cut from a single crystal of lithium tantalate) whose oscillation frequency-frequency change rate characteristic forms a minimum point in the operating temperature range. Forming electrodes 13 and 14 on the main surface,
A pair of L-shaped grooves 15 and a straight groove 16 are formed by laser trimming in the middle part of the electrode 13 in the length direction, and grooves corresponding to the grooves 15 and 16 are formed in the electrode 14 (Fig.
(not shown).
リード端子１３ａを具えた電極１３に形成された溝１５
と１６は、電極１３の一部分を電極１３から切り離し、
電極１３が圧電体１２の全幅に渡る全幅部１３ｂ、 １
３ｃと、圧電体１２より狭幅の狭幅部１３ｄとで構成さ
れるようにすると共に、電極１４に形成され図示されな
い前記溝によって、リード端子１４ａを具えた電極１４
は、全幅部１３ｂ、 １３ｃおよび狭幅部１３ｄに相当
する全幅部と狭幅部とで構成されるようになる。 、
このような圧電体１１の発振周波数の変化率の温度特性
は、第１図（υ）に示すように、縦軸を発振周波数の変
化率Δｆ／ｆ（ρｐａｄ） 、横軸を温度Ｔ（’Ｃ）と
したとき、測定値をプロットし該プロットを妥当な曲線
で結ぶと、該曲線は一１０℃〜＋６０℃の使用温度範囲
で２つの極小点を形成するようになり、その周波数変化
率Δｆ／ｆは使用温度範囲でＯ〜−７０ｐｐｍの範囲に
納まるようになる。Groove 15 formed in electrode 13 with lead terminal 13a
and 16 separate a part of the electrode 13 from the electrode 13,
A full width portion 13b where the electrode 13 spans the entire width of the piezoelectric body 12, 1
3c and a narrow portion 13d narrower than the piezoelectric body 12, and the groove formed in the electrode 14 (not shown) allows the electrode 14 to have a lead terminal 14a.
is composed of a full width portion and a narrow portion corresponding to the full width portions 13b and 13c and the narrow width portion 13d. ,
The temperature characteristics of the rate of change in the oscillation frequency of the piezoelectric body 11 are as shown in FIG. In the case of C), if the measured values are plotted and the plots are connected by a reasonable curve, the curve will form two minimum points in the operating temperature range of -10℃ to +60℃, and the rate of frequency change will be Δf/f falls within the range of 0 to −70 ppm within the operating temperature range.
第１図（イ）と共通部分に同一符号を使用した第２図（
イ）において、圧電振動子２１は、圧電体１２の対向主
面にホトエツチング技術を利用した電極２２と２３を形
成し、電極２２．２３からリード端子２２ａまたは２３
ａが導出されてなる。Figure 2 (A) uses the same reference numerals for parts common to Figure 1 (A).
In a), the piezoelectric vibrator 21 has electrodes 22 and 23 formed on the opposing main surfaces of the piezoelectric body 12 using photoetching technology, and leads from the electrodes 22 and 23 to the lead terminals 22a or 23.
a is derived.
圧電体１２の全幅に形成した電極２２は、その長さ方向
の中間部の２個所に圧電体１２０幅方向に整列する複数
個（図は４個）の透孔２４を形成したことにより、圧電
体１２の全幅を覆う３個所の全幅部２２ｂと、透孔２４
によって実電極幅が狭くなる２個所の狭幅部２２ｃとで
構成される。The electrode 22 formed over the entire width of the piezoelectric body 12 has a plurality of (four holes in the figure) through holes 24 arranged in the width direction of the piezoelectric body 120 at two locations in the middle part in the length direction. Three full width portions 22b covering the entire width of the body 12 and a through hole 24
It is composed of two narrow width portions 22c where the actual electrode width is narrowed.
他方、圧電体１２の下面に形成し図示されない電極２３
にも透孔２４に相当する透孔が設けられ、該透孔によっ
て全幅部２２ｂおよび狭幅部２２ｃに相当する全幅部と
狭幅部とが電極２３に形成されるようになっている。On the other hand, an electrode 23 (not shown) formed on the lower surface of the piezoelectric body 12
A through hole corresponding to the through hole 24 is provided in the electrode 23, and a full width portion and a narrow portion corresponding to the full width portion 22b and the narrow width portion 22c are formed in the electrode 23 by the through hole.
このような圧電体２１の発振周波数の変化率の温度特性
は、第１図（Ｕ）に示すように、縦軸を発振周波数の変
化率Δｆ ／ ｆ （ｐｐｍ）とし、横軸を温度Ｔ （
’Ｃ）としたとき、−１０℃〜＋６０℃の使用温度範囲
で３つの極小点を形成するようになり、使用温度範囲に
おける周波数変化率Δｆ／ｆは、５０ｐｐｍ程度の範囲
に納まるようになる。The temperature characteristics of the rate of change in the oscillation frequency of the piezoelectric body 21 are as shown in FIG.
'C), three minimum points are formed in the operating temperature range of -10°C to +60°C, and the frequency change rate Δf/f in the operating temperature range is within the range of about 50 ppm. .
なお、本発明によって電極の一部に狭幅部を形成すると
、そのことで共振周波数が低下する。そのため、本発明
による電極がかかる変化を予め予測し、狭幅部の形成前
の共振周波数は所期値より適当に高い共振周波数となる
ように形成する。Note that when a narrow portion is formed in a part of the electrode according to the present invention, the resonance frequency is thereby lowered. Therefore, the electrode according to the present invention is formed so that such changes are predicted in advance and the resonant frequency before the formation of the narrow portion is appropriately higher than the desired value.
以上説明したように本発明によれば、圧電体１２の対向
主面に形成した電極の長さ方向の中間部に、許容された
使用温度範囲で発振周波数の変化率の温度特性に複数の
極小点を形成せしめる狭幅部を設け、該温度範囲におけ
る該変化率の幅は従来よりも狭めたことにより、圧電振
動子の温度特性は向上される。As explained above, according to the present invention, a plurality of local peaks are formed in the longitudinally intermediate portion of the electrodes formed on the opposing main surfaces of the piezoelectric body 12 in the temperature characteristic of the rate of change of the oscillation frequency within the permissible operating temperature range. The temperature characteristics of the piezoelectric vibrator are improved by providing a narrow portion forming a point and narrowing the width of the rate of change in the temperature range compared to the conventional one.
第１図は本発明の一実施例による圧電素子とその温度特
性、
第２図は本発明の他の実施例による圧電素子とその温度
特性、
第３図は従来の圧電素子とその温度特性、第４図は圧電
体の結晶方位と温度特性、を示す。
図中において、
１１．２１は圧電振動子、
１２は圧電体、
１３．１４．２２．２３は電極、
１３ｂ、 １３ｃ、 ２２ｂは全幅部、１３ｄ、２２ｃ
は狭幅部、
１５、１６はトリミング溝、
２４は透孔、
（イ）
第 １２
第 ２ 図
（ＰＰＴｒＬ）
（ロラ
従来力圧電粛テと′ｆめ遍座符１１
第３ 図
（Ｐｒ辺）
圧電体０結＾方位とｊ肪特ａ
第４ 図Fig. 1 shows a piezoelectric element according to one embodiment of the present invention and its temperature characteristics, Fig. 2 shows a piezoelectric element according to another embodiment of the invention and its temperature characteristics, and Fig. 3 shows a conventional piezoelectric element and its temperature characteristics. FIG. 4 shows the crystal orientation and temperature characteristics of the piezoelectric material. In the figure, 11.21 is a piezoelectric vibrator, 12 is a piezoelectric body, 13.14.22.23 is an electrode, 13b, 13c, 22b is a full width part, 13d, 22c
15 and 16 are the narrow width parts, 15 and 16 are the trimming grooves, and 24 is the through hole. Piezoelectric body 0 direction and characteristic a Fig. 4
Claims (1)
小点のできる圧電体（１２）の対向主面に形成した電極
（１３、１４、２２、２３）が、長さ方向の中間部に該
温度範囲で複数の極小点を形成せしめる狭幅部（１３ｄ
、２２ｃ）の設けてなることを特徴とする圧電振動子。The electrodes (13, 14, 22, 23) formed on the opposing main surfaces of the piezoelectric body (12), which have a minimum point in the temperature characteristic of the rate of change of the oscillation frequency within the allowable operating temperature range, are located at the intermediate portion in the longitudinal direction. A narrow part (13d) that forms multiple minimum points in the temperature range
, 22c).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1773788A JPH0748627B2 (en) | 1988-01-28 | 1988-01-28 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1773788A JPH0748627B2 (en) | 1988-01-28 | 1988-01-28 | Piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01192204A true JPH01192204A (en) | 1989-08-02 |
| JPH0748627B2 JPH0748627B2 (en) | 1995-05-24 |
Family
ID=11952060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1773788A Expired - Lifetime JPH0748627B2 (en) | 1988-01-28 | 1988-01-28 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0748627B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0492824U (en) * | 1990-12-28 | 1992-08-12 |
-
1988
- 1988-01-28 JP JP1773788A patent/JPH0748627B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0492824U (en) * | 1990-12-28 | 1992-08-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0748627B2 (en) | 1995-05-24 |
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