JPH01189006A - Manufacture of magnetic head - Google Patents

Manufacture of magnetic head

Info

Publication number
JPH01189006A
JPH01189006A JP1298688A JP1298688A JPH01189006A JP H01189006 A JPH01189006 A JP H01189006A JP 1298688 A JP1298688 A JP 1298688A JP 1298688 A JP1298688 A JP 1298688A JP H01189006 A JPH01189006 A JP H01189006A
Authority
JP
Japan
Prior art keywords
magnetic
thin film
ferromagnetic metal
groove
core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1298688A
Other languages
Japanese (ja)
Inventor
Noriaki Mukaide
徳章 向出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP1298688A priority Critical patent/JPH01189006A/en
Publication of JPH01189006A publication Critical patent/JPH01189006A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/187Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/1278Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To prevent the formation of a dummy gap, to improve a reproducing sound quality, and simultaneously, to execute a vertical recording by vacuum- forming a ferromagnetic thin metal film on the junction predetermined surface of a magnetic core substrate. CONSTITUTION:The junction predetermined surface of a long-scaled core block 8, in which a groove 10 for a junction, a groove 11 for a winding and a track groove 15 are cut-formed, is subjected to specular finishing, and a thin film is formed of a ferromagnetic metal material 16 such as a 'Sendust(R)' on the surface by means of a vacuum technique. An opposite block to be formed in the same way is glass-welded, and it is formed into a prescribed block for a head. As a result, since a glass layer with a proper thickness is provided between the ferromagnetic metal oxide of a ferrite and the ferromagnetic metal thin film 16, the dummy gap cannot be formed, and the reproduction with a good quality can be executed. When the thin film 16 is made into <=1mum, a magnetic flux B is generated in a vertical direction, and the vertical magnetic recording can be executed.

Description

【発明の詳細な説明】 の1 この発明は、高保磁力媒体を使用するVTR。[Detailed description of the invention] No. 1 This invention is a VTR that uses a high coercive force medium.

R−DAT、FDD等の装置に用いる磁気ヘッドのコア
加工技術に関し、特に強磁性金属酸化物材料と、強磁性
金属材料との複合磁性材料からなる磁気へラドコア製造
に貢献するものである。
The present invention relates to core processing technology for magnetic heads used in devices such as R-DATs and FDDs, and particularly contributes to the production of magnetic helad cores made of composite magnetic materials of ferromagnetic metal oxide materials and ferromagnetic metal materials.

従】E目支術− 磁気記録媒体への情報の記録及び磁気記録媒体からの情
報の再生は、近年の高密度記録の実現に伴って、上記磁
気記録媒体として高保磁力を有するメタル媒体などが使
用されている。一方、このような高密度記録に使用され
る磁気ヘッドとしては、M I G (Metal i
n Gap) ヘ−/ドなるものがある。このMIGヘ
ッドは例えばrlEEETRANSACTIONS O
N MACNETICS MAG−18,P114G〜
!!481982J等1こ詳述されている。
[Sub] E-item - Recording of information on magnetic recording media and reproducing information from magnetic recording media has become more and more difficult with the recent realization of high-density recording. It is used. On the other hand, as a magnetic head used for such high-density recording, MIG (Metal i
n Gap) There is something called H/D. This MIG head is for example rlEEEETRANSACTIONS O
N MACNETICS MAG-18, P114G~
! ! 481982J etc. are described in detail.

そこで、VTR等に使用されるMIGヘッドの従来構造
を第4図乃至第8図を参照しながら説明する。磁気ギャ
ップ1の対向面を含む周辺部のみに、薄膜のセンダスト
合金膜2,2を付着させたフェライト単結晶あるいは多
結晶コア3,3をガラス4,4にて溶着突き合わせした
TSS (Tilted 5endust Sputt
erfng )型コア5がVTR等の磁気記録・再生装
置に使用されている。そして、TSS型コアを紹介した
文献としては、例えば、特開昭59−142716.特
開昭GO−182507,特開昭H−234209等が
あり、平行型コアでは、I EEETRNASACTI
ONS ON MAGNETIC:S MAG−18,
P114Ei〜1148゜1982等がある。
Therefore, the conventional structure of a MIG head used in a VTR or the like will be explained with reference to FIGS. 4 to 8. TSS (Tilted 5end Sput) in which ferrite single crystal or polycrystalline cores 3, 3 to which thin sendust alloy films 2, 2 are adhered are welded and butted together with glasses 4, 4 only on the periphery including the opposing surfaces of the magnetic gap 1.
erfng ) type core 5 is used in magnetic recording/reproducing devices such as VTRs. Examples of documents introducing the TSS type core include JP-A-59-142716. There are JP-A GO-182507, JP-A-H-234209, etc., and for parallel cores, IEEETRNASACTI
ONS ON MAGNETIC:S MAG-18,
There are P114Ei-1148°1982, etc.

B イ    ゛   ; ところで、このようなTSS型コアを製作する場合には
、一種のセラミックであり、硬度が相当太き((約58
0Hv )脆い単結晶あるいは多結晶フェライトと、か
なりの高い靭性を有し硬いセンダスト合金と、接着保護
材としてのガラスという全く異質な材料を集積したコア
であるため、ダイサー等にて切削加工する際に、センダ
スト薄膜やガラスにマイクロクラックを生じたり、フェ
ライトにチッピングを生じやすいという問題点があった
By the way, when manufacturing such a TSS type core, it is made of a type of ceramic and has a considerably hard hardness ((approximately 58
0Hv) The core is made up of completely different materials: brittle single-crystal or polycrystalline ferrite, hard sendust alloy with considerable toughness, and glass as an adhesion protection material, so when cutting with a dicer etc. Another problem is that it tends to cause microcracks in the sendust thin film and glass, and it tends to cause chipping in ferrite.

さらに、このようなTSS型コアを得るために、コア半
体を形成するには、第6図のようにセンダスト薄膜2の
付着形成傾斜面7の角度θを大きくして成膜量を少な(
してしかも、所望のトラ・ツク幅Twを十分広く形成し
ようとすると、研磨接合面の研磨代寸法δの精度を著し
く高める必要が生じ結局製作が難しい矛盾がある。
Furthermore, in order to form the core halves in order to obtain such a TSS type core, the angle θ of the inclined surface 7 on which the sendust thin film 2 is attached is increased to reduce the amount of film deposited (
Moreover, in order to make the desired track width Tw sufficiently wide, it is necessary to significantly increase the precision of the polishing allowance dimension δ of the polished joint surface, which results in a contradiction that makes manufacturing difficult.

また、TSS型コア5と比較して製作が容易な平行型コ
ア6では、センダスト合金膜2,2とフェライト単結晶
あるいは多結晶コア3,3との界面近傍部が、磁気的に
劣化して非磁性となり易く、この界面が磁気ギヤ・ノブ
1と平行となっているため、疑似ギャップを形成して十
分な特性が得られない。この疑似ギャップについての文
献には、日本応用磁気学会誌Vo1.11.No、2,
1987 P105〜108等がある。
In addition, in the parallel type core 6, which is easier to manufacture than the TSS type core 5, the area near the interface between the sendust alloy films 2, 2 and the ferrite single crystal or polycrystalline cores 3, 3 is magnetically deteriorated. Since it tends to become non-magnetic and this interface is parallel to the magnetic gear knob 1, a pseudo gap is formed and sufficient characteristics cannot be obtained. Documents regarding this pseudo gap include Journal of the Japan Society of Applied Magnetics Vol. 1.11. No, 2,
1987 P105-108 etc.

:、I    ゛    −の  − 本発明は前記問題点に鑑みて提案されたもので、磁気コ
アを形成する強磁性金属酸化物の長尺な基板の接合予定
面端部の長平方向に沿って凹溝を形成する工程と、上記
基板の凹溝内部にガラスモールドを施す工程と、上記基
板の短手方向に沿って、所定のトラック幅を残して複数
のトラックを切削形成する工程と、上記基板の接合予定
面を鏡面加工する工程と、上記基板の接合予定面に強磁
性金属薄膜を真空薄膜形成せしめる工程とを含む方法で
ある。
The present invention has been proposed in view of the above-mentioned problems, and is made by forming a recess along the longitudinal direction of the end of the surface to be bonded of a long substrate of ferromagnetic metal oxide forming a magnetic core. a step of forming a groove; a step of applying a glass mold inside the concave groove of the substrate; a step of cutting and forming a plurality of tracks along the transverse direction of the substrate, leaving a predetermined track width; This method includes the steps of mirror-finishing the surface to be bonded of the substrate, and forming a thin ferromagnetic metal film in vacuum on the surface of the substrate to be bonded.

1皿 この発明によると、上記工程を施すことにより、強磁性
金属酸化物と強磁性金属薄膜との間に適当な厚さのガラ
スの層が設けることができ、いわゆる疑似ギャップが形
成されず、媒体への記録及び媒体からの再生時に不都合
なノイズを生じることが防止できる。また、第2図に示
すように、強磁性金属薄膜の膜厚を極力薄く(1μm以
下)することによって、磁束Bが記録媒体に対して垂直
方向に生じやすくなり、垂直磁気記録媒体を磁化するの
が容易になり、垂直磁気記録が可能となる。
1 Dish According to the present invention, by carrying out the above steps, a glass layer of an appropriate thickness can be provided between the ferromagnetic metal oxide and the ferromagnetic metal thin film, and a so-called pseudo gap is not formed. It is possible to prevent inconvenient noise from occurring during recording to and reproduction from the medium. Furthermore, as shown in Figure 2, by making the thickness of the ferromagnetic metal thin film as thin as possible (1 μm or less), magnetic flux B is more likely to be generated perpendicularly to the recording medium, magnetizing the perpendicular magnetic recording medium. This makes perpendicular magnetic recording possible.

実」1例− 以下、本発明の一実施例を図面に基づいて詳細に説明す
る。
Practical Example - Hereinafter, one embodiment of the present invention will be described in detail based on the drawings.

まず、第9図に示すような長尺なフェライトコアブロッ
ク8,9を用意し、第10図のように長尺第1コアブロ
ツク8の内側面にその長手方向に沿って接合部用溝10
を、外側面に巻線部用溝11を切削加工し、さらに本発
明の特徴である凹溝12を長尺第1コアプロ・ツク8の
内側面のギャップ形成予定部分に、その長手方向に沿っ
て切削加工する。また、長尺第2コアプロ、ツク9の内
外側面にその長平方向に沿って巻線部用溝13a。
First, long ferrite core blocks 8 and 9 as shown in FIG. 9 are prepared, and as shown in FIG.
A groove 11 for the winding portion is cut on the outer surface, and a concave groove 12, which is a feature of the present invention, is cut along the longitudinal direction of the inner surface of the elongated first core pro 8 in the part where the gap is to be formed. Cutting is performed. Further, a groove 13a for the winding portion is formed on the inner and outer surfaces of the elongated second core prong 9 along the elongated direction.

13bを切削加工する。13b is cut.

次に、本発明の特徴である第11図のように、上記長尺
第1コアブロツクの凹溝12に高融点ガラス14を充填
し、更に第12図のように上記長尺第1.第2コアブロ
ック8,9の内方工・ンヂ部に短手方向に沿って所定の
トラ、ツク幅を残して複数のトラック溝15,15.・
・・を切削形成する。
Next, as shown in FIG. 11, which is a feature of the present invention, the groove 12 of the first long core block is filled with high melting point glass 14, and further, as shown in FIG. A plurality of track grooves 15,15.・
... is formed by cutting.

そして、第13図のように上記長尺第1.第2フアブロ
ック8,9の接合予定面である内側面Mを−鏡面加工し
て、第14図のように上記長尺第1コアブロツク8の接
合予定面のギャップ形成予定部分にセンダスト、アモル
ファス合金、あるいはパーマロイなどの強磁性金属材料
16を被着形成する。
Then, as shown in FIG. The inner surfaces M, which are the surfaces to be joined, of the second fabric blocks 8 and 9 are mirror-finished, and as shown in FIG. Alternatively, a ferromagnetic metal material 16 such as permalloy is deposited.

その後、上記長尺第1.第2コアブロツク8゜9の接合
予定面である内側面上部近傍に5io2等の非磁性薄膜
(図示せず)を被着形成し、さらに、第15図に示すよ
うに上記長尺第1.第2コアブロック8,9の内側面同
士を衝合させて、低融点ガラス14aにて、加熱・溶着
し一体化してコアブロック17を得る。ただし、この加
熱・溶着の際、高融点ガラス14が溶解しない温度で一
体化できる低融点ガラスを使用する必要があることは言
うまでもない。そして第1θ図に示すように上記−磁化
されたコアブロック17の頂端面を所定のギャップデプ
スになるように曲面研磨加工し、更に、上記コアブロッ
ク17を一定の厚さ毎にスライスしてコアチップ18を
得る。その後、上記コアチップ18に巻線作業を施して
第1図に示す磁気ヘッド19が製造される。
After that, the long length 1. A non-magnetic thin film (not shown) such as 5io2 is deposited near the upper part of the inner surface of the second core block 8.9, which is the surface to be joined, and further, as shown in FIG. The inner surfaces of the second core blocks 8 and 9 are brought into contact with each other, and the core block 17 is obtained by heating and welding them together using the low melting point glass 14a. However, it goes without saying that during this heating and welding, it is necessary to use a low melting point glass that can be integrated at a temperature at which the high melting point glass 14 does not melt. Then, as shown in FIG. 1θ, the top end surface of the magnetized core block 17 is polished into a curved surface so as to have a predetermined gap depth, and the core block 17 is further sliced into pieces of a certain thickness to form core chips. Get 18. Thereafter, the core chip 18 is subjected to a winding operation to manufacture the magnetic head 19 shown in FIG. 1.

以上示した実施例は、VTR,R−DATなどに使用さ
れる磁気ヘッドの一例であるが、本発明はFDD等に使
用される磁気ヘッドにも適用可能である。
The embodiments described above are examples of magnetic heads used in VTRs, R-DATs, etc., but the present invention is also applicable to magnetic heads used in FDDs, etc.

次にFDDに使用される本発明の実施例を第18図乃至
第23図を参照しながら説明する。
Next, an embodiment of the present invention used in an FDD will be described with reference to FIGS. 18 to 23.

まず、第18図に示すような長尺なフェライトブロック
19.20を用意する。ただし、21はトラック溝、2
2はV溝、14aは上記トラック溝21とV溝22を充
填している低融点ガラスである。また、24は本発明の
特徴である凹溝であり、14は上記凹溝24を充填して
いる高融点ガラスである。次に、第19図のように上記
フェライトブロック20の接合予定面にセンダスト、ア
モルファス合金、あるいはパーマロイなどの強磁性金属
材料16を被着形成する。その後、上記フェライトブロ
ック19.20の接合予定面にSiO□等の非磁性薄膜
(図示せず)を被着形成し、さらに第20図に示すよう
に上記フェライトブロック19.20を低融点ガラス1
4aにて、加熱・溶着し一体化してコアブロック27を
得る。次に第21図に示すように、コイル挿入用溝28
を施し、第22図に示すように一定の厚さ毎にスライス
して第23図に示したコアチップ29を得る。その後、
第3図に示すように上記コアチップ29に、所定ターン
巻回された絶縁被膜処理のコイル30を装着し、バック
コア31を接着する。図示しないが、上記コアチップ2
9の両側方にスライダが固着される。
First, long ferrite blocks 19 and 20 as shown in FIG. 18 are prepared. However, 21 is a track groove, 2
2 is a V-groove, and 14a is a low-melting glass that fills the track groove 21 and V-groove 22. Further, 24 is a groove which is a feature of the present invention, and 14 is high melting point glass filling the groove 24. Next, as shown in FIG. 19, a ferromagnetic metal material 16 such as sendust, amorphous alloy, or permalloy is deposited on the surface of the ferrite block 20 to be joined. Thereafter, a non-magnetic thin film (not shown) such as SiO□ is deposited on the surface of the ferrite block 19.20 to be bonded, and as shown in FIG.
In step 4a, the core block 27 is obtained by heating and welding to integrate. Next, as shown in FIG. 21, the coil insertion groove 28
The core chip 29 shown in FIG. 23 is obtained by slicing the core chip into pieces of a certain thickness as shown in FIG. 22. after that,
As shown in FIG. 3, the core chip 29 is fitted with an insulating coated coil 30 wound in a predetermined number of turns, and a back core 31 is bonded. Although not shown, the core chip 2
Sliders are fixed to both sides of 9.

発l廊と祢呈− 本発明を実施すると、強磁性金属酸化物と強磁性金属薄
膜との間に常に適当な厚さのガラスの層が設けることが
でき、いわゆる疑似ギャップが形成されず、信頼性の高
い良品質で、しかも実施例で示したように量産性にも富
んだ磁気ヘッドが提供できる。また、本発明を実施した
磁気ヘッドの構造は第2図に示すような磁束Bを生じる
ため垂直磁気記録媒体を磁化させるのが容易であり、垂
直磁気記録再生装置への採用が可能となる。
When the present invention is carried out, a glass layer of an appropriate thickness can always be provided between the ferromagnetic metal oxide and the ferromagnetic metal thin film, and so-called pseudo gaps are not formed. It is possible to provide a magnetic head that is highly reliable, of good quality, and, as shown in the embodiments, is also highly mass-producible. Furthermore, since the structure of the magnetic head embodying the present invention generates a magnetic flux B as shown in FIG. 2, it is easy to magnetize a perpendicular magnetic recording medium, and it can be employed in a perpendicular magnetic recording/reproducing device.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図乃至第3図は本発明を実施して得られた磁気へラ
ドコアの例を示すもので、第2図は第1図の磁気ギヤツ
ブ近傍円A部分の拡大断面図を示す。第4図乃至第8図
は従来のMIGヘッドの例を示すもので、第5図、第8
図はTSS型及びパラレル型のMIGヘッドの頂端面を
示す拡大部分平面図である。第6図はTSS型MIGヘ
ッドの製造例を示す説明図である。第9図乃至第17図
及び第18図乃至第23図はそれぞれVTR,R−DA
T等の磁気ヘッド、FDD等の磁気ヘッドの本発明の実
施例を示す斜視図である。 1・・・・・・磁気ギャップ、 14・・・・・・高融点ガラス、 14a・・・・・・低融点ガラス、 16・・・・・・強磁性金属薄膜、 19・・・・・・VTR,、R−DAT等の磁気へラド
コア、 29・・・・・・FDD等の磁気へラドコア。 第 1 g だ 2 π z 3 】 簗 4 図 第 7 図 ス8二 第 9 図 610  囚 第 1コ 図 14■ 賃■ 15  図 汀 16 図 フ 17 0 14cL]4 第 ]9 π コ44゜ 第 20Z g 221 箒 23囚
1 to 3 show examples of magnetic herad cores obtained by implementing the present invention, and FIG. 2 shows an enlarged cross-sectional view of a portion of the circle A near the magnetic gear in FIG. 1. Figures 4 to 8 show examples of conventional MIG heads, and Figures 5 and 8 show examples of conventional MIG heads.
The figure is an enlarged partial plan view showing the top end surface of a TSS type and parallel type MIG head. FIG. 6 is an explanatory diagram showing an example of manufacturing a TSS type MIG head. Figures 9 to 17 and Figures 18 to 23 are for VTR and R-DA, respectively.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an embodiment of the present invention of a magnetic head such as a T-type magnetic head and a magnetic head such as an FDD. 1...Magnetic gap, 14...High melting point glass, 14a...Low melting point glass, 16...Ferromagnetic metal thin film, 19...・Magnetic core for VTR, R-DAT, etc. 29...Magnetic core for FDD, etc. 1st g da 2 π z 3 ] 4 Figure 7 Figure 82 9 Figure 610 Prisoner 1 Figure 14 20Z g 221 Broom 23 prisoners

Claims (1)

【特許請求の範囲】  強磁性金属酸化物よりなる磁気コア基板の接合面に、
真空薄膜形成技術により、強磁性金属薄膜を形成したコ
ア半体を互いに突き合わせて磁気ギャップを形成する磁
気ヘッドの製造方法において、上記基板の接合予定面内
のギャップ形成予定部分に凹溝を形成する工程と、 上記磁気コア基板の凹溝内部にガラスモールドを施す工
程と、 上記磁気コア基板に所定のトラック幅を残して複数のト
ラック溝を切削形成する工程と、上記磁気コア基板の接
合予定面を鏡面加工する工程と、 上記磁気コア基板の接合予定面に、強磁性金属薄膜を真
空薄膜形成せしめる工程とを含むことを特徴とする磁気
ヘッドの製造方法。
[Claims] On the bonding surface of a magnetic core substrate made of a ferromagnetic metal oxide,
In a method for manufacturing a magnetic head in which a magnetic gap is formed by abutting core halves formed with a ferromagnetic metal thin film against each other using vacuum thin film forming technology, a groove is formed in a portion where a gap is to be formed within a surface of the substrate to be bonded. a step of forming a glass mold inside the concave groove of the magnetic core substrate; a step of cutting and forming a plurality of track grooves on the magnetic core substrate leaving a predetermined track width; and a surface to be bonded of the magnetic core substrate. A method for manufacturing a magnetic head, comprising: mirror-finishing the magnetic core substrate; and forming a ferromagnetic metal thin film in vacuum on a surface of the magnetic core substrate to be bonded.
JP1298688A 1988-01-22 1988-01-22 Manufacture of magnetic head Pending JPH01189006A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1298688A JPH01189006A (en) 1988-01-22 1988-01-22 Manufacture of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1298688A JPH01189006A (en) 1988-01-22 1988-01-22 Manufacture of magnetic head

Publications (1)

Publication Number Publication Date
JPH01189006A true JPH01189006A (en) 1989-07-28

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP1298688A Pending JPH01189006A (en) 1988-01-22 1988-01-22 Manufacture of magnetic head

Country Status (1)

Country Link
JP (1) JPH01189006A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6295710A (en) * 1985-10-21 1987-05-02 Sharp Corp Composite magnetic head

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6295710A (en) * 1985-10-21 1987-05-02 Sharp Corp Composite magnetic head

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