JPH0118859Y2 - - Google Patents

Info

Publication number
JPH0118859Y2
JPH0118859Y2 JP1983007786U JP778683U JPH0118859Y2 JP H0118859 Y2 JPH0118859 Y2 JP H0118859Y2 JP 1983007786 U JP1983007786 U JP 1983007786U JP 778683 U JP778683 U JP 778683U JP H0118859 Y2 JPH0118859 Y2 JP H0118859Y2
Authority
JP
Japan
Prior art keywords
workpiece
vacuum pump
separator
liquid
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983007786U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59114470U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP778683U priority Critical patent/JPS59114470U/ja
Publication of JPS59114470U publication Critical patent/JPS59114470U/ja
Application granted granted Critical
Publication of JPH0118859Y2 publication Critical patent/JPH0118859Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP778683U 1983-01-21 1983-01-21 真空引き装置 Granted JPS59114470U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP778683U JPS59114470U (ja) 1983-01-21 1983-01-21 真空引き装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP778683U JPS59114470U (ja) 1983-01-21 1983-01-21 真空引き装置

Publications (2)

Publication Number Publication Date
JPS59114470U JPS59114470U (ja) 1984-08-02
JPH0118859Y2 true JPH0118859Y2 (enExample) 1989-06-01

Family

ID=30139304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP778683U Granted JPS59114470U (ja) 1983-01-21 1983-01-21 真空引き装置

Country Status (1)

Country Link
JP (1) JPS59114470U (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617720B2 (enExample) * 1972-12-25 1981-04-23

Also Published As

Publication number Publication date
JPS59114470U (ja) 1984-08-02

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